11/14/2011	7:57:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2011	7:57:36 AM	Recipe started at 7:57 AM
11/14/2011	7:57:36 AM	Helium valve closed
11/14/2011	7:57:36 AM	H2 valve closed
11/14/2011	7:57:36 AM	BCl3 valve closed
11/14/2011	7:57:36 AM	PH3 valve closed
11/14/2011	7:57:36 AM	SiCl4 pre valve closed
11/14/2011	7:57:36 AM	SiCl4 post valve closed
11/14/2011	7:57:36 AM	Main Vac valve closed
11/14/2011	7:57:36 AM	Bypass valve closed
11/14/2011	7:57:36 AM	Bubbler valve closed
11/14/2011	7:57:36 AM	Helium MFC set to  0.000000
11/14/2011	7:57:36 AM	H2 MFC set to  0.000000
11/14/2011	7:57:36 AM	BCl3 MFC set to  0.000000
11/14/2011	7:57:36 AM	PHl3 MFC set to  0.000000
11/14/2011	7:57:36 AM	SiCl4 MFC set to  0.000000
11/14/2011	7:57:36 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	7:57:37 AM	Tube furnace set to 0
11/14/2011	7:57:40 AM	H2 valve closed
11/14/2011	7:57:40 AM	BCl3 valve closed
11/14/2011	7:57:40 AM	PH3 valve closed
11/14/2011	7:57:40 AM	SiCl4 pre valve closed
11/14/2011	7:57:40 AM	SiCl4 post valve closed
11/14/2011	7:57:40 AM	Main Vac valve closed
11/14/2011	7:57:40 AM	Bypass valve closed
11/14/2011	7:57:40 AM	Bubbler valve closed
11/14/2011	7:57:40 AM	Helium valve opened
11/14/2011	7:57:40 AM	Helium MFC set to  500.000000
11/14/2011	7:57:40 AM	H2 MFC set to  0.000000
11/14/2011	7:57:40 AM	BCl3 MFC set to  0.000000
11/14/2011	7:57:40 AM	PHl3 MFC set to  0.000000
11/14/2011	7:57:40 AM	SiCl4 MFC set to  0.000000
11/14/2011	7:57:40 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	7:57:40 AM	Tube furnace set to 0
11/14/2011	7:58:45 AM	Helium valve closed
11/14/2011	7:58:45 AM	H2 valve closed
11/14/2011	7:58:45 AM	BCl3 valve closed
11/14/2011	7:58:45 AM	PH3 valve closed
11/14/2011	7:58:45 AM	SiCl4 pre valve closed
11/14/2011	7:58:45 AM	SiCl4 post valve closed
11/14/2011	7:58:45 AM	Main Vac valve closed
11/14/2011	7:58:45 AM	Bypass valve closed
11/14/2011	7:58:45 AM	Bubbler valve closed
11/14/2011	7:58:45 AM	Helium MFC set to  0.000000
11/14/2011	7:58:45 AM	H2 MFC set to  0.000000
11/14/2011	7:58:45 AM	BCl3 MFC set to  0.000000
11/14/2011	7:58:45 AM	PHl3 MFC set to  0.000000
11/14/2011	7:58:45 AM	SiCl4 MFC set to  0.000000
11/14/2011	7:58:45 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	7:58:45 AM	Tube furnace set to 0
11/14/2011	7:58:46 AM	Run finished at 7:58 AM
11/14/2011	7:58:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2011	8:13:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2011	8:13:03 AM	Recipe started at 8:13 AM
11/14/2011	8:13:03 AM	Helium valve closed
11/14/2011	8:13:03 AM	H2 valve closed
11/14/2011	8:13:03 AM	BCl3 valve closed
11/14/2011	8:13:03 AM	PH3 valve closed
11/14/2011	8:13:03 AM	SiCl4 pre valve closed
11/14/2011	8:13:03 AM	SiCl4 post valve closed
11/14/2011	8:13:03 AM	Main Vac valve closed
11/14/2011	8:13:03 AM	Bubbler valve closed
11/14/2011	8:13:03 AM	Bypass valve opened
11/14/2011	8:13:03 AM	Helium MFC set to  0.000000
11/14/2011	8:13:03 AM	H2 MFC set to  0.000000
11/14/2011	8:13:03 AM	BCl3 MFC set to  0.000000
11/14/2011	8:13:03 AM	PHl3 MFC set to  0.000000
11/14/2011	8:13:03 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:13:03 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:13:03 AM	Tube furnace set to 0
11/14/2011	8:14:14 AM	Helium valve closed
11/14/2011	8:14:14 AM	H2 valve closed
11/14/2011	8:14:14 AM	BCl3 valve closed
11/14/2011	8:14:14 AM	PH3 valve closed
11/14/2011	8:14:14 AM	SiCl4 pre valve closed
11/14/2011	8:14:14 AM	SiCl4 post valve closed
11/14/2011	8:14:14 AM	Main Vac valve closed
11/14/2011	8:14:14 AM	Bubbler valve closed
11/14/2011	8:14:14 AM	Bypass valve opened
11/14/2011	8:14:14 AM	Helium MFC set to  0.000000
11/14/2011	8:14:14 AM	H2 MFC set to  0.000000
11/14/2011	8:14:14 AM	BCl3 MFC set to  0.000000
11/14/2011	8:14:14 AM	PHl3 MFC set to  0.000000
11/14/2011	8:14:14 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:14:14 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:14:14 AM	Tube furnace set to 0
11/14/2011	8:15:14 AM	Helium valve closed
11/14/2011	8:15:14 AM	H2 valve closed
11/14/2011	8:15:14 AM	BCl3 valve closed
11/14/2011	8:15:14 AM	PH3 valve closed
11/14/2011	8:15:14 AM	SiCl4 pre valve closed
11/14/2011	8:15:14 AM	SiCl4 post valve closed
11/14/2011	8:15:14 AM	Bypass valve closed
11/14/2011	8:15:14 AM	Bubbler valve closed
11/14/2011	8:15:14 AM	Main Vac valve opened
11/14/2011	8:15:14 AM	Helium MFC set to  0.000000
11/14/2011	8:15:14 AM	H2 MFC set to  0.000000
11/14/2011	8:15:14 AM	BCl3 MFC set to  0.000000
11/14/2011	8:15:14 AM	PHl3 MFC set to  0.000000
11/14/2011	8:15:14 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:15:14 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:15:14 AM	Tube furnace set to 0
11/14/2011	8:15:15 AM	Run finished at 8:15 AM
11/14/2011	8:15:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2011	8:25:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
11/14/2011	8:25:33 AM	Recipe started at 8:25 AM
11/14/2011	8:25:33 AM	Helium valve closed
11/14/2011	8:25:33 AM	H2 valve closed
11/14/2011	8:25:33 AM	BCl3 valve closed
11/14/2011	8:25:33 AM	PH3 valve closed
11/14/2011	8:25:33 AM	SiCl4 pre valve closed
11/14/2011	8:25:33 AM	SiCl4 post valve closed
11/14/2011	8:25:33 AM	Main Vac valve closed
11/14/2011	8:25:33 AM	Bubbler valve closed
11/14/2011	8:25:33 AM	Bypass valve opened
11/14/2011	8:25:33 AM	Helium MFC set to  0.000000
11/14/2011	8:25:33 AM	H2 MFC set to  0.000000
11/14/2011	8:25:33 AM	BCl3 MFC set to  0.000000
11/14/2011	8:25:33 AM	PHl3 MFC set to  0.000000
11/14/2011	8:25:33 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:25:33 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:25:33 AM	Tube furnace set to 0
11/14/2011	8:25:33 AM	Helium valve closed
11/14/2011	8:25:33 AM	H2 valve closed
11/14/2011	8:25:33 AM	BCl3 valve closed
11/14/2011	8:25:33 AM	PH3 valve closed
11/14/2011	8:25:33 AM	SiCl4 pre valve closed
11/14/2011	8:25:33 AM	SiCl4 post valve closed
11/14/2011	8:25:33 AM	Main Vac valve closed
11/14/2011	8:25:33 AM	Bubbler valve closed
11/14/2011	8:25:33 AM	Bypass valve opened
11/14/2011	8:25:33 AM	Helium MFC set to  0.000000
11/14/2011	8:25:33 AM	H2 MFC set to  0.000000
11/14/2011	8:25:33 AM	BCl3 MFC set to  0.000000
11/14/2011	8:25:33 AM	PHl3 MFC set to  0.000000
11/14/2011	8:25:33 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:25:33 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:25:34 AM	Tube furnace set to 0
11/14/2011	8:26:04 AM	Helium valve closed
11/14/2011	8:26:04 AM	H2 valve closed
11/14/2011	8:26:04 AM	BCl3 valve closed
11/14/2011	8:26:04 AM	PH3 valve closed
11/14/2011	8:26:04 AM	SiCl4 pre valve closed
11/14/2011	8:26:04 AM	SiCl4 post valve closed
11/14/2011	8:26:04 AM	Bypass valve closed
11/14/2011	8:26:04 AM	Bubbler valve closed
11/14/2011	8:26:04 AM	Main Vac valve opened
11/14/2011	8:26:04 AM	Helium MFC set to  0.000000
11/14/2011	8:26:04 AM	H2 MFC set to  0.000000
11/14/2011	8:26:04 AM	BCl3 MFC set to  0.000000
11/14/2011	8:26:04 AM	PHl3 MFC set to  0.000000
11/14/2011	8:26:04 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:26:04 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:26:04 AM	Tube furnace set to 0
11/14/2011	8:26:34 AM	H2 valve closed
11/14/2011	8:26:34 AM	BCl3 valve closed
11/14/2011	8:26:34 AM	PH3 valve closed
11/14/2011	8:26:34 AM	SiCl4 pre valve closed
11/14/2011	8:26:34 AM	SiCl4 post valve closed
11/14/2011	8:26:34 AM	Bypass valve closed
11/14/2011	8:26:34 AM	Bubbler valve closed
11/14/2011	8:26:34 AM	Helium valve opened
11/14/2011	8:26:34 AM	Main Vac valve opened
11/14/2011	8:26:34 AM	Helium MFC set to  20.000000
11/14/2011	8:26:34 AM	H2 MFC set to  0.000000
11/14/2011	8:26:34 AM	BCl3 MFC set to  0.000000
11/14/2011	8:26:34 AM	PHl3 MFC set to  0.000000
11/14/2011	8:26:34 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:26:34 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:26:34 AM	Tube furnace set to 0
11/14/2011	8:27:04 AM	Helium valve closed
11/14/2011	8:27:04 AM	H2 valve closed
11/14/2011	8:27:04 AM	BCl3 valve closed
11/14/2011	8:27:04 AM	PH3 valve closed
11/14/2011	8:27:04 AM	SiCl4 pre valve closed
11/14/2011	8:27:04 AM	SiCl4 post valve closed
11/14/2011	8:27:04 AM	Bypass valve closed
11/14/2011	8:27:04 AM	Bubbler valve closed
11/14/2011	8:27:04 AM	Main Vac valve opened
11/14/2011	8:27:04 AM	Helium MFC set to  0.000000
11/14/2011	8:27:04 AM	H2 MFC set to  0.000000
11/14/2011	8:27:04 AM	BCl3 MFC set to  0.000000
11/14/2011	8:27:04 AM	PHl3 MFC set to  0.000000
11/14/2011	8:27:04 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:27:04 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:27:04 AM	Tube furnace set to 0
11/14/2011	8:27:34 AM	H2 valve closed
11/14/2011	8:27:34 AM	BCl3 valve closed
11/14/2011	8:27:34 AM	PH3 valve closed
11/14/2011	8:27:34 AM	SiCl4 pre valve closed
11/14/2011	8:27:34 AM	SiCl4 post valve closed
11/14/2011	8:27:34 AM	Bypass valve closed
11/14/2011	8:27:34 AM	Bubbler valve closed
11/14/2011	8:27:34 AM	Helium valve opened
11/14/2011	8:27:34 AM	Main Vac valve opened
11/14/2011	8:27:34 AM	Helium MFC set to  20.000000
11/14/2011	8:27:34 AM	H2 MFC set to  0.000000
11/14/2011	8:27:34 AM	BCl3 MFC set to  0.000000
11/14/2011	8:27:34 AM	PHl3 MFC set to  0.000000
11/14/2011	8:27:34 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:27:34 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:27:34 AM	Tube furnace set to 0
11/14/2011	8:28:04 AM	Helium valve closed
11/14/2011	8:28:04 AM	H2 valve closed
11/14/2011	8:28:04 AM	BCl3 valve closed
11/14/2011	8:28:04 AM	PH3 valve closed
11/14/2011	8:28:04 AM	SiCl4 pre valve closed
11/14/2011	8:28:04 AM	SiCl4 post valve closed
11/14/2011	8:28:04 AM	Bypass valve closed
11/14/2011	8:28:04 AM	Bubbler valve closed
11/14/2011	8:28:04 AM	Main Vac valve opened
11/14/2011	8:28:04 AM	Helium MFC set to  0.000000
11/14/2011	8:28:04 AM	H2 MFC set to  0.000000
11/14/2011	8:28:04 AM	BCl3 MFC set to  0.000000
11/14/2011	8:28:04 AM	PHl3 MFC set to  0.000000
11/14/2011	8:28:04 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:28:04 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:28:05 AM	Tube furnace set to 0
11/14/2011	8:28:35 AM	H2 valve closed
11/14/2011	8:28:35 AM	BCl3 valve closed
11/14/2011	8:28:35 AM	PH3 valve closed
11/14/2011	8:28:35 AM	SiCl4 pre valve closed
11/14/2011	8:28:35 AM	SiCl4 post valve closed
11/14/2011	8:28:35 AM	Bypass valve closed
11/14/2011	8:28:35 AM	Bubbler valve closed
11/14/2011	8:28:35 AM	Helium valve opened
11/14/2011	8:28:35 AM	Main Vac valve opened
11/14/2011	8:28:35 AM	Helium MFC set to  20.000000
11/14/2011	8:28:35 AM	H2 MFC set to  0.000000
11/14/2011	8:28:35 AM	BCl3 MFC set to  0.000000
11/14/2011	8:28:35 AM	PHl3 MFC set to  0.000000
11/14/2011	8:28:35 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:28:35 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:28:35 AM	Tube furnace set to 0
11/14/2011	8:29:05 AM	Helium valve closed
11/14/2011	8:29:05 AM	H2 valve closed
11/14/2011	8:29:05 AM	BCl3 valve closed
11/14/2011	8:29:05 AM	PH3 valve closed
11/14/2011	8:29:05 AM	SiCl4 pre valve closed
11/14/2011	8:29:05 AM	SiCl4 post valve closed
11/14/2011	8:29:05 AM	Bypass valve closed
11/14/2011	8:29:05 AM	Bubbler valve closed
11/14/2011	8:29:05 AM	Main Vac valve opened
11/14/2011	8:29:05 AM	Helium MFC set to  0.000000
11/14/2011	8:29:05 AM	H2 MFC set to  0.000000
11/14/2011	8:29:05 AM	BCl3 MFC set to  0.000000
11/14/2011	8:29:05 AM	PHl3 MFC set to  0.000000
11/14/2011	8:29:05 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:29:05 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:29:05 AM	Tube furnace set to 0
11/14/2011	8:29:35 AM	H2 valve closed
11/14/2011	8:29:35 AM	BCl3 valve closed
11/14/2011	8:29:35 AM	PH3 valve closed
11/14/2011	8:29:35 AM	SiCl4 pre valve closed
11/14/2011	8:29:35 AM	SiCl4 post valve closed
11/14/2011	8:29:35 AM	Bypass valve closed
11/14/2011	8:29:35 AM	Bubbler valve closed
11/14/2011	8:29:35 AM	Helium valve opened
11/14/2011	8:29:35 AM	Main Vac valve opened
11/14/2011	8:29:35 AM	Helium MFC set to  20.000000
11/14/2011	8:29:35 AM	H2 MFC set to  0.000000
11/14/2011	8:29:35 AM	BCl3 MFC set to  0.000000
11/14/2011	8:29:35 AM	PHl3 MFC set to  0.000000
11/14/2011	8:29:35 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:29:35 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:29:35 AM	Tube furnace set to 0
11/14/2011	8:30:05 AM	Helium valve closed
11/14/2011	8:30:05 AM	H2 valve closed
11/14/2011	8:30:05 AM	BCl3 valve closed
11/14/2011	8:30:05 AM	PH3 valve closed
11/14/2011	8:30:05 AM	SiCl4 pre valve closed
11/14/2011	8:30:05 AM	SiCl4 post valve closed
11/14/2011	8:30:05 AM	Bypass valve closed
11/14/2011	8:30:05 AM	Bubbler valve closed
11/14/2011	8:30:05 AM	Main Vac valve opened
11/14/2011	8:30:05 AM	Helium MFC set to  0.000000
11/14/2011	8:30:05 AM	H2 MFC set to  0.000000
11/14/2011	8:30:05 AM	BCl3 MFC set to  0.000000
11/14/2011	8:30:05 AM	PHl3 MFC set to  0.000000
11/14/2011	8:30:05 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:30:05 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:30:05 AM	Tube furnace set to 0
11/14/2011	8:30:35 AM	H2 valve closed
11/14/2011	8:30:35 AM	BCl3 valve closed
11/14/2011	8:30:35 AM	PH3 valve closed
11/14/2011	8:30:35 AM	SiCl4 pre valve closed
11/14/2011	8:30:35 AM	SiCl4 post valve closed
11/14/2011	8:30:35 AM	Bypass valve closed
11/14/2011	8:30:35 AM	Bubbler valve closed
11/14/2011	8:30:35 AM	Helium valve opened
11/14/2011	8:30:35 AM	Main Vac valve opened
11/14/2011	8:30:35 AM	Helium MFC set to  20.000000
11/14/2011	8:30:35 AM	H2 MFC set to  0.000000
11/14/2011	8:30:35 AM	BCl3 MFC set to  0.000000
11/14/2011	8:30:35 AM	PHl3 MFC set to  0.000000
11/14/2011	8:30:35 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:30:35 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:30:36 AM	Tube furnace set to 0
11/14/2011	8:31:06 AM	Helium valve closed
11/14/2011	8:31:06 AM	H2 valve closed
11/14/2011	8:31:06 AM	BCl3 valve closed
11/14/2011	8:31:06 AM	PH3 valve closed
11/14/2011	8:31:06 AM	SiCl4 pre valve closed
11/14/2011	8:31:06 AM	SiCl4 post valve closed
11/14/2011	8:31:06 AM	Bypass valve closed
11/14/2011	8:31:06 AM	Bubbler valve closed
11/14/2011	8:31:06 AM	Main Vac valve opened
11/14/2011	8:31:06 AM	Helium MFC set to  0.000000
11/14/2011	8:31:06 AM	H2 MFC set to  0.000000
11/14/2011	8:31:06 AM	BCl3 MFC set to  0.000000
11/14/2011	8:31:06 AM	PHl3 MFC set to  0.000000
11/14/2011	8:31:06 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:31:06 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:31:06 AM	Tube furnace set to 0
11/14/2011	8:31:36 AM	H2 valve closed
11/14/2011	8:31:36 AM	BCl3 valve closed
11/14/2011	8:31:36 AM	PH3 valve closed
11/14/2011	8:31:36 AM	SiCl4 pre valve closed
11/14/2011	8:31:36 AM	SiCl4 post valve closed
11/14/2011	8:31:36 AM	Bypass valve closed
11/14/2011	8:31:36 AM	Bubbler valve closed
11/14/2011	8:31:36 AM	Helium valve opened
11/14/2011	8:31:36 AM	Main Vac valve opened
11/14/2011	8:31:36 AM	Helium MFC set to  20.000000
11/14/2011	8:31:36 AM	H2 MFC set to  0.000000
11/14/2011	8:31:36 AM	BCl3 MFC set to  0.000000
11/14/2011	8:31:36 AM	PHl3 MFC set to  0.000000
11/14/2011	8:31:36 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:31:36 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:31:36 AM	Tube furnace set to 0
11/14/2011	8:32:06 AM	Helium valve closed
11/14/2011	8:32:06 AM	H2 valve closed
11/14/2011	8:32:06 AM	BCl3 valve closed
11/14/2011	8:32:06 AM	PH3 valve closed
11/14/2011	8:32:06 AM	SiCl4 pre valve closed
11/14/2011	8:32:06 AM	SiCl4 post valve closed
11/14/2011	8:32:06 AM	Bypass valve closed
11/14/2011	8:32:06 AM	Bubbler valve closed
11/14/2011	8:32:06 AM	Main Vac valve opened
11/14/2011	8:32:06 AM	Helium MFC set to  0.000000
11/14/2011	8:32:06 AM	H2 MFC set to  0.000000
11/14/2011	8:32:06 AM	BCl3 MFC set to  0.000000
11/14/2011	8:32:06 AM	PHl3 MFC set to  0.000000
11/14/2011	8:32:06 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:32:06 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:32:06 AM	Tube furnace set to 0
11/14/2011	8:32:36 AM	H2 valve closed
11/14/2011	8:32:36 AM	BCl3 valve closed
11/14/2011	8:32:36 AM	PH3 valve closed
11/14/2011	8:32:36 AM	SiCl4 pre valve closed
11/14/2011	8:32:36 AM	SiCl4 post valve closed
11/14/2011	8:32:36 AM	Bypass valve closed
11/14/2011	8:32:36 AM	Bubbler valve closed
11/14/2011	8:32:36 AM	Helium valve opened
11/14/2011	8:32:36 AM	Main Vac valve opened
11/14/2011	8:32:36 AM	Helium MFC set to  20.000000
11/14/2011	8:32:36 AM	H2 MFC set to  0.000000
11/14/2011	8:32:36 AM	BCl3 MFC set to  0.000000
11/14/2011	8:32:36 AM	PHl3 MFC set to  0.000000
11/14/2011	8:32:36 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:32:36 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:32:36 AM	Tube furnace set to 0
11/14/2011	8:33:06 AM	Helium valve closed
11/14/2011	8:33:06 AM	H2 valve closed
11/14/2011	8:33:06 AM	BCl3 valve closed
11/14/2011	8:33:06 AM	PH3 valve closed
11/14/2011	8:33:06 AM	SiCl4 pre valve closed
11/14/2011	8:33:06 AM	SiCl4 post valve closed
11/14/2011	8:33:06 AM	Bypass valve closed
11/14/2011	8:33:06 AM	Bubbler valve closed
11/14/2011	8:33:06 AM	Main Vac valve opened
11/14/2011	8:33:06 AM	Helium MFC set to  0.000000
11/14/2011	8:33:06 AM	H2 MFC set to  0.000000
11/14/2011	8:33:06 AM	BCl3 MFC set to  0.000000
11/14/2011	8:33:06 AM	PHl3 MFC set to  0.000000
11/14/2011	8:33:06 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:33:06 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:33:07 AM	Tube furnace set to 0
11/14/2011	8:33:37 AM	H2 valve closed
11/14/2011	8:33:37 AM	BCl3 valve closed
11/14/2011	8:33:37 AM	PH3 valve closed
11/14/2011	8:33:37 AM	SiCl4 pre valve closed
11/14/2011	8:33:37 AM	SiCl4 post valve closed
11/14/2011	8:33:37 AM	Bypass valve closed
11/14/2011	8:33:37 AM	Bubbler valve closed
11/14/2011	8:33:37 AM	Helium valve opened
11/14/2011	8:33:37 AM	Main Vac valve opened
11/14/2011	8:33:37 AM	Helium MFC set to  20.000000
11/14/2011	8:33:37 AM	H2 MFC set to  0.000000
11/14/2011	8:33:37 AM	BCl3 MFC set to  0.000000
11/14/2011	8:33:37 AM	PHl3 MFC set to  0.000000
11/14/2011	8:33:37 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:33:37 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:33:37 AM	Tube furnace set to 0
11/14/2011	8:34:07 AM	Helium valve closed
11/14/2011	8:34:07 AM	H2 valve closed
11/14/2011	8:34:07 AM	BCl3 valve closed
11/14/2011	8:34:07 AM	PH3 valve closed
11/14/2011	8:34:07 AM	SiCl4 pre valve closed
11/14/2011	8:34:07 AM	SiCl4 post valve closed
11/14/2011	8:34:07 AM	Bypass valve closed
11/14/2011	8:34:07 AM	Bubbler valve closed
11/14/2011	8:34:07 AM	Main Vac valve opened
11/14/2011	8:34:07 AM	Helium MFC set to  0.000000
11/14/2011	8:34:07 AM	H2 MFC set to  0.000000
11/14/2011	8:34:07 AM	BCl3 MFC set to  0.000000
11/14/2011	8:34:07 AM	PHl3 MFC set to  0.000000
11/14/2011	8:34:07 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:34:07 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:34:07 AM	Tube furnace set to 0
11/14/2011	8:34:37 AM	H2 valve closed
11/14/2011	8:34:37 AM	BCl3 valve closed
11/14/2011	8:34:37 AM	PH3 valve closed
11/14/2011	8:34:37 AM	SiCl4 pre valve closed
11/14/2011	8:34:37 AM	SiCl4 post valve closed
11/14/2011	8:34:37 AM	Bypass valve closed
11/14/2011	8:34:37 AM	Bubbler valve closed
11/14/2011	8:34:37 AM	Helium valve opened
11/14/2011	8:34:37 AM	Main Vac valve opened
11/14/2011	8:34:37 AM	Helium MFC set to  20.000000
11/14/2011	8:34:37 AM	H2 MFC set to  0.000000
11/14/2011	8:34:37 AM	BCl3 MFC set to  0.000000
11/14/2011	8:34:37 AM	PHl3 MFC set to  0.000000
11/14/2011	8:34:37 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:34:37 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:34:37 AM	Tube furnace set to 0
11/14/2011	8:35:07 AM	Helium valve closed
11/14/2011	8:35:07 AM	H2 valve closed
11/14/2011	8:35:07 AM	BCl3 valve closed
11/14/2011	8:35:07 AM	PH3 valve closed
11/14/2011	8:35:07 AM	SiCl4 pre valve closed
11/14/2011	8:35:07 AM	SiCl4 post valve closed
11/14/2011	8:35:07 AM	Bypass valve closed
11/14/2011	8:35:07 AM	Bubbler valve closed
11/14/2011	8:35:07 AM	Main Vac valve opened
11/14/2011	8:35:07 AM	Helium MFC set to  0.000000
11/14/2011	8:35:07 AM	H2 MFC set to  0.000000
11/14/2011	8:35:07 AM	BCl3 MFC set to  0.000000
11/14/2011	8:35:07 AM	PHl3 MFC set to  0.000000
11/14/2011	8:35:07 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:35:07 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:35:07 AM	Tube furnace set to 0
11/14/2011	8:35:37 AM	H2 valve closed
11/14/2011	8:35:37 AM	BCl3 valve closed
11/14/2011	8:35:37 AM	PH3 valve closed
11/14/2011	8:35:37 AM	SiCl4 pre valve closed
11/14/2011	8:35:37 AM	SiCl4 post valve closed
11/14/2011	8:35:37 AM	Bypass valve closed
11/14/2011	8:35:37 AM	Bubbler valve closed
11/14/2011	8:35:37 AM	Helium valve opened
11/14/2011	8:35:37 AM	Main Vac valve opened
11/14/2011	8:35:37 AM	Helium MFC set to  20.000000
11/14/2011	8:35:37 AM	H2 MFC set to  0.000000
11/14/2011	8:35:37 AM	BCl3 MFC set to  0.000000
11/14/2011	8:35:37 AM	PHl3 MFC set to  0.000000
11/14/2011	8:35:37 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:35:37 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:35:38 AM	Tube furnace set to 0
11/14/2011	8:36:08 AM	Helium valve closed
11/14/2011	8:36:08 AM	H2 valve closed
11/14/2011	8:36:08 AM	BCl3 valve closed
11/14/2011	8:36:08 AM	PH3 valve closed
11/14/2011	8:36:08 AM	SiCl4 pre valve closed
11/14/2011	8:36:08 AM	SiCl4 post valve closed
11/14/2011	8:36:08 AM	Bypass valve closed
11/14/2011	8:36:08 AM	Bubbler valve closed
11/14/2011	8:36:08 AM	Main Vac valve opened
11/14/2011	8:36:08 AM	Helium MFC set to  0.000000
11/14/2011	8:36:08 AM	H2 MFC set to  0.000000
11/14/2011	8:36:08 AM	BCl3 MFC set to  0.000000
11/14/2011	8:36:08 AM	PHl3 MFC set to  0.000000
11/14/2011	8:36:08 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:36:08 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:36:08 AM	Tube furnace set to 0
11/14/2011	8:36:09 AM	Run finished at 8:36 AM
11/14/2011	8:36:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
11/14/2011	8:37:15 AM	Recipe started at 8:37 AM
11/14/2011	8:37:15 AM	Helium valve closed
11/14/2011	8:37:15 AM	H2 valve closed
11/14/2011	8:37:15 AM	BCl3 valve closed
11/14/2011	8:37:15 AM	PH3 valve closed
11/14/2011	8:37:15 AM	SiCl4 pre valve closed
11/14/2011	8:37:15 AM	SiCl4 post valve closed
11/14/2011	8:37:15 AM	Bypass valve closed
11/14/2011	8:37:15 AM	Bubbler valve closed
11/14/2011	8:37:15 AM	Main Vac valve opened
11/14/2011	8:37:15 AM	Helium MFC set to  0.000000
11/14/2011	8:37:15 AM	H2 MFC set to  0.000000
11/14/2011	8:37:15 AM	BCl3 MFC set to  0.000000
11/14/2011	8:37:15 AM	PHl3 MFC set to  0.000000
11/14/2011	8:37:15 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:37:15 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:37:16 AM	Tube furnace set to 150
11/14/2011	8:37:46 AM	H2 valve closed
11/14/2011	8:37:46 AM	BCl3 valve closed
11/14/2011	8:37:46 AM	PH3 valve closed
11/14/2011	8:37:46 AM	SiCl4 pre valve closed
11/14/2011	8:37:46 AM	SiCl4 post valve closed
11/14/2011	8:37:46 AM	Bypass valve closed
11/14/2011	8:37:46 AM	Bubbler valve closed
11/14/2011	8:37:46 AM	Helium valve opened
11/14/2011	8:37:46 AM	Main Vac valve opened
11/14/2011	8:37:46 AM	Helium MFC set to  20.000000
11/14/2011	8:37:46 AM	H2 MFC set to  0.000000
11/14/2011	8:37:46 AM	BCl3 MFC set to  0.000000
11/14/2011	8:37:46 AM	PHl3 MFC set to  0.000000
11/14/2011	8:37:46 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:37:46 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:37:46 AM	Tube furnace set to 150
11/14/2011	8:38:16 AM	Helium valve closed
11/14/2011	8:38:16 AM	H2 valve closed
11/14/2011	8:38:16 AM	BCl3 valve closed
11/14/2011	8:38:16 AM	PH3 valve closed
11/14/2011	8:38:16 AM	SiCl4 pre valve closed
11/14/2011	8:38:16 AM	SiCl4 post valve closed
11/14/2011	8:38:16 AM	Bypass valve closed
11/14/2011	8:38:16 AM	Bubbler valve closed
11/14/2011	8:38:16 AM	Main Vac valve opened
11/14/2011	8:38:16 AM	Helium MFC set to  0.000000
11/14/2011	8:38:16 AM	H2 MFC set to  0.000000
11/14/2011	8:38:16 AM	BCl3 MFC set to  0.000000
11/14/2011	8:38:16 AM	PHl3 MFC set to  0.000000
11/14/2011	8:38:16 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:38:16 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:38:16 AM	Tube furnace set to 150
11/14/2011	8:38:46 AM	H2 valve closed
11/14/2011	8:38:46 AM	BCl3 valve closed
11/14/2011	8:38:46 AM	PH3 valve closed
11/14/2011	8:38:46 AM	SiCl4 pre valve closed
11/14/2011	8:38:46 AM	SiCl4 post valve closed
11/14/2011	8:38:46 AM	Bypass valve closed
11/14/2011	8:38:46 AM	Bubbler valve closed
11/14/2011	8:38:46 AM	Helium valve opened
11/14/2011	8:38:46 AM	Main Vac valve opened
11/14/2011	8:38:46 AM	Helium MFC set to  20.000000
11/14/2011	8:38:46 AM	H2 MFC set to  0.000000
11/14/2011	8:38:46 AM	BCl3 MFC set to  0.000000
11/14/2011	8:38:46 AM	PHl3 MFC set to  0.000000
11/14/2011	8:38:46 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:38:46 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:38:46 AM	Tube furnace set to 150
11/14/2011	8:39:16 AM	Helium valve closed
11/14/2011	8:39:16 AM	H2 valve closed
11/14/2011	8:39:16 AM	BCl3 valve closed
11/14/2011	8:39:16 AM	PH3 valve closed
11/14/2011	8:39:16 AM	SiCl4 pre valve closed
11/14/2011	8:39:16 AM	SiCl4 post valve closed
11/14/2011	8:39:16 AM	Bypass valve closed
11/14/2011	8:39:16 AM	Bubbler valve closed
11/14/2011	8:39:16 AM	Main Vac valve opened
11/14/2011	8:39:16 AM	Helium MFC set to  0.000000
11/14/2011	8:39:16 AM	H2 MFC set to  0.000000
11/14/2011	8:39:16 AM	BCl3 MFC set to  0.000000
11/14/2011	8:39:16 AM	PHl3 MFC set to  0.000000
11/14/2011	8:39:16 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:39:16 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:39:16 AM	Tube furnace set to 150
11/14/2011	8:39:46 AM	H2 valve closed
11/14/2011	8:39:46 AM	BCl3 valve closed
11/14/2011	8:39:46 AM	PH3 valve closed
11/14/2011	8:39:46 AM	SiCl4 pre valve closed
11/14/2011	8:39:46 AM	SiCl4 post valve closed
11/14/2011	8:39:46 AM	Bypass valve closed
11/14/2011	8:39:46 AM	Bubbler valve closed
11/14/2011	8:39:46 AM	Helium valve opened
11/14/2011	8:39:46 AM	Main Vac valve opened
11/14/2011	8:39:46 AM	Helium MFC set to  20.000000
11/14/2011	8:39:46 AM	H2 MFC set to  0.000000
11/14/2011	8:39:46 AM	BCl3 MFC set to  0.000000
11/14/2011	8:39:46 AM	PHl3 MFC set to  0.000000
11/14/2011	8:39:46 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:39:46 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:39:47 AM	Tube furnace set to 150
11/14/2011	8:40:17 AM	Helium valve closed
11/14/2011	8:40:17 AM	H2 valve closed
11/14/2011	8:40:17 AM	BCl3 valve closed
11/14/2011	8:40:17 AM	PH3 valve closed
11/14/2011	8:40:17 AM	SiCl4 pre valve closed
11/14/2011	8:40:17 AM	SiCl4 post valve closed
11/14/2011	8:40:17 AM	Bypass valve closed
11/14/2011	8:40:17 AM	Bubbler valve closed
11/14/2011	8:40:17 AM	Main Vac valve opened
11/14/2011	8:40:17 AM	Helium MFC set to  0.000000
11/14/2011	8:40:17 AM	H2 MFC set to  0.000000
11/14/2011	8:40:17 AM	BCl3 MFC set to  0.000000
11/14/2011	8:40:17 AM	PHl3 MFC set to  0.000000
11/14/2011	8:40:17 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:40:17 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:40:17 AM	Tube furnace set to 150
11/14/2011	8:40:47 AM	H2 valve closed
11/14/2011	8:40:47 AM	BCl3 valve closed
11/14/2011	8:40:47 AM	PH3 valve closed
11/14/2011	8:40:47 AM	SiCl4 pre valve closed
11/14/2011	8:40:47 AM	SiCl4 post valve closed
11/14/2011	8:40:47 AM	Bypass valve closed
11/14/2011	8:40:47 AM	Bubbler valve closed
11/14/2011	8:40:47 AM	Helium valve opened
11/14/2011	8:40:47 AM	Main Vac valve opened
11/14/2011	8:40:47 AM	Helium MFC set to  20.000000
11/14/2011	8:40:47 AM	H2 MFC set to  0.000000
11/14/2011	8:40:47 AM	BCl3 MFC set to  0.000000
11/14/2011	8:40:47 AM	PHl3 MFC set to  0.000000
11/14/2011	8:40:47 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:40:47 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:40:47 AM	Tube furnace set to 150
11/14/2011	8:41:17 AM	Helium valve closed
11/14/2011	8:41:17 AM	H2 valve closed
11/14/2011	8:41:17 AM	BCl3 valve closed
11/14/2011	8:41:17 AM	PH3 valve closed
11/14/2011	8:41:17 AM	SiCl4 pre valve closed
11/14/2011	8:41:17 AM	SiCl4 post valve closed
11/14/2011	8:41:17 AM	Bypass valve closed
11/14/2011	8:41:17 AM	Bubbler valve closed
11/14/2011	8:41:17 AM	Main Vac valve opened
11/14/2011	8:41:17 AM	Helium MFC set to  0.000000
11/14/2011	8:41:17 AM	H2 MFC set to  0.000000
11/14/2011	8:41:17 AM	BCl3 MFC set to  0.000000
11/14/2011	8:41:17 AM	PHl3 MFC set to  0.000000
11/14/2011	8:41:17 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:41:17 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:41:17 AM	Tube furnace set to 150
11/14/2011	8:41:47 AM	H2 valve closed
11/14/2011	8:41:47 AM	BCl3 valve closed
11/14/2011	8:41:47 AM	PH3 valve closed
11/14/2011	8:41:47 AM	SiCl4 pre valve closed
11/14/2011	8:41:47 AM	SiCl4 post valve closed
11/14/2011	8:41:47 AM	Bypass valve closed
11/14/2011	8:41:47 AM	Bubbler valve closed
11/14/2011	8:41:47 AM	Helium valve opened
11/14/2011	8:41:47 AM	Main Vac valve opened
11/14/2011	8:41:47 AM	Helium MFC set to  20.000000
11/14/2011	8:41:47 AM	H2 MFC set to  0.000000
11/14/2011	8:41:47 AM	BCl3 MFC set to  0.000000
11/14/2011	8:41:47 AM	PHl3 MFC set to  0.000000
11/14/2011	8:41:47 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:41:47 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:41:47 AM	Tube furnace set to 150
11/14/2011	8:42:18 AM	Helium valve closed
11/14/2011	8:42:18 AM	H2 valve closed
11/14/2011	8:42:18 AM	BCl3 valve closed
11/14/2011	8:42:18 AM	PH3 valve closed
11/14/2011	8:42:18 AM	SiCl4 pre valve closed
11/14/2011	8:42:18 AM	SiCl4 post valve closed
11/14/2011	8:42:18 AM	Bypass valve closed
11/14/2011	8:42:18 AM	Bubbler valve closed
11/14/2011	8:42:18 AM	Main Vac valve opened
11/14/2011	8:42:18 AM	Helium MFC set to  0.000000
11/14/2011	8:42:18 AM	H2 MFC set to  0.000000
11/14/2011	8:42:18 AM	BCl3 MFC set to  0.000000
11/14/2011	8:42:18 AM	PHl3 MFC set to  0.000000
11/14/2011	8:42:18 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:42:18 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:42:18 AM	Tube furnace set to 150
11/14/2011	8:42:48 AM	H2 valve closed
11/14/2011	8:42:48 AM	BCl3 valve closed
11/14/2011	8:42:48 AM	PH3 valve closed
11/14/2011	8:42:48 AM	SiCl4 pre valve closed
11/14/2011	8:42:48 AM	SiCl4 post valve closed
11/14/2011	8:42:48 AM	Bypass valve closed
11/14/2011	8:42:48 AM	Bubbler valve closed
11/14/2011	8:42:48 AM	Helium valve opened
11/14/2011	8:42:48 AM	Main Vac valve opened
11/14/2011	8:42:48 AM	Helium MFC set to  20.000000
11/14/2011	8:42:48 AM	H2 MFC set to  0.000000
11/14/2011	8:42:48 AM	BCl3 MFC set to  0.000000
11/14/2011	8:42:48 AM	PHl3 MFC set to  0.000000
11/14/2011	8:42:48 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:42:48 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:42:48 AM	Tube furnace set to 150
11/14/2011	8:43:18 AM	Helium valve closed
11/14/2011	8:43:18 AM	H2 valve closed
11/14/2011	8:43:18 AM	BCl3 valve closed
11/14/2011	8:43:18 AM	PH3 valve closed
11/14/2011	8:43:18 AM	SiCl4 pre valve closed
11/14/2011	8:43:18 AM	SiCl4 post valve closed
11/14/2011	8:43:18 AM	Bypass valve closed
11/14/2011	8:43:18 AM	Bubbler valve closed
11/14/2011	8:43:18 AM	Main Vac valve opened
11/14/2011	8:43:18 AM	Helium MFC set to  0.000000
11/14/2011	8:43:18 AM	H2 MFC set to  0.000000
11/14/2011	8:43:18 AM	BCl3 MFC set to  0.000000
11/14/2011	8:43:18 AM	PHl3 MFC set to  0.000000
11/14/2011	8:43:18 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:43:18 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:43:18 AM	Tube furnace set to 150
11/14/2011	8:43:48 AM	H2 valve closed
11/14/2011	8:43:48 AM	BCl3 valve closed
11/14/2011	8:43:48 AM	PH3 valve closed
11/14/2011	8:43:48 AM	SiCl4 pre valve closed
11/14/2011	8:43:48 AM	SiCl4 post valve closed
11/14/2011	8:43:48 AM	Bypass valve closed
11/14/2011	8:43:48 AM	Bubbler valve closed
11/14/2011	8:43:48 AM	Helium valve opened
11/14/2011	8:43:48 AM	Main Vac valve opened
11/14/2011	8:43:48 AM	Helium MFC set to  20.000000
11/14/2011	8:43:48 AM	H2 MFC set to  0.000000
11/14/2011	8:43:48 AM	BCl3 MFC set to  0.000000
11/14/2011	8:43:48 AM	PHl3 MFC set to  0.000000
11/14/2011	8:43:48 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:43:48 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:43:48 AM	Tube furnace set to 150
11/14/2011	8:44:18 AM	Helium valve closed
11/14/2011	8:44:18 AM	H2 valve closed
11/14/2011	8:44:18 AM	BCl3 valve closed
11/14/2011	8:44:18 AM	PH3 valve closed
11/14/2011	8:44:18 AM	SiCl4 pre valve closed
11/14/2011	8:44:18 AM	SiCl4 post valve closed
11/14/2011	8:44:18 AM	Bypass valve closed
11/14/2011	8:44:18 AM	Bubbler valve closed
11/14/2011	8:44:18 AM	Main Vac valve opened
11/14/2011	8:44:18 AM	Helium MFC set to  0.000000
11/14/2011	8:44:18 AM	H2 MFC set to  0.000000
11/14/2011	8:44:18 AM	BCl3 MFC set to  0.000000
11/14/2011	8:44:18 AM	PHl3 MFC set to  0.000000
11/14/2011	8:44:18 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:44:18 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:44:19 AM	Tube furnace set to 150
11/14/2011	8:44:49 AM	H2 valve closed
11/14/2011	8:44:49 AM	BCl3 valve closed
11/14/2011	8:44:49 AM	PH3 valve closed
11/14/2011	8:44:49 AM	SiCl4 pre valve closed
11/14/2011	8:44:49 AM	SiCl4 post valve closed
11/14/2011	8:44:49 AM	Bypass valve closed
11/14/2011	8:44:49 AM	Bubbler valve closed
11/14/2011	8:44:49 AM	Helium valve opened
11/14/2011	8:44:49 AM	Main Vac valve opened
11/14/2011	8:44:49 AM	Helium MFC set to  20.000000
11/14/2011	8:44:49 AM	H2 MFC set to  0.000000
11/14/2011	8:44:49 AM	BCl3 MFC set to  0.000000
11/14/2011	8:44:49 AM	PHl3 MFC set to  0.000000
11/14/2011	8:44:49 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:44:49 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:44:49 AM	Tube furnace set to 150
11/14/2011	8:45:19 AM	Helium valve closed
11/14/2011	8:45:19 AM	H2 valve closed
11/14/2011	8:45:19 AM	BCl3 valve closed
11/14/2011	8:45:19 AM	PH3 valve closed
11/14/2011	8:45:19 AM	SiCl4 pre valve closed
11/14/2011	8:45:19 AM	SiCl4 post valve closed
11/14/2011	8:45:19 AM	Bypass valve closed
11/14/2011	8:45:19 AM	Bubbler valve closed
11/14/2011	8:45:19 AM	Main Vac valve opened
11/14/2011	8:45:19 AM	Helium MFC set to  0.000000
11/14/2011	8:45:19 AM	H2 MFC set to  0.000000
11/14/2011	8:45:19 AM	BCl3 MFC set to  0.000000
11/14/2011	8:45:19 AM	PHl3 MFC set to  0.000000
11/14/2011	8:45:19 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:45:19 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:45:19 AM	Tube furnace set to 150
11/14/2011	8:45:49 AM	H2 valve closed
11/14/2011	8:45:49 AM	BCl3 valve closed
11/14/2011	8:45:49 AM	PH3 valve closed
11/14/2011	8:45:49 AM	SiCl4 pre valve closed
11/14/2011	8:45:49 AM	SiCl4 post valve closed
11/14/2011	8:45:49 AM	Bypass valve closed
11/14/2011	8:45:49 AM	Bubbler valve closed
11/14/2011	8:45:49 AM	Helium valve opened
11/14/2011	8:45:49 AM	Main Vac valve opened
11/14/2011	8:45:49 AM	Helium MFC set to  20.000000
11/14/2011	8:45:49 AM	H2 MFC set to  0.000000
11/14/2011	8:45:49 AM	BCl3 MFC set to  0.000000
11/14/2011	8:45:49 AM	PHl3 MFC set to  0.000000
11/14/2011	8:45:49 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:45:49 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:45:49 AM	Tube furnace set to 150
11/14/2011	8:46:19 AM	Helium valve closed
11/14/2011	8:46:19 AM	H2 valve closed
11/14/2011	8:46:19 AM	BCl3 valve closed
11/14/2011	8:46:19 AM	PH3 valve closed
11/14/2011	8:46:19 AM	SiCl4 pre valve closed
11/14/2011	8:46:19 AM	SiCl4 post valve closed
11/14/2011	8:46:19 AM	Bypass valve closed
11/14/2011	8:46:19 AM	Bubbler valve closed
11/14/2011	8:46:19 AM	Main Vac valve opened
11/14/2011	8:46:19 AM	Helium MFC set to  0.000000
11/14/2011	8:46:19 AM	H2 MFC set to  0.000000
11/14/2011	8:46:19 AM	BCl3 MFC set to  0.000000
11/14/2011	8:46:19 AM	PHl3 MFC set to  0.000000
11/14/2011	8:46:19 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:46:19 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:46:19 AM	Tube furnace set to 150
11/14/2011	8:46:49 AM	H2 valve closed
11/14/2011	8:46:49 AM	BCl3 valve closed
11/14/2011	8:46:49 AM	PH3 valve closed
11/14/2011	8:46:49 AM	SiCl4 pre valve closed
11/14/2011	8:46:49 AM	SiCl4 post valve closed
11/14/2011	8:46:49 AM	Bypass valve closed
11/14/2011	8:46:49 AM	Bubbler valve closed
11/14/2011	8:46:49 AM	Helium valve opened
11/14/2011	8:46:49 AM	Main Vac valve opened
11/14/2011	8:46:49 AM	Helium MFC set to  20.000000
11/14/2011	8:46:49 AM	H2 MFC set to  0.000000
11/14/2011	8:46:49 AM	BCl3 MFC set to  0.000000
11/14/2011	8:46:49 AM	PHl3 MFC set to  0.000000
11/14/2011	8:46:49 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:46:49 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:46:50 AM	Tube furnace set to 150
11/14/2011	8:47:20 AM	Helium valve closed
11/14/2011	8:47:20 AM	H2 valve closed
11/14/2011	8:47:20 AM	BCl3 valve closed
11/14/2011	8:47:20 AM	PH3 valve closed
11/14/2011	8:47:20 AM	SiCl4 pre valve closed
11/14/2011	8:47:20 AM	SiCl4 post valve closed
11/14/2011	8:47:20 AM	Bypass valve closed
11/14/2011	8:47:20 AM	Bubbler valve closed
11/14/2011	8:47:20 AM	Main Vac valve opened
11/14/2011	8:47:20 AM	Helium MFC set to  0.000000
11/14/2011	8:47:20 AM	H2 MFC set to  0.000000
11/14/2011	8:47:20 AM	BCl3 MFC set to  0.000000
11/14/2011	8:47:20 AM	PHl3 MFC set to  0.000000
11/14/2011	8:47:20 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:47:20 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:47:20 AM	Tube furnace set to 150
11/14/2011	8:47:21 AM	Run finished at 8:47 AM
11/14/2011	8:50:47 AM	Main Vac valve closed
11/14/2011	8:50:56 AM	Main Vac valve opened
11/14/2011	8:51:05 AM	Recipe started at 8:51 AM
11/14/2011	8:51:05 AM	Helium valve closed
11/14/2011	8:51:05 AM	H2 valve closed
11/14/2011	8:51:05 AM	BCl3 valve closed
11/14/2011	8:51:05 AM	PH3 valve closed
11/14/2011	8:51:05 AM	SiCl4 pre valve closed
11/14/2011	8:51:05 AM	SiCl4 post valve closed
11/14/2011	8:51:05 AM	Bypass valve closed
11/14/2011	8:51:05 AM	Bubbler valve closed
11/14/2011	8:51:05 AM	Main Vac valve opened
11/14/2011	8:51:05 AM	Helium MFC set to  0.000000
11/14/2011	8:51:05 AM	H2 MFC set to  0.000000
11/14/2011	8:51:05 AM	BCl3 MFC set to  0.000000
11/14/2011	8:51:05 AM	PHl3 MFC set to  0.000000
11/14/2011	8:51:05 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:51:05 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:51:05 AM	Tube furnace set to 150
11/14/2011	8:51:35 AM	H2 valve closed
11/14/2011	8:51:35 AM	BCl3 valve closed
11/14/2011	8:51:35 AM	PH3 valve closed
11/14/2011	8:51:35 AM	SiCl4 pre valve closed
11/14/2011	8:51:35 AM	SiCl4 post valve closed
11/14/2011	8:51:35 AM	Bypass valve closed
11/14/2011	8:51:35 AM	Bubbler valve closed
11/14/2011	8:51:35 AM	Helium valve opened
11/14/2011	8:51:35 AM	Main Vac valve opened
11/14/2011	8:51:35 AM	Helium MFC set to  20.000000
11/14/2011	8:51:35 AM	H2 MFC set to  0.000000
11/14/2011	8:51:35 AM	BCl3 MFC set to  0.000000
11/14/2011	8:51:35 AM	PHl3 MFC set to  0.000000
11/14/2011	8:51:35 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:51:35 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:51:35 AM	Tube furnace set to 150
11/14/2011	8:52:05 AM	Helium valve closed
11/14/2011	8:52:05 AM	H2 valve closed
11/14/2011	8:52:05 AM	BCl3 valve closed
11/14/2011	8:52:05 AM	PH3 valve closed
11/14/2011	8:52:05 AM	SiCl4 pre valve closed
11/14/2011	8:52:05 AM	SiCl4 post valve closed
11/14/2011	8:52:05 AM	Bypass valve closed
11/14/2011	8:52:05 AM	Bubbler valve closed
11/14/2011	8:52:05 AM	Main Vac valve opened
11/14/2011	8:52:05 AM	Helium MFC set to  0.000000
11/14/2011	8:52:05 AM	H2 MFC set to  0.000000
11/14/2011	8:52:05 AM	BCl3 MFC set to  0.000000
11/14/2011	8:52:05 AM	PHl3 MFC set to  0.000000
11/14/2011	8:52:05 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:52:05 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:52:06 AM	Tube furnace set to 150
11/14/2011	8:52:36 AM	H2 valve closed
11/14/2011	8:52:36 AM	BCl3 valve closed
11/14/2011	8:52:36 AM	PH3 valve closed
11/14/2011	8:52:36 AM	SiCl4 pre valve closed
11/14/2011	8:52:36 AM	SiCl4 post valve closed
11/14/2011	8:52:36 AM	Bypass valve closed
11/14/2011	8:52:36 AM	Bubbler valve closed
11/14/2011	8:52:36 AM	Helium valve opened
11/14/2011	8:52:36 AM	Main Vac valve opened
11/14/2011	8:52:36 AM	Helium MFC set to  20.000000
11/14/2011	8:52:36 AM	H2 MFC set to  0.000000
11/14/2011	8:52:36 AM	BCl3 MFC set to  0.000000
11/14/2011	8:52:36 AM	PHl3 MFC set to  0.000000
11/14/2011	8:52:36 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:52:36 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:52:36 AM	Tube furnace set to 150
11/14/2011	8:53:06 AM	Helium valve closed
11/14/2011	8:53:06 AM	H2 valve closed
11/14/2011	8:53:06 AM	BCl3 valve closed
11/14/2011	8:53:06 AM	PH3 valve closed
11/14/2011	8:53:06 AM	SiCl4 pre valve closed
11/14/2011	8:53:06 AM	SiCl4 post valve closed
11/14/2011	8:53:06 AM	Bypass valve closed
11/14/2011	8:53:06 AM	Bubbler valve closed
11/14/2011	8:53:06 AM	Main Vac valve opened
11/14/2011	8:53:06 AM	Helium MFC set to  0.000000
11/14/2011	8:53:06 AM	H2 MFC set to  0.000000
11/14/2011	8:53:06 AM	BCl3 MFC set to  0.000000
11/14/2011	8:53:06 AM	PHl3 MFC set to  0.000000
11/14/2011	8:53:06 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:53:06 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:53:06 AM	Tube furnace set to 150
11/14/2011	8:53:36 AM	H2 valve closed
11/14/2011	8:53:36 AM	BCl3 valve closed
11/14/2011	8:53:36 AM	PH3 valve closed
11/14/2011	8:53:36 AM	SiCl4 pre valve closed
11/14/2011	8:53:36 AM	SiCl4 post valve closed
11/14/2011	8:53:36 AM	Bypass valve closed
11/14/2011	8:53:36 AM	Bubbler valve closed
11/14/2011	8:53:36 AM	Helium valve opened
11/14/2011	8:53:36 AM	Main Vac valve opened
11/14/2011	8:53:36 AM	Helium MFC set to  20.000000
11/14/2011	8:53:36 AM	H2 MFC set to  0.000000
11/14/2011	8:53:36 AM	BCl3 MFC set to  0.000000
11/14/2011	8:53:36 AM	PHl3 MFC set to  0.000000
11/14/2011	8:53:36 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:53:36 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:53:36 AM	Tube furnace set to 150
11/14/2011	8:54:06 AM	Helium valve closed
11/14/2011	8:54:06 AM	H2 valve closed
11/14/2011	8:54:06 AM	BCl3 valve closed
11/14/2011	8:54:06 AM	PH3 valve closed
11/14/2011	8:54:06 AM	SiCl4 pre valve closed
11/14/2011	8:54:06 AM	SiCl4 post valve closed
11/14/2011	8:54:06 AM	Bypass valve closed
11/14/2011	8:54:06 AM	Bubbler valve closed
11/14/2011	8:54:06 AM	Main Vac valve opened
11/14/2011	8:54:06 AM	Helium MFC set to  0.000000
11/14/2011	8:54:06 AM	H2 MFC set to  0.000000
11/14/2011	8:54:06 AM	BCl3 MFC set to  0.000000
11/14/2011	8:54:06 AM	PHl3 MFC set to  0.000000
11/14/2011	8:54:06 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:54:06 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:54:06 AM	Tube furnace set to 150
11/14/2011	8:54:36 AM	H2 valve closed
11/14/2011	8:54:36 AM	BCl3 valve closed
11/14/2011	8:54:36 AM	PH3 valve closed
11/14/2011	8:54:36 AM	SiCl4 pre valve closed
11/14/2011	8:54:36 AM	SiCl4 post valve closed
11/14/2011	8:54:36 AM	Bypass valve closed
11/14/2011	8:54:36 AM	Bubbler valve closed
11/14/2011	8:54:36 AM	Helium valve opened
11/14/2011	8:54:36 AM	Main Vac valve opened
11/14/2011	8:54:36 AM	Helium MFC set to  20.000000
11/14/2011	8:54:36 AM	H2 MFC set to  0.000000
11/14/2011	8:54:36 AM	BCl3 MFC set to  0.000000
11/14/2011	8:54:36 AM	PHl3 MFC set to  0.000000
11/14/2011	8:54:36 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:54:36 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:54:37 AM	Tube furnace set to 150
11/14/2011	8:55:07 AM	Helium valve closed
11/14/2011	8:55:07 AM	H2 valve closed
11/14/2011	8:55:07 AM	BCl3 valve closed
11/14/2011	8:55:07 AM	PH3 valve closed
11/14/2011	8:55:07 AM	SiCl4 pre valve closed
11/14/2011	8:55:07 AM	SiCl4 post valve closed
11/14/2011	8:55:07 AM	Bypass valve closed
11/14/2011	8:55:07 AM	Bubbler valve closed
11/14/2011	8:55:07 AM	Main Vac valve opened
11/14/2011	8:55:07 AM	Helium MFC set to  0.000000
11/14/2011	8:55:07 AM	H2 MFC set to  0.000000
11/14/2011	8:55:07 AM	BCl3 MFC set to  0.000000
11/14/2011	8:55:07 AM	PHl3 MFC set to  0.000000
11/14/2011	8:55:07 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:55:07 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:55:07 AM	Tube furnace set to 150
11/14/2011	8:55:37 AM	H2 valve closed
11/14/2011	8:55:37 AM	BCl3 valve closed
11/14/2011	8:55:37 AM	PH3 valve closed
11/14/2011	8:55:37 AM	SiCl4 pre valve closed
11/14/2011	8:55:37 AM	SiCl4 post valve closed
11/14/2011	8:55:37 AM	Bypass valve closed
11/14/2011	8:55:37 AM	Bubbler valve closed
11/14/2011	8:55:37 AM	Helium valve opened
11/14/2011	8:55:37 AM	Main Vac valve opened
11/14/2011	8:55:37 AM	Helium MFC set to  20.000000
11/14/2011	8:55:37 AM	H2 MFC set to  0.000000
11/14/2011	8:55:37 AM	BCl3 MFC set to  0.000000
11/14/2011	8:55:37 AM	PHl3 MFC set to  0.000000
11/14/2011	8:55:37 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:55:37 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:55:37 AM	Tube furnace set to 150
11/14/2011	8:56:07 AM	Helium valve closed
11/14/2011	8:56:07 AM	H2 valve closed
11/14/2011	8:56:07 AM	BCl3 valve closed
11/14/2011	8:56:07 AM	PH3 valve closed
11/14/2011	8:56:07 AM	SiCl4 pre valve closed
11/14/2011	8:56:07 AM	SiCl4 post valve closed
11/14/2011	8:56:07 AM	Bypass valve closed
11/14/2011	8:56:07 AM	Bubbler valve closed
11/14/2011	8:56:07 AM	Main Vac valve opened
11/14/2011	8:56:07 AM	Helium MFC set to  0.000000
11/14/2011	8:56:07 AM	H2 MFC set to  0.000000
11/14/2011	8:56:07 AM	BCl3 MFC set to  0.000000
11/14/2011	8:56:07 AM	PHl3 MFC set to  0.000000
11/14/2011	8:56:07 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:56:07 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:56:07 AM	Tube furnace set to 150
11/14/2011	8:56:37 AM	H2 valve closed
11/14/2011	8:56:37 AM	BCl3 valve closed
11/14/2011	8:56:37 AM	PH3 valve closed
11/14/2011	8:56:37 AM	SiCl4 pre valve closed
11/14/2011	8:56:37 AM	SiCl4 post valve closed
11/14/2011	8:56:37 AM	Bypass valve closed
11/14/2011	8:56:37 AM	Bubbler valve closed
11/14/2011	8:56:37 AM	Helium valve opened
11/14/2011	8:56:37 AM	Main Vac valve opened
11/14/2011	8:56:37 AM	Helium MFC set to  20.000000
11/14/2011	8:56:37 AM	H2 MFC set to  0.000000
11/14/2011	8:56:37 AM	BCl3 MFC set to  0.000000
11/14/2011	8:56:37 AM	PHl3 MFC set to  0.000000
11/14/2011	8:56:37 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:56:37 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:56:37 AM	Tube furnace set to 150
11/14/2011	8:57:07 AM	Helium valve closed
11/14/2011	8:57:07 AM	H2 valve closed
11/14/2011	8:57:07 AM	BCl3 valve closed
11/14/2011	8:57:07 AM	PH3 valve closed
11/14/2011	8:57:07 AM	SiCl4 pre valve closed
11/14/2011	8:57:07 AM	SiCl4 post valve closed
11/14/2011	8:57:07 AM	Bypass valve closed
11/14/2011	8:57:07 AM	Bubbler valve closed
11/14/2011	8:57:07 AM	Main Vac valve opened
11/14/2011	8:57:07 AM	Helium MFC set to  0.000000
11/14/2011	8:57:07 AM	H2 MFC set to  0.000000
11/14/2011	8:57:07 AM	BCl3 MFC set to  0.000000
11/14/2011	8:57:07 AM	PHl3 MFC set to  0.000000
11/14/2011	8:57:07 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:57:07 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:57:08 AM	Tube furnace set to 150
11/14/2011	8:57:38 AM	H2 valve closed
11/14/2011	8:57:38 AM	BCl3 valve closed
11/14/2011	8:57:38 AM	PH3 valve closed
11/14/2011	8:57:38 AM	SiCl4 pre valve closed
11/14/2011	8:57:38 AM	SiCl4 post valve closed
11/14/2011	8:57:38 AM	Bypass valve closed
11/14/2011	8:57:38 AM	Bubbler valve closed
11/14/2011	8:57:38 AM	Helium valve opened
11/14/2011	8:57:38 AM	Main Vac valve opened
11/14/2011	8:57:38 AM	Helium MFC set to  20.000000
11/14/2011	8:57:38 AM	H2 MFC set to  0.000000
11/14/2011	8:57:38 AM	BCl3 MFC set to  0.000000
11/14/2011	8:57:38 AM	PHl3 MFC set to  0.000000
11/14/2011	8:57:38 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:57:38 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:57:38 AM	Tube furnace set to 150
11/14/2011	8:58:08 AM	Helium valve closed
11/14/2011	8:58:08 AM	H2 valve closed
11/14/2011	8:58:08 AM	BCl3 valve closed
11/14/2011	8:58:08 AM	PH3 valve closed
11/14/2011	8:58:08 AM	SiCl4 pre valve closed
11/14/2011	8:58:08 AM	SiCl4 post valve closed
11/14/2011	8:58:08 AM	Bypass valve closed
11/14/2011	8:58:08 AM	Bubbler valve closed
11/14/2011	8:58:08 AM	Main Vac valve opened
11/14/2011	8:58:08 AM	Helium MFC set to  0.000000
11/14/2011	8:58:08 AM	H2 MFC set to  0.000000
11/14/2011	8:58:08 AM	BCl3 MFC set to  0.000000
11/14/2011	8:58:08 AM	PHl3 MFC set to  0.000000
11/14/2011	8:58:08 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:58:08 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:58:08 AM	Tube furnace set to 150
11/14/2011	8:58:38 AM	H2 valve closed
11/14/2011	8:58:38 AM	BCl3 valve closed
11/14/2011	8:58:38 AM	PH3 valve closed
11/14/2011	8:58:38 AM	SiCl4 pre valve closed
11/14/2011	8:58:38 AM	SiCl4 post valve closed
11/14/2011	8:58:38 AM	Bypass valve closed
11/14/2011	8:58:38 AM	Bubbler valve closed
11/14/2011	8:58:38 AM	Helium valve opened
11/14/2011	8:58:38 AM	Main Vac valve opened
11/14/2011	8:58:38 AM	Helium MFC set to  20.000000
11/14/2011	8:58:38 AM	H2 MFC set to  0.000000
11/14/2011	8:58:38 AM	BCl3 MFC set to  0.000000
11/14/2011	8:58:38 AM	PHl3 MFC set to  0.000000
11/14/2011	8:58:38 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:58:38 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:58:38 AM	Tube furnace set to 150
11/14/2011	8:59:08 AM	Helium valve closed
11/14/2011	8:59:08 AM	H2 valve closed
11/14/2011	8:59:08 AM	BCl3 valve closed
11/14/2011	8:59:08 AM	PH3 valve closed
11/14/2011	8:59:08 AM	SiCl4 pre valve closed
11/14/2011	8:59:08 AM	SiCl4 post valve closed
11/14/2011	8:59:08 AM	Bypass valve closed
11/14/2011	8:59:08 AM	Bubbler valve closed
11/14/2011	8:59:08 AM	Main Vac valve opened
11/14/2011	8:59:08 AM	Helium MFC set to  0.000000
11/14/2011	8:59:08 AM	H2 MFC set to  0.000000
11/14/2011	8:59:08 AM	BCl3 MFC set to  0.000000
11/14/2011	8:59:08 AM	PHl3 MFC set to  0.000000
11/14/2011	8:59:08 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:59:08 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:59:08 AM	Tube furnace set to 150
11/14/2011	8:59:38 AM	H2 valve closed
11/14/2011	8:59:38 AM	BCl3 valve closed
11/14/2011	8:59:38 AM	PH3 valve closed
11/14/2011	8:59:38 AM	SiCl4 pre valve closed
11/14/2011	8:59:38 AM	SiCl4 post valve closed
11/14/2011	8:59:38 AM	Bypass valve closed
11/14/2011	8:59:38 AM	Bubbler valve closed
11/14/2011	8:59:38 AM	Helium valve opened
11/14/2011	8:59:38 AM	Main Vac valve opened
11/14/2011	8:59:38 AM	Helium MFC set to  20.000000
11/14/2011	8:59:38 AM	H2 MFC set to  0.000000
11/14/2011	8:59:38 AM	BCl3 MFC set to  0.000000
11/14/2011	8:59:38 AM	PHl3 MFC set to  0.000000
11/14/2011	8:59:38 AM	SiCl4 MFC set to  0.000000
11/14/2011	8:59:38 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:59:39 AM	Tube furnace set to 150
11/14/2011	9:00:09 AM	Helium valve closed
11/14/2011	9:00:09 AM	H2 valve closed
11/14/2011	9:00:09 AM	BCl3 valve closed
11/14/2011	9:00:09 AM	PH3 valve closed
11/14/2011	9:00:09 AM	SiCl4 pre valve closed
11/14/2011	9:00:09 AM	SiCl4 post valve closed
11/14/2011	9:00:09 AM	Bypass valve closed
11/14/2011	9:00:09 AM	Bubbler valve closed
11/14/2011	9:00:09 AM	Main Vac valve opened
11/14/2011	9:00:09 AM	Helium MFC set to  0.000000
11/14/2011	9:00:09 AM	H2 MFC set to  0.000000
11/14/2011	9:00:09 AM	BCl3 MFC set to  0.000000
11/14/2011	9:00:09 AM	PHl3 MFC set to  0.000000
11/14/2011	9:00:09 AM	SiCl4 MFC set to  0.000000
11/14/2011	9:00:09 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	9:00:09 AM	Tube furnace set to 150
11/14/2011	9:00:39 AM	H2 valve closed
11/14/2011	9:00:39 AM	BCl3 valve closed
11/14/2011	9:00:39 AM	PH3 valve closed
11/14/2011	9:00:39 AM	SiCl4 pre valve closed
11/14/2011	9:00:39 AM	SiCl4 post valve closed
11/14/2011	9:00:39 AM	Bypass valve closed
11/14/2011	9:00:39 AM	Bubbler valve closed
11/14/2011	9:00:39 AM	Helium valve opened
11/14/2011	9:00:39 AM	Main Vac valve opened
11/14/2011	9:00:39 AM	Helium MFC set to  20.000000
11/14/2011	9:00:39 AM	H2 MFC set to  0.000000
11/14/2011	9:00:39 AM	BCl3 MFC set to  0.000000
11/14/2011	9:00:39 AM	PHl3 MFC set to  0.000000
11/14/2011	9:00:39 AM	SiCl4 MFC set to  0.000000
11/14/2011	9:00:39 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	9:00:39 AM	Tube furnace set to 150
11/14/2011	9:01:09 AM	Helium valve closed
11/14/2011	9:01:09 AM	H2 valve closed
11/14/2011	9:01:09 AM	BCl3 valve closed
11/14/2011	9:01:09 AM	PH3 valve closed
11/14/2011	9:01:09 AM	SiCl4 pre valve closed
11/14/2011	9:01:09 AM	SiCl4 post valve closed
11/14/2011	9:01:09 AM	Bypass valve closed
11/14/2011	9:01:09 AM	Bubbler valve closed
11/14/2011	9:01:09 AM	Main Vac valve opened
11/14/2011	9:01:09 AM	Helium MFC set to  0.000000
11/14/2011	9:01:09 AM	H2 MFC set to  0.000000
11/14/2011	9:01:09 AM	BCl3 MFC set to  0.000000
11/14/2011	9:01:09 AM	PHl3 MFC set to  0.000000
11/14/2011	9:01:09 AM	SiCl4 MFC set to  0.000000
11/14/2011	9:01:09 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	9:01:09 AM	Tube furnace set to 150
11/14/2011	9:01:10 AM	Run finished at 9:01 AM
11/14/2011	9:03:56 AM	Recipe started at 9:03 AM
11/14/2011	9:03:56 AM	Helium valve closed
11/14/2011	9:03:56 AM	H2 valve closed
11/14/2011	9:03:56 AM	BCl3 valve closed
11/14/2011	9:03:56 AM	PH3 valve closed
11/14/2011	9:03:56 AM	SiCl4 pre valve closed
11/14/2011	9:03:56 AM	SiCl4 post valve closed
11/14/2011	9:03:56 AM	Bypass valve closed
11/14/2011	9:03:56 AM	Bubbler valve closed
11/14/2011	9:03:56 AM	Main Vac valve opened
11/14/2011	9:03:56 AM	Helium MFC set to  0.000000
11/14/2011	9:03:56 AM	H2 MFC set to  0.000000
11/14/2011	9:03:56 AM	BCl3 MFC set to  0.000000
11/14/2011	9:03:56 AM	PHl3 MFC set to  0.000000
11/14/2011	9:03:56 AM	SiCl4 MFC set to  0.000000
11/14/2011	9:03:56 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	9:03:56 AM	Tube furnace set to 150
11/14/2011	9:04:26 AM	H2 valve closed
11/14/2011	9:04:26 AM	BCl3 valve closed
11/14/2011	9:04:26 AM	PH3 valve closed
11/14/2011	9:04:26 AM	SiCl4 pre valve closed
11/14/2011	9:04:26 AM	SiCl4 post valve closed
11/14/2011	9:04:26 AM	Bypass valve closed
11/14/2011	9:04:26 AM	Bubbler valve closed
11/14/2011	9:04:26 AM	Helium valve opened
11/14/2011	9:04:26 AM	Main Vac valve opened
11/14/2011	9:04:26 AM	Helium MFC set to  20.000000
11/14/2011	9:04:26 AM	H2 MFC set to  0.000000
11/14/2011	9:04:26 AM	BCl3 MFC set to  0.000000
11/14/2011	9:04:26 AM	PHl3 MFC set to  0.000000
11/14/2011	9:04:26 AM	SiCl4 MFC set to  0.000000
11/14/2011	9:04:26 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	9:04:26 AM	Tube furnace set to 150
11/14/2011	9:04:56 AM	Helium valve closed
11/14/2011	9:04:56 AM	H2 valve closed
11/14/2011	9:04:56 AM	BCl3 valve closed
11/14/2011	9:04:56 AM	PH3 valve closed
11/14/2011	9:04:56 AM	SiCl4 pre valve closed
11/14/2011	9:04:56 AM	SiCl4 post valve closed
11/14/2011	9:04:56 AM	Bypass valve closed
11/14/2011	9:04:56 AM	Bubbler valve closed
11/14/2011	9:04:56 AM	Main Vac valve opened
11/14/2011	9:04:56 AM	Helium MFC set to  0.000000
11/14/2011	9:04:56 AM	H2 MFC set to  0.000000
11/14/2011	9:04:56 AM	BCl3 MFC set to  0.000000
11/14/2011	9:04:56 AM	PHl3 MFC set to  0.000000
11/14/2011	9:04:56 AM	SiCl4 MFC set to  0.000000
11/14/2011	9:04:56 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	9:04:56 AM	Tube furnace set to 150
11/14/2011	9:05:26 AM	H2 valve closed
11/14/2011	9:05:26 AM	BCl3 valve closed
11/14/2011	9:05:26 AM	PH3 valve closed
11/14/2011	9:05:26 AM	SiCl4 pre valve closed
11/14/2011	9:05:26 AM	SiCl4 post valve closed
11/14/2011	9:05:26 AM	Bypass valve closed
11/14/2011	9:05:26 AM	Bubbler valve closed
11/14/2011	9:05:26 AM	Helium valve opened
11/14/2011	9:05:26 AM	Main Vac valve opened
11/14/2011	9:05:26 AM	Helium MFC set to  20.000000
11/14/2011	9:05:26 AM	H2 MFC set to  0.000000
11/14/2011	9:05:26 AM	BCl3 MFC set to  0.000000
11/14/2011	9:05:26 AM	PHl3 MFC set to  0.000000
11/14/2011	9:05:26 AM	SiCl4 MFC set to  0.000000
11/14/2011	9:05:26 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	9:05:26 AM	Tube furnace set to 150
11/14/2011	9:05:56 AM	Helium valve closed
11/14/2011	9:05:56 AM	H2 valve closed
11/14/2011	9:05:56 AM	BCl3 valve closed
11/14/2011	9:05:56 AM	PH3 valve closed
11/14/2011	9:05:56 AM	SiCl4 pre valve closed
11/14/2011	9:05:56 AM	SiCl4 post valve closed
11/14/2011	9:05:56 AM	Bypass valve closed
11/14/2011	9:05:56 AM	Bubbler valve closed
11/14/2011	9:05:56 AM	Main Vac valve opened
11/14/2011	9:05:56 AM	Helium MFC set to  0.000000
11/14/2011	9:05:56 AM	H2 MFC set to  0.000000
11/14/2011	9:05:56 AM	BCl3 MFC set to  0.000000
11/14/2011	9:05:56 AM	PHl3 MFC set to  0.000000
11/14/2011	9:05:56 AM	SiCl4 MFC set to  0.000000
11/14/2011	9:05:56 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	9:05:57 AM	Tube furnace set to 150
11/14/2011	9:06:27 AM	H2 valve closed
11/14/2011	9:06:27 AM	BCl3 valve closed
11/14/2011	9:06:27 AM	PH3 valve closed
11/14/2011	9:06:27 AM	SiCl4 pre valve closed
11/14/2011	9:06:27 AM	SiCl4 post valve closed
11/14/2011	9:06:27 AM	Bypass valve closed
11/14/2011	9:06:27 AM	Bubbler valve closed
11/14/2011	9:06:27 AM	Helium valve opened
11/14/2011	9:06:27 AM	Main Vac valve opened
11/14/2011	9:06:27 AM	Helium MFC set to  20.000000
11/14/2011	9:06:27 AM	H2 MFC set to  0.000000
11/14/2011	9:06:27 AM	BCl3 MFC set to  0.000000
11/14/2011	9:06:27 AM	PHl3 MFC set to  0.000000
11/14/2011	9:06:27 AM	SiCl4 MFC set to  0.000000
11/14/2011	9:06:27 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	9:06:27 AM	Tube furnace set to 150
11/14/2011	9:06:57 AM	Helium valve closed
11/14/2011	9:06:57 AM	H2 valve closed
11/14/2011	9:06:57 AM	BCl3 valve closed
11/14/2011	9:06:57 AM	PH3 valve closed
11/14/2011	9:06:57 AM	SiCl4 pre valve closed
11/14/2011	9:06:57 AM	SiCl4 post valve closed
11/14/2011	9:06:57 AM	Bypass valve closed
11/14/2011	9:06:57 AM	Bubbler valve closed
11/14/2011	9:06:57 AM	Main Vac valve opened
11/14/2011	9:06:57 AM	Helium MFC set to  0.000000
11/14/2011	9:06:57 AM	H2 MFC set to  0.000000
11/14/2011	9:06:57 AM	BCl3 MFC set to  0.000000
11/14/2011	9:06:57 AM	PHl3 MFC set to  0.000000
11/14/2011	9:06:57 AM	SiCl4 MFC set to  0.000000
11/14/2011	9:06:57 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	9:06:57 AM	Tube furnace set to 150
11/14/2011	9:07:27 AM	H2 valve closed
11/14/2011	9:07:27 AM	BCl3 valve closed
11/14/2011	9:07:27 AM	PH3 valve closed
11/14/2011	9:07:27 AM	SiCl4 pre valve closed
11/14/2011	9:07:27 AM	SiCl4 post valve closed
11/14/2011	9:07:27 AM	Bypass valve closed
11/14/2011	9:07:27 AM	Bubbler valve closed
11/14/2011	9:07:27 AM	Helium valve opened
11/14/2011	9:07:27 AM	Main Vac valve opened
11/14/2011	9:07:27 AM	Helium MFC set to  20.000000
11/14/2011	9:07:27 AM	H2 MFC set to  0.000000
11/14/2011	9:07:27 AM	BCl3 MFC set to  0.000000
11/14/2011	9:07:27 AM	PHl3 MFC set to  0.000000
11/14/2011	9:07:27 AM	SiCl4 MFC set to  0.000000
11/14/2011	9:07:27 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	9:07:27 AM	Tube furnace set to 150
11/14/2011	9:07:57 AM	Helium valve closed
11/14/2011	9:07:57 AM	H2 valve closed
11/14/2011	9:07:57 AM	BCl3 valve closed
11/14/2011	9:07:57 AM	PH3 valve closed
11/14/2011	9:07:57 AM	SiCl4 pre valve closed
11/14/2011	9:07:57 AM	SiCl4 post valve closed
11/14/2011	9:07:57 AM	Bypass valve closed
11/14/2011	9:07:57 AM	Bubbler valve closed
11/14/2011	9:07:57 AM	Main Vac valve opened
11/14/2011	9:07:57 AM	Helium MFC set to  0.000000
11/14/2011	9:07:57 AM	H2 MFC set to  0.000000
11/14/2011	9:07:57 AM	BCl3 MFC set to  0.000000
11/14/2011	9:07:57 AM	PHl3 MFC set to  0.000000
11/14/2011	9:07:57 AM	SiCl4 MFC set to  0.000000
11/14/2011	9:07:57 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	9:07:57 AM	Tube furnace set to 150
11/14/2011	9:08:27 AM	H2 valve closed
11/14/2011	9:08:27 AM	BCl3 valve closed
11/14/2011	9:08:27 AM	PH3 valve closed
11/14/2011	9:08:27 AM	SiCl4 pre valve closed
11/14/2011	9:08:27 AM	SiCl4 post valve closed
11/14/2011	9:08:27 AM	Bypass valve closed
11/14/2011	9:08:27 AM	Bubbler valve closed
11/14/2011	9:08:27 AM	Helium valve opened
11/14/2011	9:08:27 AM	Main Vac valve opened
11/14/2011	9:08:27 AM	Helium MFC set to  20.000000
11/14/2011	9:08:27 AM	H2 MFC set to  0.000000
11/14/2011	9:08:27 AM	BCl3 MFC set to  0.000000
11/14/2011	9:08:27 AM	PHl3 MFC set to  0.000000
11/14/2011	9:08:27 AM	SiCl4 MFC set to  0.000000
11/14/2011	9:08:27 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	9:08:28 AM	Tube furnace set to 150
11/14/2011	9:08:58 AM	Helium valve closed
11/14/2011	9:08:58 AM	H2 valve closed
11/14/2011	9:08:58 AM	BCl3 valve closed
11/14/2011	9:08:58 AM	PH3 valve closed
11/14/2011	9:08:58 AM	SiCl4 pre valve closed
11/14/2011	9:08:58 AM	SiCl4 post valve closed
11/14/2011	9:08:58 AM	Bypass valve closed
11/14/2011	9:08:58 AM	Bubbler valve closed
11/14/2011	9:08:58 AM	Main Vac valve opened
11/14/2011	9:08:58 AM	Helium MFC set to  0.000000
11/14/2011	9:08:58 AM	H2 MFC set to  0.000000
11/14/2011	9:08:58 AM	BCl3 MFC set to  0.000000
11/14/2011	9:08:58 AM	PHl3 MFC set to  0.000000
11/14/2011	9:08:58 AM	SiCl4 MFC set to  0.000000
11/14/2011	9:08:58 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	9:08:58 AM	Tube furnace set to 150
11/14/2011	9:09:28 AM	H2 valve closed
11/14/2011	9:09:28 AM	BCl3 valve closed
11/14/2011	9:09:28 AM	PH3 valve closed
11/14/2011	9:09:28 AM	SiCl4 pre valve closed
11/14/2011	9:09:28 AM	SiCl4 post valve closed
11/14/2011	9:09:28 AM	Bypass valve closed
11/14/2011	9:09:28 AM	Bubbler valve closed
11/14/2011	9:09:28 AM	Helium valve opened
11/14/2011	9:09:28 AM	Main Vac valve opened
11/14/2011	9:09:28 AM	Helium MFC set to  20.000000
11/14/2011	9:09:28 AM	H2 MFC set to  0.000000
11/14/2011	9:09:28 AM	BCl3 MFC set to  0.000000
11/14/2011	9:09:28 AM	PHl3 MFC set to  0.000000
11/14/2011	9:09:28 AM	SiCl4 MFC set to  0.000000
11/14/2011	9:09:28 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	9:09:28 AM	Tube furnace set to 150
11/14/2011	9:09:58 AM	Helium valve closed
11/14/2011	9:09:58 AM	H2 valve closed
11/14/2011	9:09:58 AM	BCl3 valve closed
11/14/2011	9:09:58 AM	PH3 valve closed
11/14/2011	9:09:58 AM	SiCl4 pre valve closed
11/14/2011	9:09:58 AM	SiCl4 post valve closed
11/14/2011	9:09:58 AM	Bypass valve closed
11/14/2011	9:09:58 AM	Bubbler valve closed
11/14/2011	9:09:58 AM	Main Vac valve opened
11/14/2011	9:09:58 AM	Helium MFC set to  0.000000
11/14/2011	9:09:58 AM	H2 MFC set to  0.000000
11/14/2011	9:09:58 AM	BCl3 MFC set to  0.000000
11/14/2011	9:09:58 AM	PHl3 MFC set to  0.000000
11/14/2011	9:09:58 AM	SiCl4 MFC set to  0.000000
11/14/2011	9:09:58 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	9:09:58 AM	Tube furnace set to 150
11/14/2011	9:10:28 AM	H2 valve closed
11/14/2011	9:10:28 AM	BCl3 valve closed
11/14/2011	9:10:28 AM	PH3 valve closed
11/14/2011	9:10:28 AM	SiCl4 pre valve closed
11/14/2011	9:10:28 AM	SiCl4 post valve closed
11/14/2011	9:10:28 AM	Bypass valve closed
11/14/2011	9:10:28 AM	Bubbler valve closed
11/14/2011	9:10:28 AM	Helium valve opened
11/14/2011	9:10:28 AM	Main Vac valve opened
11/14/2011	9:10:28 AM	Helium MFC set to  20.000000
11/14/2011	9:10:28 AM	H2 MFC set to  0.000000
11/14/2011	9:10:28 AM	BCl3 MFC set to  0.000000
11/14/2011	9:10:28 AM	PHl3 MFC set to  0.000000
11/14/2011	9:10:28 AM	SiCl4 MFC set to  0.000000
11/14/2011	9:10:28 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	9:10:28 AM	Tube furnace set to 150
11/14/2011	9:10:58 AM	Helium valve closed
11/14/2011	9:10:58 AM	H2 valve closed
11/14/2011	9:10:58 AM	BCl3 valve closed
11/14/2011	9:10:58 AM	PH3 valve closed
11/14/2011	9:10:58 AM	SiCl4 pre valve closed
11/14/2011	9:10:58 AM	SiCl4 post valve closed
11/14/2011	9:10:58 AM	Bypass valve closed
11/14/2011	9:10:58 AM	Bubbler valve closed
11/14/2011	9:10:58 AM	Main Vac valve opened
11/14/2011	9:10:58 AM	Helium MFC set to  0.000000
11/14/2011	9:10:58 AM	H2 MFC set to  0.000000
11/14/2011	9:10:58 AM	BCl3 MFC set to  0.000000
11/14/2011	9:10:58 AM	PHl3 MFC set to  0.000000
11/14/2011	9:10:58 AM	SiCl4 MFC set to  0.000000
11/14/2011	9:10:58 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	9:10:59 AM	Tube furnace set to 150
11/14/2011	9:11:29 AM	H2 valve closed
11/14/2011	9:11:29 AM	BCl3 valve closed
11/14/2011	9:11:29 AM	PH3 valve closed
11/14/2011	9:11:29 AM	SiCl4 pre valve closed
11/14/2011	9:11:29 AM	SiCl4 post valve closed
11/14/2011	9:11:29 AM	Bypass valve closed
11/14/2011	9:11:29 AM	Bubbler valve closed
11/14/2011	9:11:29 AM	Helium valve opened
11/14/2011	9:11:29 AM	Main Vac valve opened
11/14/2011	9:11:29 AM	Helium MFC set to  20.000000
11/14/2011	9:11:29 AM	H2 MFC set to  0.000000
11/14/2011	9:11:29 AM	BCl3 MFC set to  0.000000
11/14/2011	9:11:29 AM	PHl3 MFC set to  0.000000
11/14/2011	9:11:29 AM	SiCl4 MFC set to  0.000000
11/14/2011	9:11:29 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	9:11:29 AM	Tube furnace set to 150
11/14/2011	9:11:59 AM	Helium valve closed
11/14/2011	9:11:59 AM	H2 valve closed
11/14/2011	9:11:59 AM	BCl3 valve closed
11/14/2011	9:11:59 AM	PH3 valve closed
11/14/2011	9:11:59 AM	SiCl4 pre valve closed
11/14/2011	9:11:59 AM	SiCl4 post valve closed
11/14/2011	9:11:59 AM	Bypass valve closed
11/14/2011	9:11:59 AM	Bubbler valve closed
11/14/2011	9:11:59 AM	Main Vac valve opened
11/14/2011	9:11:59 AM	Helium MFC set to  0.000000
11/14/2011	9:11:59 AM	H2 MFC set to  0.000000
11/14/2011	9:11:59 AM	BCl3 MFC set to  0.000000
11/14/2011	9:11:59 AM	PHl3 MFC set to  0.000000
11/14/2011	9:11:59 AM	SiCl4 MFC set to  0.000000
11/14/2011	9:11:59 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	9:11:59 AM	Tube furnace set to 150
11/14/2011	9:12:29 AM	H2 valve closed
11/14/2011	9:12:29 AM	BCl3 valve closed
11/14/2011	9:12:29 AM	PH3 valve closed
11/14/2011	9:12:29 AM	SiCl4 pre valve closed
11/14/2011	9:12:29 AM	SiCl4 post valve closed
11/14/2011	9:12:29 AM	Bypass valve closed
11/14/2011	9:12:29 AM	Bubbler valve closed
11/14/2011	9:12:29 AM	Helium valve opened
11/14/2011	9:12:29 AM	Main Vac valve opened
11/14/2011	9:12:29 AM	Helium MFC set to  20.000000
11/14/2011	9:12:29 AM	H2 MFC set to  0.000000
11/14/2011	9:12:29 AM	BCl3 MFC set to  0.000000
11/14/2011	9:12:29 AM	PHl3 MFC set to  0.000000
11/14/2011	9:12:29 AM	SiCl4 MFC set to  0.000000
11/14/2011	9:12:29 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	9:12:29 AM	Tube furnace set to 150
11/14/2011	9:12:59 AM	Helium valve closed
11/14/2011	9:12:59 AM	H2 valve closed
11/14/2011	9:12:59 AM	BCl3 valve closed
11/14/2011	9:12:59 AM	PH3 valve closed
11/14/2011	9:12:59 AM	SiCl4 pre valve closed
11/14/2011	9:12:59 AM	SiCl4 post valve closed
11/14/2011	9:12:59 AM	Bypass valve closed
11/14/2011	9:12:59 AM	Bubbler valve closed
11/14/2011	9:12:59 AM	Main Vac valve opened
11/14/2011	9:12:59 AM	Helium MFC set to  0.000000
11/14/2011	9:12:59 AM	H2 MFC set to  0.000000
11/14/2011	9:12:59 AM	BCl3 MFC set to  0.000000
11/14/2011	9:12:59 AM	PHl3 MFC set to  0.000000
11/14/2011	9:12:59 AM	SiCl4 MFC set to  0.000000
11/14/2011	9:12:59 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	9:12:59 AM	Tube furnace set to 150
11/14/2011	9:13:29 AM	H2 valve closed
11/14/2011	9:13:29 AM	BCl3 valve closed
11/14/2011	9:13:29 AM	PH3 valve closed
11/14/2011	9:13:29 AM	SiCl4 pre valve closed
11/14/2011	9:13:29 AM	SiCl4 post valve closed
11/14/2011	9:13:29 AM	Bypass valve closed
11/14/2011	9:13:29 AM	Bubbler valve closed
11/14/2011	9:13:29 AM	Helium valve opened
11/14/2011	9:13:29 AM	Main Vac valve opened
11/14/2011	9:13:29 AM	Helium MFC set to  20.000000
11/14/2011	9:13:29 AM	H2 MFC set to  0.000000
11/14/2011	9:13:29 AM	BCl3 MFC set to  0.000000
11/14/2011	9:13:29 AM	PHl3 MFC set to  0.000000
11/14/2011	9:13:29 AM	SiCl4 MFC set to  0.000000
11/14/2011	9:13:29 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	9:13:30 AM	Tube furnace set to 150
11/14/2011	9:14:00 AM	Helium valve closed
11/14/2011	9:14:00 AM	H2 valve closed
11/14/2011	9:14:00 AM	BCl3 valve closed
11/14/2011	9:14:00 AM	PH3 valve closed
11/14/2011	9:14:00 AM	SiCl4 pre valve closed
11/14/2011	9:14:00 AM	SiCl4 post valve closed
11/14/2011	9:14:00 AM	Bypass valve closed
11/14/2011	9:14:00 AM	Bubbler valve closed
11/14/2011	9:14:00 AM	Main Vac valve opened
11/14/2011	9:14:00 AM	Helium MFC set to  0.000000
11/14/2011	9:14:00 AM	H2 MFC set to  0.000000
11/14/2011	9:14:00 AM	BCl3 MFC set to  0.000000
11/14/2011	9:14:00 AM	PHl3 MFC set to  0.000000
11/14/2011	9:14:00 AM	SiCl4 MFC set to  0.000000
11/14/2011	9:14:00 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	9:14:00 AM	Tube furnace set to 150
11/14/2011	9:14:01 AM	Run finished at 9:14 AM
11/14/2011	9:18:30 AM	Main Vac valve closed
11/14/2011	9:19:00 AM	Main Vac valve opened
11/14/2011	9:26:59 AM	Recipe started at 9:26 AM
11/14/2011	9:27:00 AM	Helium valve closed
11/14/2011	9:27:00 AM	H2 valve closed
11/14/2011	9:27:00 AM	BCl3 valve closed
11/14/2011	9:27:00 AM	PH3 valve closed
11/14/2011	9:27:00 AM	SiCl4 pre valve closed
11/14/2011	9:27:00 AM	SiCl4 post valve closed
11/14/2011	9:27:00 AM	Main Vac valve closed
11/14/2011	9:27:00 AM	Bypass valve closed
11/14/2011	9:27:00 AM	Bubbler valve closed
11/14/2011	9:27:00 AM	Helium MFC set to  0.000000
11/14/2011	9:27:00 AM	H2 MFC set to  0.000000
11/14/2011	9:27:00 AM	BCl3 MFC set to  0.000000
11/14/2011	9:27:00 AM	PHl3 MFC set to  0.000000
11/14/2011	9:27:00 AM	SiCl4 MFC set to  0.000000
11/14/2011	9:27:00 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	9:27:00 AM	Tube furnace set to 0
11/14/2011	9:27:03 AM	Helium valve closed
11/14/2011	9:27:03 AM	BCl3 valve closed
11/14/2011	9:27:03 AM	PH3 valve closed
11/14/2011	9:27:03 AM	SiCl4 pre valve closed
11/14/2011	9:27:03 AM	SiCl4 post valve closed
11/14/2011	9:27:03 AM	Main Vac valve closed
11/14/2011	9:27:03 AM	Bypass valve closed
11/14/2011	9:27:03 AM	Bubbler valve closed
11/14/2011	9:27:03 AM	H2 valve opened
11/14/2011	9:27:03 AM	Helium MFC set to  0.000000
11/14/2011	9:27:03 AM	H2 MFC set to  500.000000
11/14/2011	9:27:03 AM	BCl3 MFC set to  0.000000
11/14/2011	9:27:03 AM	PHl3 MFC set to  0.000000
11/14/2011	9:27:03 AM	SiCl4 MFC set to  0.000000
11/14/2011	9:27:03 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	9:27:03 AM	Tube furnace set to 0
11/14/2011	9:28:06 AM	Helium valve closed
11/14/2011	9:28:06 AM	BCl3 valve closed
11/14/2011	9:28:06 AM	PH3 valve closed
11/14/2011	9:28:06 AM	SiCl4 pre valve closed
11/14/2011	9:28:06 AM	SiCl4 post valve closed
11/14/2011	9:28:06 AM	Main Vac valve closed
11/14/2011	9:28:06 AM	Bypass valve closed
11/14/2011	9:28:06 AM	H2 valve opened
11/14/2011	9:28:06 AM	Bubbler valve opened
11/14/2011	9:28:06 AM	Helium MFC set to  0.000000
11/14/2011	9:28:06 AM	H2 MFC set to  500.000000
11/14/2011	9:28:06 AM	BCl3 MFC set to  0.000000
11/14/2011	9:28:06 AM	PHl3 MFC set to  0.000000
11/14/2011	9:28:06 AM	SiCl4 MFC set to  0.000000
11/14/2011	9:28:06 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	9:28:06 AM	Tube furnace set to 0
11/14/2011	9:28:07 AM	Helium valve closed
11/14/2011	9:28:07 AM	BCl3 valve closed
11/14/2011	9:28:07 AM	PH3 valve closed
11/14/2011	9:28:07 AM	SiCl4 pre valve closed
11/14/2011	9:28:07 AM	SiCl4 post valve closed
11/14/2011	9:28:07 AM	Main Vac valve closed
11/14/2011	9:28:07 AM	Bypass valve closed
11/14/2011	9:28:07 AM	H2 valve opened
11/14/2011	9:28:07 AM	Bubbler valve opened
11/14/2011	9:28:07 AM	Helium MFC set to  0.000000
11/14/2011	9:28:07 AM	H2 MFC set to  500.000000
11/14/2011	9:28:07 AM	BCl3 MFC set to  0.000000
11/14/2011	9:28:07 AM	PHl3 MFC set to  0.000000
11/14/2011	9:28:07 AM	SiCl4 MFC set to  0.000000
11/14/2011	9:28:07 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	9:28:08 AM	Tube furnace set to 1000
11/14/2011	9:58:07 AM	Helium valve closed
11/14/2011	9:58:07 AM	PH3 valve closed
11/14/2011	9:58:07 AM	Main Vac valve closed
11/14/2011	9:58:07 AM	Bypass valve closed
11/14/2011	9:58:07 AM	H2 valve opened
11/14/2011	9:58:07 AM	BCl3 valve opened
11/14/2011	9:58:08 AM	SiCl4 pre valve opened
11/14/2011	9:58:08 AM	SiCl4 post valve opened
11/14/2011	9:58:08 AM	Bubbler valve opened
11/14/2011	9:58:08 AM	Helium MFC set to  0.000000
11/14/2011	9:58:08 AM	H2 MFC set to  500.000000
11/14/2011	9:58:08 AM	BCl3 MFC set to  3.000000
11/14/2011	9:58:08 AM	PHl3 MFC set to  0.000000
11/14/2011	9:58:08 AM	SiCl4 MFC set to  18.000000
11/14/2011	9:58:08 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	9:58:08 AM	Tube furnace set to 1000
11/14/2011	10:16:08 AM	Helium valve closed
11/14/2011	10:16:08 AM	BCl3 valve closed
11/14/2011	10:16:08 AM	PH3 valve closed
11/14/2011	10:16:08 AM	SiCl4 pre valve closed
11/14/2011	10:16:08 AM	SiCl4 post valve closed
11/14/2011	10:16:08 AM	Main Vac valve closed
11/14/2011	10:16:08 AM	Bypass valve closed
11/14/2011	10:16:08 AM	H2 valve opened
11/14/2011	10:16:08 AM	Bubbler valve opened
11/14/2011	10:16:08 AM	Helium MFC set to  0.000000
11/14/2011	10:16:08 AM	H2 MFC set to  500.000000
11/14/2011	10:16:08 AM	BCl3 MFC set to  0.000000
11/14/2011	10:16:08 AM	PHl3 MFC set to  0.000000
11/14/2011	10:16:08 AM	SiCl4 MFC set to  0.000000
11/14/2011	10:16:08 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	10:16:08 AM	Tube furnace set to 750
11/14/2011	10:26:08 AM	H2 valve closed
11/14/2011	10:26:08 AM	BCl3 valve closed
11/14/2011	10:26:08 AM	PH3 valve closed
11/14/2011	10:26:08 AM	SiCl4 pre valve closed
11/14/2011	10:26:08 AM	SiCl4 post valve closed
11/14/2011	10:26:08 AM	Main Vac valve closed
11/14/2011	10:26:08 AM	Bypass valve closed
11/14/2011	10:26:08 AM	Helium valve opened
11/14/2011	10:26:08 AM	Bubbler valve opened
11/14/2011	10:26:08 AM	Helium MFC set to  500.000000
11/14/2011	10:26:08 AM	H2 MFC set to  0.000000
11/14/2011	10:26:08 AM	BCl3 MFC set to  0.000000
11/14/2011	10:26:08 AM	PHl3 MFC set to  0.000000
11/14/2011	10:26:08 AM	SiCl4 MFC set to  0.000000
11/14/2011	10:26:08 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	10:26:08 AM	Tube furnace set to 0
11/14/2011	10:34:02 AM	Helium valve closed
11/14/2011	10:34:02 AM	H2 valve closed
11/14/2011	10:34:02 AM	BCl3 valve closed
11/14/2011	10:34:02 AM	PH3 valve closed
11/14/2011	10:34:02 AM	SiCl4 pre valve closed
11/14/2011	10:34:02 AM	SiCl4 post valve closed
11/14/2011	10:34:02 AM	Main Vac valve closed
11/14/2011	10:34:02 AM	Bypass valve closed
11/14/2011	10:34:02 AM	Bubbler valve closed
11/14/2011	10:34:02 AM	Helium MFC set to  0.000000
11/14/2011	10:34:02 AM	H2 MFC set to  0.000000
11/14/2011	10:34:02 AM	BCl3 MFC set to  0.000000
11/14/2011	10:34:02 AM	PHl3 MFC set to  0.000000
11/14/2011	10:34:02 AM	SiCl4 MFC set to  0.000000
11/14/2011	10:34:02 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	10:34:02 AM	Tube furnace set to 0
11/14/2011	10:34:03 AM	Run finished at 10:34 AM
11/14/2011	10:34:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2011	10:34:07 AM	Recipe started at 10:34 AM
11/14/2011	10:34:07 AM	Helium valve closed
11/14/2011	10:34:07 AM	H2 valve closed
11/14/2011	10:34:07 AM	BCl3 valve closed
11/14/2011	10:34:07 AM	PH3 valve closed
11/14/2011	10:34:07 AM	SiCl4 pre valve closed
11/14/2011	10:34:07 AM	SiCl4 post valve closed
11/14/2011	10:34:07 AM	Main Vac valve closed
11/14/2011	10:34:07 AM	Bypass valve closed
11/14/2011	10:34:07 AM	Bubbler valve closed
11/14/2011	10:34:07 AM	Helium MFC set to  0.000000
11/14/2011	10:34:07 AM	H2 MFC set to  0.000000
11/14/2011	10:34:07 AM	BCl3 MFC set to  0.000000
11/14/2011	10:34:07 AM	PHl3 MFC set to  0.000000
11/14/2011	10:34:07 AM	SiCl4 MFC set to  0.000000
11/14/2011	10:34:07 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	10:34:07 AM	Tube furnace set to 0
11/14/2011	10:34:10 AM	H2 valve closed
11/14/2011	10:34:10 AM	BCl3 valve closed
11/14/2011	10:34:10 AM	PH3 valve closed
11/14/2011	10:34:10 AM	SiCl4 pre valve closed
11/14/2011	10:34:10 AM	SiCl4 post valve closed
11/14/2011	10:34:10 AM	Main Vac valve closed
11/14/2011	10:34:10 AM	Bypass valve closed
11/14/2011	10:34:10 AM	Bubbler valve closed
11/14/2011	10:34:10 AM	Helium valve opened
11/14/2011	10:34:10 AM	Helium MFC set to  500.000000
11/14/2011	10:34:10 AM	H2 MFC set to  0.000000
11/14/2011	10:34:10 AM	BCl3 MFC set to  0.000000
11/14/2011	10:34:10 AM	PHl3 MFC set to  0.000000
11/14/2011	10:34:10 AM	SiCl4 MFC set to  0.000000
11/14/2011	10:34:10 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	10:34:11 AM	Tube furnace set to 0
11/14/2011	10:34:11 AM	Helium valve closed
11/14/2011	10:34:11 AM	H2 valve closed
11/14/2011	10:34:11 AM	BCl3 valve closed
11/14/2011	10:34:11 AM	PH3 valve closed
11/14/2011	10:34:11 AM	SiCl4 pre valve closed
11/14/2011	10:34:11 AM	SiCl4 post valve closed
11/14/2011	10:34:11 AM	Main Vac valve closed
11/14/2011	10:34:11 AM	Bypass valve closed
11/14/2011	10:34:11 AM	Bubbler valve closed
11/14/2011	10:34:11 AM	Helium MFC set to  0.000000
11/14/2011	10:34:11 AM	H2 MFC set to  0.000000
11/14/2011	10:34:11 AM	BCl3 MFC set to  0.000000
11/14/2011	10:34:11 AM	PHl3 MFC set to  0.000000
11/14/2011	10:34:11 AM	SiCl4 MFC set to  0.000000
11/14/2011	10:34:11 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	10:34:11 AM	Tube furnace set to 0
11/14/2011	10:34:12 AM	Run finished at 10:34 AM
11/14/2011	10:34:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2011	10:42:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2011	10:42:27 AM	Recipe started at 10:42 AM
11/14/2011	10:42:27 AM	Helium valve closed
11/14/2011	10:42:27 AM	H2 valve closed
11/14/2011	10:42:27 AM	BCl3 valve closed
11/14/2011	10:42:27 AM	PH3 valve closed
11/14/2011	10:42:27 AM	SiCl4 pre valve closed
11/14/2011	10:42:27 AM	SiCl4 post valve closed
11/14/2011	10:42:27 AM	Main Vac valve closed
11/14/2011	10:42:27 AM	Bubbler valve closed
11/14/2011	10:42:27 AM	Bypass valve opened
11/14/2011	10:42:27 AM	Helium MFC set to  0.000000
11/14/2011	10:42:27 AM	H2 MFC set to  0.000000
11/14/2011	10:42:28 AM	BCl3 MFC set to  0.000000
11/14/2011	10:42:28 AM	PHl3 MFC set to  0.000000
11/14/2011	10:42:28 AM	SiCl4 MFC set to  0.000000
11/14/2011	10:42:28 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	10:42:28 AM	Tube furnace set to 0
11/14/2011	10:43:36 AM	Helium valve closed
11/14/2011	10:43:36 AM	H2 valve closed
11/14/2011	10:43:36 AM	BCl3 valve closed
11/14/2011	10:43:36 AM	PH3 valve closed
11/14/2011	10:43:36 AM	SiCl4 pre valve closed
11/14/2011	10:43:36 AM	SiCl4 post valve closed
11/14/2011	10:43:36 AM	Main Vac valve closed
11/14/2011	10:43:36 AM	Bubbler valve closed
11/14/2011	10:43:36 AM	Bypass valve opened
11/14/2011	10:43:36 AM	Helium MFC set to  0.000000
11/14/2011	10:43:36 AM	H2 MFC set to  0.000000
11/14/2011	10:43:36 AM	BCl3 MFC set to  0.000000
11/14/2011	10:43:36 AM	PHl3 MFC set to  0.000000
11/14/2011	10:43:36 AM	SiCl4 MFC set to  0.000000
11/14/2011	10:43:36 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	10:43:36 AM	Tube furnace set to 0
11/14/2011	10:44:36 AM	Helium valve closed
11/14/2011	10:44:36 AM	H2 valve closed
11/14/2011	10:44:36 AM	BCl3 valve closed
11/14/2011	10:44:36 AM	PH3 valve closed
11/14/2011	10:44:36 AM	SiCl4 pre valve closed
11/14/2011	10:44:36 AM	SiCl4 post valve closed
11/14/2011	10:44:36 AM	Bypass valve closed
11/14/2011	10:44:36 AM	Bubbler valve closed
11/14/2011	10:44:36 AM	Main Vac valve opened
11/14/2011	10:44:36 AM	Helium MFC set to  0.000000
11/14/2011	10:44:36 AM	H2 MFC set to  0.000000
11/14/2011	10:44:36 AM	BCl3 MFC set to  0.000000
11/14/2011	10:44:36 AM	PHl3 MFC set to  0.000000
11/14/2011	10:44:36 AM	SiCl4 MFC set to  0.000000
11/14/2011	10:44:36 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	10:44:37 AM	Tube furnace set to 0
11/14/2011	10:44:38 AM	Run finished at 10:44 AM
11/14/2011	10:44:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2011	10:53:05 AM	Recipe started at 10:52 AM
11/14/2011	10:53:05 AM	Helium valve closed
11/14/2011	10:53:05 AM	H2 valve closed
11/14/2011	10:53:05 AM	BCl3 valve closed
11/14/2011	10:53:05 AM	PH3 valve closed
11/14/2011	10:53:05 AM	SiCl4 pre valve closed
11/14/2011	10:53:05 AM	SiCl4 post valve closed
11/14/2011	10:53:05 AM	Bypass valve closed
11/14/2011	10:53:05 AM	Bubbler valve closed
11/14/2011	10:53:05 AM	Main Vac valve opened
11/14/2011	10:53:05 AM	Helium MFC set to  0.000000
11/14/2011	10:53:05 AM	H2 MFC set to  0.000000
11/14/2011	10:53:05 AM	BCl3 MFC set to  0.000000
11/14/2011	10:53:05 AM	PHl3 MFC set to  0.000000
11/14/2011	10:53:05 AM	SiCl4 MFC set to  0.000000
11/14/2011	10:53:05 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	10:53:05 AM	Tube furnace set to 150
11/14/2011	10:53:35 AM	H2 valve closed
11/14/2011	10:53:35 AM	BCl3 valve closed
11/14/2011	10:53:35 AM	PH3 valve closed
11/14/2011	10:53:35 AM	SiCl4 pre valve closed
11/14/2011	10:53:35 AM	SiCl4 post valve closed
11/14/2011	10:53:35 AM	Bypass valve closed
11/14/2011	10:53:35 AM	Bubbler valve closed
11/14/2011	10:53:35 AM	Helium valve opened
11/14/2011	10:53:35 AM	Main Vac valve opened
11/14/2011	10:53:35 AM	Helium MFC set to  20.000000
11/14/2011	10:53:35 AM	H2 MFC set to  0.000000
11/14/2011	10:53:35 AM	BCl3 MFC set to  0.000000
11/14/2011	10:53:35 AM	PHl3 MFC set to  0.000000
11/14/2011	10:53:35 AM	SiCl4 MFC set to  0.000000
11/14/2011	10:53:35 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	10:53:35 AM	Tube furnace set to 150
11/14/2011	10:54:05 AM	Helium valve closed
11/14/2011	10:54:05 AM	H2 valve closed
11/14/2011	10:54:05 AM	BCl3 valve closed
11/14/2011	10:54:05 AM	PH3 valve closed
11/14/2011	10:54:05 AM	SiCl4 pre valve closed
11/14/2011	10:54:05 AM	SiCl4 post valve closed
11/14/2011	10:54:05 AM	Bypass valve closed
11/14/2011	10:54:05 AM	Bubbler valve closed
11/14/2011	10:54:05 AM	Main Vac valve opened
11/14/2011	10:54:05 AM	Helium MFC set to  0.000000
11/14/2011	10:54:05 AM	H2 MFC set to  0.000000
11/14/2011	10:54:05 AM	BCl3 MFC set to  0.000000
11/14/2011	10:54:05 AM	PHl3 MFC set to  0.000000
11/14/2011	10:54:05 AM	SiCl4 MFC set to  0.000000
11/14/2011	10:54:05 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	10:54:05 AM	Tube furnace set to 150
11/14/2011	10:54:35 AM	H2 valve closed
11/14/2011	10:54:35 AM	BCl3 valve closed
11/14/2011	10:54:35 AM	PH3 valve closed
11/14/2011	10:54:35 AM	SiCl4 pre valve closed
11/14/2011	10:54:35 AM	SiCl4 post valve closed
11/14/2011	10:54:35 AM	Bypass valve closed
11/14/2011	10:54:35 AM	Bubbler valve closed
11/14/2011	10:54:35 AM	Helium valve opened
11/14/2011	10:54:35 AM	Main Vac valve opened
11/14/2011	10:54:35 AM	Helium MFC set to  20.000000
11/14/2011	10:54:35 AM	H2 MFC set to  0.000000
11/14/2011	10:54:35 AM	BCl3 MFC set to  0.000000
11/14/2011	10:54:35 AM	PHl3 MFC set to  0.000000
11/14/2011	10:54:35 AM	SiCl4 MFC set to  0.000000
11/14/2011	10:54:35 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	10:54:36 AM	Tube furnace set to 150
11/14/2011	10:55:06 AM	Helium valve closed
11/14/2011	10:55:06 AM	H2 valve closed
11/14/2011	10:55:06 AM	BCl3 valve closed
11/14/2011	10:55:06 AM	PH3 valve closed
11/14/2011	10:55:06 AM	SiCl4 pre valve closed
11/14/2011	10:55:06 AM	SiCl4 post valve closed
11/14/2011	10:55:06 AM	Bypass valve closed
11/14/2011	10:55:06 AM	Bubbler valve closed
11/14/2011	10:55:06 AM	Main Vac valve opened
11/14/2011	10:55:06 AM	Helium MFC set to  0.000000
11/14/2011	10:55:06 AM	H2 MFC set to  0.000000
11/14/2011	10:55:06 AM	BCl3 MFC set to  0.000000
11/14/2011	10:55:06 AM	PHl3 MFC set to  0.000000
11/14/2011	10:55:06 AM	SiCl4 MFC set to  0.000000
11/14/2011	10:55:06 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	10:55:06 AM	Tube furnace set to 150
11/14/2011	10:55:36 AM	H2 valve closed
11/14/2011	10:55:36 AM	BCl3 valve closed
11/14/2011	10:55:36 AM	PH3 valve closed
11/14/2011	10:55:36 AM	SiCl4 pre valve closed
11/14/2011	10:55:36 AM	SiCl4 post valve closed
11/14/2011	10:55:36 AM	Bypass valve closed
11/14/2011	10:55:36 AM	Bubbler valve closed
11/14/2011	10:55:36 AM	Helium valve opened
11/14/2011	10:55:36 AM	Main Vac valve opened
11/14/2011	10:55:36 AM	Helium MFC set to  20.000000
11/14/2011	10:55:36 AM	H2 MFC set to  0.000000
11/14/2011	10:55:36 AM	BCl3 MFC set to  0.000000
11/14/2011	10:55:36 AM	PHl3 MFC set to  0.000000
11/14/2011	10:55:36 AM	SiCl4 MFC set to  0.000000
11/14/2011	10:55:36 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	10:55:36 AM	Tube furnace set to 150
11/14/2011	10:56:06 AM	Helium valve closed
11/14/2011	10:56:06 AM	H2 valve closed
11/14/2011	10:56:06 AM	BCl3 valve closed
11/14/2011	10:56:06 AM	PH3 valve closed
11/14/2011	10:56:06 AM	SiCl4 pre valve closed
11/14/2011	10:56:06 AM	SiCl4 post valve closed
11/14/2011	10:56:06 AM	Bypass valve closed
11/14/2011	10:56:06 AM	Bubbler valve closed
11/14/2011	10:56:06 AM	Main Vac valve opened
11/14/2011	10:56:06 AM	Helium MFC set to  0.000000
11/14/2011	10:56:06 AM	H2 MFC set to  0.000000
11/14/2011	10:56:06 AM	BCl3 MFC set to  0.000000
11/14/2011	10:56:06 AM	PHl3 MFC set to  0.000000
11/14/2011	10:56:06 AM	SiCl4 MFC set to  0.000000
11/14/2011	10:56:06 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	10:56:06 AM	Tube furnace set to 150
11/14/2011	10:56:36 AM	H2 valve closed
11/14/2011	10:56:36 AM	BCl3 valve closed
11/14/2011	10:56:36 AM	PH3 valve closed
11/14/2011	10:56:36 AM	SiCl4 pre valve closed
11/14/2011	10:56:36 AM	SiCl4 post valve closed
11/14/2011	10:56:36 AM	Bypass valve closed
11/14/2011	10:56:36 AM	Bubbler valve closed
11/14/2011	10:56:36 AM	Helium valve opened
11/14/2011	10:56:36 AM	Main Vac valve opened
11/14/2011	10:56:36 AM	Helium MFC set to  20.000000
11/14/2011	10:56:36 AM	H2 MFC set to  0.000000
11/14/2011	10:56:36 AM	BCl3 MFC set to  0.000000
11/14/2011	10:56:36 AM	PHl3 MFC set to  0.000000
11/14/2011	10:56:36 AM	SiCl4 MFC set to  0.000000
11/14/2011	10:56:36 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	10:56:36 AM	Tube furnace set to 150
11/14/2011	10:57:06 AM	Helium valve closed
11/14/2011	10:57:06 AM	H2 valve closed
11/14/2011	10:57:06 AM	BCl3 valve closed
11/14/2011	10:57:06 AM	PH3 valve closed
11/14/2011	10:57:06 AM	SiCl4 pre valve closed
11/14/2011	10:57:06 AM	SiCl4 post valve closed
11/14/2011	10:57:06 AM	Bypass valve closed
11/14/2011	10:57:06 AM	Bubbler valve closed
11/14/2011	10:57:06 AM	Main Vac valve opened
11/14/2011	10:57:06 AM	Helium MFC set to  0.000000
11/14/2011	10:57:06 AM	H2 MFC set to  0.000000
11/14/2011	10:57:06 AM	BCl3 MFC set to  0.000000
11/14/2011	10:57:06 AM	PHl3 MFC set to  0.000000
11/14/2011	10:57:06 AM	SiCl4 MFC set to  0.000000
11/14/2011	10:57:06 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	10:57:07 AM	Tube furnace set to 150
11/14/2011	10:57:37 AM	H2 valve closed
11/14/2011	10:57:37 AM	BCl3 valve closed
11/14/2011	10:57:37 AM	PH3 valve closed
11/14/2011	10:57:37 AM	SiCl4 pre valve closed
11/14/2011	10:57:37 AM	SiCl4 post valve closed
11/14/2011	10:57:37 AM	Bypass valve closed
11/14/2011	10:57:37 AM	Bubbler valve closed
11/14/2011	10:57:37 AM	Helium valve opened
11/14/2011	10:57:37 AM	Main Vac valve opened
11/14/2011	10:57:37 AM	Helium MFC set to  20.000000
11/14/2011	10:57:37 AM	H2 MFC set to  0.000000
11/14/2011	10:57:37 AM	BCl3 MFC set to  0.000000
11/14/2011	10:57:37 AM	PHl3 MFC set to  0.000000
11/14/2011	10:57:37 AM	SiCl4 MFC set to  0.000000
11/14/2011	10:57:37 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	10:57:37 AM	Tube furnace set to 150
11/14/2011	10:58:07 AM	Helium valve closed
11/14/2011	10:58:07 AM	H2 valve closed
11/14/2011	10:58:07 AM	BCl3 valve closed
11/14/2011	10:58:07 AM	PH3 valve closed
11/14/2011	10:58:07 AM	SiCl4 pre valve closed
11/14/2011	10:58:07 AM	SiCl4 post valve closed
11/14/2011	10:58:07 AM	Bypass valve closed
11/14/2011	10:58:07 AM	Bubbler valve closed
11/14/2011	10:58:07 AM	Main Vac valve opened
11/14/2011	10:58:07 AM	Helium MFC set to  0.000000
11/14/2011	10:58:07 AM	H2 MFC set to  0.000000
11/14/2011	10:58:07 AM	BCl3 MFC set to  0.000000
11/14/2011	10:58:07 AM	PHl3 MFC set to  0.000000
11/14/2011	10:58:07 AM	SiCl4 MFC set to  0.000000
11/14/2011	10:58:07 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	10:58:07 AM	Tube furnace set to 150
11/14/2011	10:58:37 AM	H2 valve closed
11/14/2011	10:58:37 AM	BCl3 valve closed
11/14/2011	10:58:37 AM	PH3 valve closed
11/14/2011	10:58:37 AM	SiCl4 pre valve closed
11/14/2011	10:58:37 AM	SiCl4 post valve closed
11/14/2011	10:58:37 AM	Bypass valve closed
11/14/2011	10:58:37 AM	Bubbler valve closed
11/14/2011	10:58:37 AM	Helium valve opened
11/14/2011	10:58:37 AM	Main Vac valve opened
11/14/2011	10:58:37 AM	Helium MFC set to  20.000000
11/14/2011	10:58:37 AM	H2 MFC set to  0.000000
11/14/2011	10:58:37 AM	BCl3 MFC set to  0.000000
11/14/2011	10:58:37 AM	PHl3 MFC set to  0.000000
11/14/2011	10:58:37 AM	SiCl4 MFC set to  0.000000
11/14/2011	10:58:37 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	10:58:37 AM	Tube furnace set to 150
11/14/2011	10:59:07 AM	Helium valve closed
11/14/2011	10:59:07 AM	H2 valve closed
11/14/2011	10:59:07 AM	BCl3 valve closed
11/14/2011	10:59:07 AM	PH3 valve closed
11/14/2011	10:59:07 AM	SiCl4 pre valve closed
11/14/2011	10:59:07 AM	SiCl4 post valve closed
11/14/2011	10:59:07 AM	Bypass valve closed
11/14/2011	10:59:07 AM	Bubbler valve closed
11/14/2011	10:59:07 AM	Main Vac valve opened
11/14/2011	10:59:07 AM	Helium MFC set to  0.000000
11/14/2011	10:59:07 AM	H2 MFC set to  0.000000
11/14/2011	10:59:07 AM	BCl3 MFC set to  0.000000
11/14/2011	10:59:07 AM	PHl3 MFC set to  0.000000
11/14/2011	10:59:07 AM	SiCl4 MFC set to  0.000000
11/14/2011	10:59:07 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	10:59:07 AM	Tube furnace set to 150
11/14/2011	10:59:37 AM	H2 valve closed
11/14/2011	10:59:37 AM	BCl3 valve closed
11/14/2011	10:59:37 AM	PH3 valve closed
11/14/2011	10:59:37 AM	SiCl4 pre valve closed
11/14/2011	10:59:37 AM	SiCl4 post valve closed
11/14/2011	10:59:37 AM	Bypass valve closed
11/14/2011	10:59:37 AM	Bubbler valve closed
11/14/2011	10:59:38 AM	Helium valve opened
11/14/2011	10:59:38 AM	Main Vac valve opened
11/14/2011	10:59:38 AM	Helium MFC set to  20.000000
11/14/2011	10:59:38 AM	H2 MFC set to  0.000000
11/14/2011	10:59:38 AM	BCl3 MFC set to  0.000000
11/14/2011	10:59:38 AM	PHl3 MFC set to  0.000000
11/14/2011	10:59:38 AM	SiCl4 MFC set to  0.000000
11/14/2011	10:59:38 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	10:59:38 AM	Tube furnace set to 150
11/14/2011	11:00:08 AM	Helium valve closed
11/14/2011	11:00:08 AM	H2 valve closed
11/14/2011	11:00:08 AM	BCl3 valve closed
11/14/2011	11:00:08 AM	PH3 valve closed
11/14/2011	11:00:08 AM	SiCl4 pre valve closed
11/14/2011	11:00:08 AM	SiCl4 post valve closed
11/14/2011	11:00:08 AM	Bypass valve closed
11/14/2011	11:00:08 AM	Bubbler valve closed
11/14/2011	11:00:08 AM	Main Vac valve opened
11/14/2011	11:00:08 AM	Helium MFC set to  0.000000
11/14/2011	11:00:08 AM	H2 MFC set to  0.000000
11/14/2011	11:00:08 AM	BCl3 MFC set to  0.000000
11/14/2011	11:00:08 AM	PHl3 MFC set to  0.000000
11/14/2011	11:00:08 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:00:08 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:00:08 AM	Tube furnace set to 150
11/14/2011	11:00:38 AM	H2 valve closed
11/14/2011	11:00:38 AM	BCl3 valve closed
11/14/2011	11:00:38 AM	PH3 valve closed
11/14/2011	11:00:38 AM	SiCl4 pre valve closed
11/14/2011	11:00:38 AM	SiCl4 post valve closed
11/14/2011	11:00:38 AM	Bypass valve closed
11/14/2011	11:00:38 AM	Bubbler valve closed
11/14/2011	11:00:38 AM	Helium valve opened
11/14/2011	11:00:38 AM	Main Vac valve opened
11/14/2011	11:00:38 AM	Helium MFC set to  20.000000
11/14/2011	11:00:38 AM	H2 MFC set to  0.000000
11/14/2011	11:00:38 AM	BCl3 MFC set to  0.000000
11/14/2011	11:00:38 AM	PHl3 MFC set to  0.000000
11/14/2011	11:00:38 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:00:38 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:00:38 AM	Tube furnace set to 150
11/14/2011	11:01:08 AM	Helium valve closed
11/14/2011	11:01:08 AM	H2 valve closed
11/14/2011	11:01:08 AM	BCl3 valve closed
11/14/2011	11:01:08 AM	PH3 valve closed
11/14/2011	11:01:08 AM	SiCl4 pre valve closed
11/14/2011	11:01:08 AM	SiCl4 post valve closed
11/14/2011	11:01:08 AM	Bypass valve closed
11/14/2011	11:01:08 AM	Bubbler valve closed
11/14/2011	11:01:08 AM	Main Vac valve opened
11/14/2011	11:01:08 AM	Helium MFC set to  0.000000
11/14/2011	11:01:08 AM	H2 MFC set to  0.000000
11/14/2011	11:01:08 AM	BCl3 MFC set to  0.000000
11/14/2011	11:01:08 AM	PHl3 MFC set to  0.000000
11/14/2011	11:01:08 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:01:08 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:01:08 AM	Tube furnace set to 150
11/14/2011	11:01:38 AM	H2 valve closed
11/14/2011	11:01:38 AM	BCl3 valve closed
11/14/2011	11:01:38 AM	PH3 valve closed
11/14/2011	11:01:38 AM	SiCl4 pre valve closed
11/14/2011	11:01:38 AM	SiCl4 post valve closed
11/14/2011	11:01:38 AM	Bypass valve closed
11/14/2011	11:01:38 AM	Bubbler valve closed
11/14/2011	11:01:38 AM	Helium valve opened
11/14/2011	11:01:38 AM	Main Vac valve opened
11/14/2011	11:01:38 AM	Helium MFC set to  20.000000
11/14/2011	11:01:38 AM	H2 MFC set to  0.000000
11/14/2011	11:01:38 AM	BCl3 MFC set to  0.000000
11/14/2011	11:01:38 AM	PHl3 MFC set to  0.000000
11/14/2011	11:01:38 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:01:38 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:01:38 AM	Tube furnace set to 150
11/14/2011	11:02:08 AM	Helium valve closed
11/14/2011	11:02:08 AM	H2 valve closed
11/14/2011	11:02:08 AM	BCl3 valve closed
11/14/2011	11:02:08 AM	PH3 valve closed
11/14/2011	11:02:08 AM	SiCl4 pre valve closed
11/14/2011	11:02:08 AM	SiCl4 post valve closed
11/14/2011	11:02:08 AM	Bypass valve closed
11/14/2011	11:02:08 AM	Bubbler valve closed
11/14/2011	11:02:08 AM	Main Vac valve opened
11/14/2011	11:02:08 AM	Helium MFC set to  0.000000
11/14/2011	11:02:08 AM	H2 MFC set to  0.000000
11/14/2011	11:02:08 AM	BCl3 MFC set to  0.000000
11/14/2011	11:02:09 AM	PHl3 MFC set to  0.000000
11/14/2011	11:02:09 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:02:09 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:02:09 AM	Tube furnace set to 150
11/14/2011	11:02:39 AM	H2 valve closed
11/14/2011	11:02:39 AM	BCl3 valve closed
11/14/2011	11:02:39 AM	PH3 valve closed
11/14/2011	11:02:39 AM	SiCl4 pre valve closed
11/14/2011	11:02:39 AM	SiCl4 post valve closed
11/14/2011	11:02:39 AM	Bypass valve closed
11/14/2011	11:02:39 AM	Bubbler valve closed
11/14/2011	11:02:39 AM	Helium valve opened
11/14/2011	11:02:39 AM	Main Vac valve opened
11/14/2011	11:02:39 AM	Helium MFC set to  20.000000
11/14/2011	11:02:39 AM	H2 MFC set to  0.000000
11/14/2011	11:02:39 AM	BCl3 MFC set to  0.000000
11/14/2011	11:02:39 AM	PHl3 MFC set to  0.000000
11/14/2011	11:02:39 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:02:39 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:02:39 AM	Tube furnace set to 150
11/14/2011	11:03:09 AM	Helium valve closed
11/14/2011	11:03:09 AM	H2 valve closed
11/14/2011	11:03:09 AM	BCl3 valve closed
11/14/2011	11:03:09 AM	PH3 valve closed
11/14/2011	11:03:09 AM	SiCl4 pre valve closed
11/14/2011	11:03:09 AM	SiCl4 post valve closed
11/14/2011	11:03:09 AM	Bypass valve closed
11/14/2011	11:03:09 AM	Bubbler valve closed
11/14/2011	11:03:09 AM	Main Vac valve opened
11/14/2011	11:03:09 AM	Helium MFC set to  0.000000
11/14/2011	11:03:09 AM	H2 MFC set to  0.000000
11/14/2011	11:03:09 AM	BCl3 MFC set to  0.000000
11/14/2011	11:03:09 AM	PHl3 MFC set to  0.000000
11/14/2011	11:03:09 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:03:09 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:03:09 AM	Tube furnace set to 150
11/14/2011	11:03:10 AM	Run finished at 11:03 AM
11/14/2011	11:08:13 AM	Recipe started at 11:08 AM
11/14/2011	11:08:13 AM	Helium valve closed
11/14/2011	11:08:13 AM	H2 valve closed
11/14/2011	11:08:13 AM	BCl3 valve closed
11/14/2011	11:08:13 AM	PH3 valve closed
11/14/2011	11:08:13 AM	SiCl4 pre valve closed
11/14/2011	11:08:13 AM	SiCl4 post valve closed
11/14/2011	11:08:13 AM	Bypass valve closed
11/14/2011	11:08:13 AM	Bubbler valve closed
11/14/2011	11:08:13 AM	Main Vac valve opened
11/14/2011	11:08:13 AM	Helium MFC set to  0.000000
11/14/2011	11:08:13 AM	H2 MFC set to  0.000000
11/14/2011	11:08:13 AM	BCl3 MFC set to  0.000000
11/14/2011	11:08:13 AM	PHl3 MFC set to  0.000000
11/14/2011	11:08:13 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:08:13 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:08:13 AM	Tube furnace set to 150
11/14/2011	11:08:43 AM	H2 valve closed
11/14/2011	11:08:43 AM	BCl3 valve closed
11/14/2011	11:08:43 AM	PH3 valve closed
11/14/2011	11:08:43 AM	SiCl4 pre valve closed
11/14/2011	11:08:43 AM	SiCl4 post valve closed
11/14/2011	11:08:43 AM	Bypass valve closed
11/14/2011	11:08:43 AM	Bubbler valve closed
11/14/2011	11:08:43 AM	Helium valve opened
11/14/2011	11:08:43 AM	Main Vac valve opened
11/14/2011	11:08:43 AM	Helium MFC set to  20.000000
11/14/2011	11:08:43 AM	H2 MFC set to  0.000000
11/14/2011	11:08:43 AM	BCl3 MFC set to  0.000000
11/14/2011	11:08:43 AM	PHl3 MFC set to  0.000000
11/14/2011	11:08:43 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:08:43 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:08:43 AM	Tube furnace set to 150
11/14/2011	11:09:13 AM	Helium valve closed
11/14/2011	11:09:13 AM	H2 valve closed
11/14/2011	11:09:13 AM	BCl3 valve closed
11/14/2011	11:09:13 AM	PH3 valve closed
11/14/2011	11:09:13 AM	SiCl4 pre valve closed
11/14/2011	11:09:13 AM	SiCl4 post valve closed
11/14/2011	11:09:13 AM	Bypass valve closed
11/14/2011	11:09:13 AM	Bubbler valve closed
11/14/2011	11:09:13 AM	Main Vac valve opened
11/14/2011	11:09:13 AM	Helium MFC set to  0.000000
11/14/2011	11:09:13 AM	H2 MFC set to  0.000000
11/14/2011	11:09:13 AM	BCl3 MFC set to  0.000000
11/14/2011	11:09:13 AM	PHl3 MFC set to  0.000000
11/14/2011	11:09:13 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:09:13 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:09:13 AM	Tube furnace set to 150
11/14/2011	11:09:43 AM	H2 valve closed
11/14/2011	11:09:43 AM	BCl3 valve closed
11/14/2011	11:09:43 AM	PH3 valve closed
11/14/2011	11:09:43 AM	SiCl4 pre valve closed
11/14/2011	11:09:43 AM	SiCl4 post valve closed
11/14/2011	11:09:43 AM	Bypass valve closed
11/14/2011	11:09:43 AM	Bubbler valve closed
11/14/2011	11:09:43 AM	Helium valve opened
11/14/2011	11:09:43 AM	Main Vac valve opened
11/14/2011	11:09:43 AM	Helium MFC set to  20.000000
11/14/2011	11:09:43 AM	H2 MFC set to  0.000000
11/14/2011	11:09:43 AM	BCl3 MFC set to  0.000000
11/14/2011	11:09:43 AM	PHl3 MFC set to  0.000000
11/14/2011	11:09:43 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:09:43 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:09:44 AM	Tube furnace set to 150
11/14/2011	11:10:14 AM	Helium valve closed
11/14/2011	11:10:14 AM	H2 valve closed
11/14/2011	11:10:14 AM	BCl3 valve closed
11/14/2011	11:10:14 AM	PH3 valve closed
11/14/2011	11:10:14 AM	SiCl4 pre valve closed
11/14/2011	11:10:14 AM	SiCl4 post valve closed
11/14/2011	11:10:14 AM	Bypass valve closed
11/14/2011	11:10:14 AM	Bubbler valve closed
11/14/2011	11:10:14 AM	Main Vac valve opened
11/14/2011	11:10:14 AM	Helium MFC set to  0.000000
11/14/2011	11:10:14 AM	H2 MFC set to  0.000000
11/14/2011	11:10:14 AM	BCl3 MFC set to  0.000000
11/14/2011	11:10:14 AM	PHl3 MFC set to  0.000000
11/14/2011	11:10:14 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:10:14 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:10:14 AM	Tube furnace set to 150
11/14/2011	11:10:44 AM	H2 valve closed
11/14/2011	11:10:44 AM	BCl3 valve closed
11/14/2011	11:10:44 AM	PH3 valve closed
11/14/2011	11:10:44 AM	SiCl4 pre valve closed
11/14/2011	11:10:44 AM	SiCl4 post valve closed
11/14/2011	11:10:44 AM	Bypass valve closed
11/14/2011	11:10:44 AM	Bubbler valve closed
11/14/2011	11:10:44 AM	Helium valve opened
11/14/2011	11:10:44 AM	Main Vac valve opened
11/14/2011	11:10:44 AM	Helium MFC set to  20.000000
11/14/2011	11:10:44 AM	H2 MFC set to  0.000000
11/14/2011	11:10:44 AM	BCl3 MFC set to  0.000000
11/14/2011	11:10:44 AM	PHl3 MFC set to  0.000000
11/14/2011	11:10:44 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:10:44 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:10:44 AM	Tube furnace set to 150
11/14/2011	11:11:14 AM	Helium valve closed
11/14/2011	11:11:14 AM	H2 valve closed
11/14/2011	11:11:14 AM	BCl3 valve closed
11/14/2011	11:11:14 AM	PH3 valve closed
11/14/2011	11:11:14 AM	SiCl4 pre valve closed
11/14/2011	11:11:14 AM	SiCl4 post valve closed
11/14/2011	11:11:14 AM	Bypass valve closed
11/14/2011	11:11:14 AM	Bubbler valve closed
11/14/2011	11:11:14 AM	Main Vac valve opened
11/14/2011	11:11:14 AM	Helium MFC set to  0.000000
11/14/2011	11:11:14 AM	H2 MFC set to  0.000000
11/14/2011	11:11:14 AM	BCl3 MFC set to  0.000000
11/14/2011	11:11:14 AM	PHl3 MFC set to  0.000000
11/14/2011	11:11:14 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:11:14 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:11:14 AM	Tube furnace set to 150
11/14/2011	11:11:44 AM	H2 valve closed
11/14/2011	11:11:44 AM	BCl3 valve closed
11/14/2011	11:11:44 AM	PH3 valve closed
11/14/2011	11:11:44 AM	SiCl4 pre valve closed
11/14/2011	11:11:44 AM	SiCl4 post valve closed
11/14/2011	11:11:44 AM	Bypass valve closed
11/14/2011	11:11:44 AM	Bubbler valve closed
11/14/2011	11:11:44 AM	Helium valve opened
11/14/2011	11:11:44 AM	Main Vac valve opened
11/14/2011	11:11:44 AM	Helium MFC set to  20.000000
11/14/2011	11:11:44 AM	H2 MFC set to  0.000000
11/14/2011	11:11:44 AM	BCl3 MFC set to  0.000000
11/14/2011	11:11:44 AM	PHl3 MFC set to  0.000000
11/14/2011	11:11:44 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:11:44 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:11:44 AM	Tube furnace set to 150
11/14/2011	11:12:14 AM	Helium valve closed
11/14/2011	11:12:14 AM	H2 valve closed
11/14/2011	11:12:14 AM	BCl3 valve closed
11/14/2011	11:12:14 AM	PH3 valve closed
11/14/2011	11:12:14 AM	SiCl4 pre valve closed
11/14/2011	11:12:14 AM	SiCl4 post valve closed
11/14/2011	11:12:14 AM	Bypass valve closed
11/14/2011	11:12:14 AM	Bubbler valve closed
11/14/2011	11:12:14 AM	Main Vac valve opened
11/14/2011	11:12:14 AM	Helium MFC set to  0.000000
11/14/2011	11:12:14 AM	H2 MFC set to  0.000000
11/14/2011	11:12:14 AM	BCl3 MFC set to  0.000000
11/14/2011	11:12:14 AM	PHl3 MFC set to  0.000000
11/14/2011	11:12:14 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:12:14 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:12:15 AM	Tube furnace set to 150
11/14/2011	11:12:45 AM	H2 valve closed
11/14/2011	11:12:45 AM	BCl3 valve closed
11/14/2011	11:12:45 AM	PH3 valve closed
11/14/2011	11:12:45 AM	SiCl4 pre valve closed
11/14/2011	11:12:45 AM	SiCl4 post valve closed
11/14/2011	11:12:45 AM	Bypass valve closed
11/14/2011	11:12:45 AM	Bubbler valve closed
11/14/2011	11:12:45 AM	Helium valve opened
11/14/2011	11:12:45 AM	Main Vac valve opened
11/14/2011	11:12:45 AM	Helium MFC set to  20.000000
11/14/2011	11:12:45 AM	H2 MFC set to  0.000000
11/14/2011	11:12:45 AM	BCl3 MFC set to  0.000000
11/14/2011	11:12:45 AM	PHl3 MFC set to  0.000000
11/14/2011	11:12:45 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:12:45 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:12:45 AM	Tube furnace set to 150
11/14/2011	11:13:15 AM	Helium valve closed
11/14/2011	11:13:15 AM	H2 valve closed
11/14/2011	11:13:15 AM	BCl3 valve closed
11/14/2011	11:13:15 AM	PH3 valve closed
11/14/2011	11:13:15 AM	SiCl4 pre valve closed
11/14/2011	11:13:15 AM	SiCl4 post valve closed
11/14/2011	11:13:15 AM	Bypass valve closed
11/14/2011	11:13:15 AM	Bubbler valve closed
11/14/2011	11:13:15 AM	Main Vac valve opened
11/14/2011	11:13:15 AM	Helium MFC set to  0.000000
11/14/2011	11:13:15 AM	H2 MFC set to  0.000000
11/14/2011	11:13:15 AM	BCl3 MFC set to  0.000000
11/14/2011	11:13:15 AM	PHl3 MFC set to  0.000000
11/14/2011	11:13:15 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:13:15 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:13:15 AM	Tube furnace set to 150
11/14/2011	11:13:45 AM	H2 valve closed
11/14/2011	11:13:45 AM	BCl3 valve closed
11/14/2011	11:13:45 AM	PH3 valve closed
11/14/2011	11:13:45 AM	SiCl4 pre valve closed
11/14/2011	11:13:45 AM	SiCl4 post valve closed
11/14/2011	11:13:45 AM	Bypass valve closed
11/14/2011	11:13:45 AM	Bubbler valve closed
11/14/2011	11:13:45 AM	Helium valve opened
11/14/2011	11:13:45 AM	Main Vac valve opened
11/14/2011	11:13:45 AM	Helium MFC set to  20.000000
11/14/2011	11:13:45 AM	H2 MFC set to  0.000000
11/14/2011	11:13:45 AM	BCl3 MFC set to  0.000000
11/14/2011	11:13:45 AM	PHl3 MFC set to  0.000000
11/14/2011	11:13:45 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:13:45 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:13:45 AM	Tube furnace set to 150
11/14/2011	11:14:15 AM	Helium valve closed
11/14/2011	11:14:15 AM	H2 valve closed
11/14/2011	11:14:15 AM	BCl3 valve closed
11/14/2011	11:14:15 AM	PH3 valve closed
11/14/2011	11:14:15 AM	SiCl4 pre valve closed
11/14/2011	11:14:15 AM	SiCl4 post valve closed
11/14/2011	11:14:15 AM	Bypass valve closed
11/14/2011	11:14:15 AM	Bubbler valve closed
11/14/2011	11:14:15 AM	Main Vac valve opened
11/14/2011	11:14:15 AM	Helium MFC set to  0.000000
11/14/2011	11:14:15 AM	H2 MFC set to  0.000000
11/14/2011	11:14:15 AM	BCl3 MFC set to  0.000000
11/14/2011	11:14:15 AM	PHl3 MFC set to  0.000000
11/14/2011	11:14:15 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:14:15 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:14:15 AM	Tube furnace set to 150
11/14/2011	11:14:45 AM	H2 valve closed
11/14/2011	11:14:45 AM	BCl3 valve closed
11/14/2011	11:14:45 AM	PH3 valve closed
11/14/2011	11:14:45 AM	SiCl4 pre valve closed
11/14/2011	11:14:45 AM	SiCl4 post valve closed
11/14/2011	11:14:45 AM	Bypass valve closed
11/14/2011	11:14:45 AM	Bubbler valve closed
11/14/2011	11:14:45 AM	Helium valve opened
11/14/2011	11:14:45 AM	Main Vac valve opened
11/14/2011	11:14:45 AM	Helium MFC set to  20.000000
11/14/2011	11:14:45 AM	H2 MFC set to  0.000000
11/14/2011	11:14:45 AM	BCl3 MFC set to  0.000000
11/14/2011	11:14:45 AM	PHl3 MFC set to  0.000000
11/14/2011	11:14:45 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:14:45 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:14:46 AM	Tube furnace set to 150
11/14/2011	11:15:16 AM	Helium valve closed
11/14/2011	11:15:16 AM	H2 valve closed
11/14/2011	11:15:16 AM	BCl3 valve closed
11/14/2011	11:15:16 AM	PH3 valve closed
11/14/2011	11:15:16 AM	SiCl4 pre valve closed
11/14/2011	11:15:16 AM	SiCl4 post valve closed
11/14/2011	11:15:16 AM	Bypass valve closed
11/14/2011	11:15:16 AM	Bubbler valve closed
11/14/2011	11:15:16 AM	Main Vac valve opened
11/14/2011	11:15:16 AM	Helium MFC set to  0.000000
11/14/2011	11:15:16 AM	H2 MFC set to  0.000000
11/14/2011	11:15:16 AM	BCl3 MFC set to  0.000000
11/14/2011	11:15:16 AM	PHl3 MFC set to  0.000000
11/14/2011	11:15:16 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:15:16 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:15:16 AM	Tube furnace set to 150
11/14/2011	11:15:46 AM	H2 valve closed
11/14/2011	11:15:46 AM	BCl3 valve closed
11/14/2011	11:15:46 AM	PH3 valve closed
11/14/2011	11:15:46 AM	SiCl4 pre valve closed
11/14/2011	11:15:46 AM	SiCl4 post valve closed
11/14/2011	11:15:46 AM	Bypass valve closed
11/14/2011	11:15:46 AM	Bubbler valve closed
11/14/2011	11:15:46 AM	Helium valve opened
11/14/2011	11:15:46 AM	Main Vac valve opened
11/14/2011	11:15:46 AM	Helium MFC set to  20.000000
11/14/2011	11:15:46 AM	H2 MFC set to  0.000000
11/14/2011	11:15:46 AM	BCl3 MFC set to  0.000000
11/14/2011	11:15:46 AM	PHl3 MFC set to  0.000000
11/14/2011	11:15:46 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:15:46 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:15:46 AM	Tube furnace set to 150
11/14/2011	11:16:16 AM	Helium valve closed
11/14/2011	11:16:16 AM	H2 valve closed
11/14/2011	11:16:16 AM	BCl3 valve closed
11/14/2011	11:16:16 AM	PH3 valve closed
11/14/2011	11:16:16 AM	SiCl4 pre valve closed
11/14/2011	11:16:16 AM	SiCl4 post valve closed
11/14/2011	11:16:16 AM	Bypass valve closed
11/14/2011	11:16:16 AM	Bubbler valve closed
11/14/2011	11:16:16 AM	Main Vac valve opened
11/14/2011	11:16:16 AM	Helium MFC set to  0.000000
11/14/2011	11:16:16 AM	H2 MFC set to  0.000000
11/14/2011	11:16:16 AM	BCl3 MFC set to  0.000000
11/14/2011	11:16:16 AM	PHl3 MFC set to  0.000000
11/14/2011	11:16:16 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:16:16 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:16:16 AM	Tube furnace set to 150
11/14/2011	11:16:46 AM	H2 valve closed
11/14/2011	11:16:46 AM	BCl3 valve closed
11/14/2011	11:16:46 AM	PH3 valve closed
11/14/2011	11:16:46 AM	SiCl4 pre valve closed
11/14/2011	11:16:46 AM	SiCl4 post valve closed
11/14/2011	11:16:46 AM	Bypass valve closed
11/14/2011	11:16:46 AM	Bubbler valve closed
11/14/2011	11:16:46 AM	Helium valve opened
11/14/2011	11:16:46 AM	Main Vac valve opened
11/14/2011	11:16:46 AM	Helium MFC set to  20.000000
11/14/2011	11:16:46 AM	H2 MFC set to  0.000000
11/14/2011	11:16:46 AM	BCl3 MFC set to  0.000000
11/14/2011	11:16:46 AM	PHl3 MFC set to  0.000000
11/14/2011	11:16:46 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:16:46 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:16:46 AM	Tube furnace set to 150
11/14/2011	11:17:16 AM	Helium valve closed
11/14/2011	11:17:16 AM	H2 valve closed
11/14/2011	11:17:16 AM	BCl3 valve closed
11/14/2011	11:17:16 AM	PH3 valve closed
11/14/2011	11:17:16 AM	SiCl4 pre valve closed
11/14/2011	11:17:16 AM	SiCl4 post valve closed
11/14/2011	11:17:16 AM	Bypass valve closed
11/14/2011	11:17:16 AM	Bubbler valve closed
11/14/2011	11:17:16 AM	Main Vac valve opened
11/14/2011	11:17:16 AM	Helium MFC set to  0.000000
11/14/2011	11:17:16 AM	H2 MFC set to  0.000000
11/14/2011	11:17:16 AM	BCl3 MFC set to  0.000000
11/14/2011	11:17:16 AM	PHl3 MFC set to  0.000000
11/14/2011	11:17:16 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:17:16 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:17:17 AM	Tube furnace set to 150
11/14/2011	11:17:47 AM	H2 valve closed
11/14/2011	11:17:47 AM	BCl3 valve closed
11/14/2011	11:17:47 AM	PH3 valve closed
11/14/2011	11:17:47 AM	SiCl4 pre valve closed
11/14/2011	11:17:47 AM	SiCl4 post valve closed
11/14/2011	11:17:47 AM	Bypass valve closed
11/14/2011	11:17:47 AM	Bubbler valve closed
11/14/2011	11:17:47 AM	Helium valve opened
11/14/2011	11:17:47 AM	Main Vac valve opened
11/14/2011	11:17:47 AM	Helium MFC set to  20.000000
11/14/2011	11:17:47 AM	H2 MFC set to  0.000000
11/14/2011	11:17:47 AM	BCl3 MFC set to  0.000000
11/14/2011	11:17:47 AM	PHl3 MFC set to  0.000000
11/14/2011	11:17:47 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:17:47 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:17:47 AM	Tube furnace set to 150
11/14/2011	11:18:17 AM	Helium valve closed
11/14/2011	11:18:17 AM	H2 valve closed
11/14/2011	11:18:17 AM	BCl3 valve closed
11/14/2011	11:18:17 AM	PH3 valve closed
11/14/2011	11:18:17 AM	SiCl4 pre valve closed
11/14/2011	11:18:17 AM	SiCl4 post valve closed
11/14/2011	11:18:17 AM	Bypass valve closed
11/14/2011	11:18:17 AM	Bubbler valve closed
11/14/2011	11:18:17 AM	Main Vac valve opened
11/14/2011	11:18:17 AM	Helium MFC set to  0.000000
11/14/2011	11:18:17 AM	H2 MFC set to  0.000000
11/14/2011	11:18:17 AM	BCl3 MFC set to  0.000000
11/14/2011	11:18:17 AM	PHl3 MFC set to  0.000000
11/14/2011	11:18:17 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:18:17 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:18:17 AM	Tube furnace set to 150
11/14/2011	11:18:18 AM	Run finished at 11:18 AM
11/14/2011	11:19:42 AM	Main Vac valve closed
11/14/2011	11:19:49 AM	Main Vac valve opened
11/14/2011	11:19:59 AM	Recipe started at 11:19 AM
11/14/2011	11:19:59 AM	Helium valve closed
11/14/2011	11:19:59 AM	H2 valve closed
11/14/2011	11:19:59 AM	BCl3 valve closed
11/14/2011	11:19:59 AM	PH3 valve closed
11/14/2011	11:19:59 AM	SiCl4 pre valve closed
11/14/2011	11:19:59 AM	SiCl4 post valve closed
11/14/2011	11:19:59 AM	Bypass valve closed
11/14/2011	11:19:59 AM	Bubbler valve closed
11/14/2011	11:19:59 AM	Main Vac valve opened
11/14/2011	11:19:59 AM	Helium MFC set to  0.000000
11/14/2011	11:19:59 AM	H2 MFC set to  0.000000
11/14/2011	11:19:59 AM	BCl3 MFC set to  0.000000
11/14/2011	11:19:59 AM	PHl3 MFC set to  0.000000
11/14/2011	11:19:59 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:19:59 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:19:59 AM	Tube furnace set to 150
11/14/2011	11:20:29 AM	H2 valve closed
11/14/2011	11:20:29 AM	BCl3 valve closed
11/14/2011	11:20:29 AM	PH3 valve closed
11/14/2011	11:20:29 AM	SiCl4 pre valve closed
11/14/2011	11:20:29 AM	SiCl4 post valve closed
11/14/2011	11:20:29 AM	Bypass valve closed
11/14/2011	11:20:29 AM	Bubbler valve closed
11/14/2011	11:20:29 AM	Helium valve opened
11/14/2011	11:20:29 AM	Main Vac valve opened
11/14/2011	11:20:29 AM	Helium MFC set to  20.000000
11/14/2011	11:20:29 AM	H2 MFC set to  0.000000
11/14/2011	11:20:29 AM	BCl3 MFC set to  0.000000
11/14/2011	11:20:29 AM	PHl3 MFC set to  0.000000
11/14/2011	11:20:29 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:20:29 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:20:29 AM	Tube furnace set to 150
11/14/2011	11:20:59 AM	Helium valve closed
11/14/2011	11:20:59 AM	H2 valve closed
11/14/2011	11:20:59 AM	BCl3 valve closed
11/14/2011	11:20:59 AM	PH3 valve closed
11/14/2011	11:20:59 AM	SiCl4 pre valve closed
11/14/2011	11:20:59 AM	SiCl4 post valve closed
11/14/2011	11:20:59 AM	Bypass valve closed
11/14/2011	11:20:59 AM	Bubbler valve closed
11/14/2011	11:20:59 AM	Main Vac valve opened
11/14/2011	11:20:59 AM	Helium MFC set to  0.000000
11/14/2011	11:20:59 AM	H2 MFC set to  0.000000
11/14/2011	11:20:59 AM	BCl3 MFC set to  0.000000
11/14/2011	11:20:59 AM	PHl3 MFC set to  0.000000
11/14/2011	11:20:59 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:20:59 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:20:59 AM	Tube furnace set to 150
11/14/2011	11:21:29 AM	H2 valve closed
11/14/2011	11:21:29 AM	BCl3 valve closed
11/14/2011	11:21:29 AM	PH3 valve closed
11/14/2011	11:21:29 AM	SiCl4 pre valve closed
11/14/2011	11:21:29 AM	SiCl4 post valve closed
11/14/2011	11:21:29 AM	Bypass valve closed
11/14/2011	11:21:29 AM	Bubbler valve closed
11/14/2011	11:21:29 AM	Helium valve opened
11/14/2011	11:21:29 AM	Main Vac valve opened
11/14/2011	11:21:29 AM	Helium MFC set to  20.000000
11/14/2011	11:21:29 AM	H2 MFC set to  0.000000
11/14/2011	11:21:29 AM	BCl3 MFC set to  0.000000
11/14/2011	11:21:29 AM	PHl3 MFC set to  0.000000
11/14/2011	11:21:29 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:21:29 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:21:29 AM	Tube furnace set to 150
11/14/2011	11:21:59 AM	Helium valve closed
11/14/2011	11:21:59 AM	H2 valve closed
11/14/2011	11:21:59 AM	BCl3 valve closed
11/14/2011	11:21:59 AM	PH3 valve closed
11/14/2011	11:21:59 AM	SiCl4 pre valve closed
11/14/2011	11:21:59 AM	SiCl4 post valve closed
11/14/2011	11:21:59 AM	Bypass valve closed
11/14/2011	11:21:59 AM	Bubbler valve closed
11/14/2011	11:21:59 AM	Main Vac valve opened
11/14/2011	11:21:59 AM	Helium MFC set to  0.000000
11/14/2011	11:21:59 AM	H2 MFC set to  0.000000
11/14/2011	11:21:59 AM	BCl3 MFC set to  0.000000
11/14/2011	11:21:59 AM	PHl3 MFC set to  0.000000
11/14/2011	11:21:59 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:21:59 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:21:59 AM	Tube furnace set to 150
11/14/2011	11:22:30 AM	H2 valve closed
11/14/2011	11:22:30 AM	BCl3 valve closed
11/14/2011	11:22:30 AM	PH3 valve closed
11/14/2011	11:22:30 AM	SiCl4 pre valve closed
11/14/2011	11:22:30 AM	SiCl4 post valve closed
11/14/2011	11:22:30 AM	Bypass valve closed
11/14/2011	11:22:30 AM	Bubbler valve closed
11/14/2011	11:22:30 AM	Helium valve opened
11/14/2011	11:22:30 AM	Main Vac valve opened
11/14/2011	11:22:30 AM	Helium MFC set to  20.000000
11/14/2011	11:22:30 AM	H2 MFC set to  0.000000
11/14/2011	11:22:30 AM	BCl3 MFC set to  0.000000
11/14/2011	11:22:30 AM	PHl3 MFC set to  0.000000
11/14/2011	11:22:30 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:22:30 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:22:30 AM	Tube furnace set to 150
11/14/2011	11:23:00 AM	Helium valve closed
11/14/2011	11:23:00 AM	H2 valve closed
11/14/2011	11:23:00 AM	BCl3 valve closed
11/14/2011	11:23:00 AM	PH3 valve closed
11/14/2011	11:23:00 AM	SiCl4 pre valve closed
11/14/2011	11:23:00 AM	SiCl4 post valve closed
11/14/2011	11:23:00 AM	Bypass valve closed
11/14/2011	11:23:00 AM	Bubbler valve closed
11/14/2011	11:23:00 AM	Main Vac valve opened
11/14/2011	11:23:00 AM	Helium MFC set to  0.000000
11/14/2011	11:23:00 AM	H2 MFC set to  0.000000
11/14/2011	11:23:00 AM	BCl3 MFC set to  0.000000
11/14/2011	11:23:00 AM	PHl3 MFC set to  0.000000
11/14/2011	11:23:00 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:23:00 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:23:00 AM	Tube furnace set to 150
11/14/2011	11:23:30 AM	H2 valve closed
11/14/2011	11:23:30 AM	BCl3 valve closed
11/14/2011	11:23:30 AM	PH3 valve closed
11/14/2011	11:23:30 AM	SiCl4 pre valve closed
11/14/2011	11:23:30 AM	SiCl4 post valve closed
11/14/2011	11:23:30 AM	Bypass valve closed
11/14/2011	11:23:30 AM	Bubbler valve closed
11/14/2011	11:23:30 AM	Helium valve opened
11/14/2011	11:23:30 AM	Main Vac valve opened
11/14/2011	11:23:30 AM	Helium MFC set to  20.000000
11/14/2011	11:23:30 AM	H2 MFC set to  0.000000
11/14/2011	11:23:30 AM	BCl3 MFC set to  0.000000
11/14/2011	11:23:30 AM	PHl3 MFC set to  0.000000
11/14/2011	11:23:30 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:23:30 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:23:30 AM	Tube furnace set to 150
11/14/2011	11:24:00 AM	Helium valve closed
11/14/2011	11:24:00 AM	H2 valve closed
11/14/2011	11:24:00 AM	BCl3 valve closed
11/14/2011	11:24:00 AM	PH3 valve closed
11/14/2011	11:24:00 AM	SiCl4 pre valve closed
11/14/2011	11:24:00 AM	SiCl4 post valve closed
11/14/2011	11:24:00 AM	Bypass valve closed
11/14/2011	11:24:00 AM	Bubbler valve closed
11/14/2011	11:24:00 AM	Main Vac valve opened
11/14/2011	11:24:00 AM	Helium MFC set to  0.000000
11/14/2011	11:24:00 AM	H2 MFC set to  0.000000
11/14/2011	11:24:00 AM	BCl3 MFC set to  0.000000
11/14/2011	11:24:00 AM	PHl3 MFC set to  0.000000
11/14/2011	11:24:00 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:24:00 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:24:00 AM	Tube furnace set to 150
11/14/2011	11:24:30 AM	H2 valve closed
11/14/2011	11:24:30 AM	BCl3 valve closed
11/14/2011	11:24:30 AM	PH3 valve closed
11/14/2011	11:24:30 AM	SiCl4 pre valve closed
11/14/2011	11:24:30 AM	SiCl4 post valve closed
11/14/2011	11:24:30 AM	Bypass valve closed
11/14/2011	11:24:30 AM	Bubbler valve closed
11/14/2011	11:24:30 AM	Helium valve opened
11/14/2011	11:24:30 AM	Main Vac valve opened
11/14/2011	11:24:30 AM	Helium MFC set to  20.000000
11/14/2011	11:24:30 AM	H2 MFC set to  0.000000
11/14/2011	11:24:30 AM	BCl3 MFC set to  0.000000
11/14/2011	11:24:30 AM	PHl3 MFC set to  0.000000
11/14/2011	11:24:30 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:24:30 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:24:31 AM	Tube furnace set to 150
11/14/2011	11:25:01 AM	Helium valve closed
11/14/2011	11:25:01 AM	H2 valve closed
11/14/2011	11:25:01 AM	BCl3 valve closed
11/14/2011	11:25:01 AM	PH3 valve closed
11/14/2011	11:25:01 AM	SiCl4 pre valve closed
11/14/2011	11:25:01 AM	SiCl4 post valve closed
11/14/2011	11:25:01 AM	Bypass valve closed
11/14/2011	11:25:01 AM	Bubbler valve closed
11/14/2011	11:25:01 AM	Main Vac valve opened
11/14/2011	11:25:01 AM	Helium MFC set to  0.000000
11/14/2011	11:25:01 AM	H2 MFC set to  0.000000
11/14/2011	11:25:01 AM	BCl3 MFC set to  0.000000
11/14/2011	11:25:01 AM	PHl3 MFC set to  0.000000
11/14/2011	11:25:01 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:25:01 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:25:01 AM	Tube furnace set to 150
11/14/2011	11:25:31 AM	H2 valve closed
11/14/2011	11:25:31 AM	BCl3 valve closed
11/14/2011	11:25:31 AM	PH3 valve closed
11/14/2011	11:25:31 AM	SiCl4 pre valve closed
11/14/2011	11:25:31 AM	SiCl4 post valve closed
11/14/2011	11:25:31 AM	Bypass valve closed
11/14/2011	11:25:31 AM	Bubbler valve closed
11/14/2011	11:25:31 AM	Helium valve opened
11/14/2011	11:25:31 AM	Main Vac valve opened
11/14/2011	11:25:31 AM	Helium MFC set to  20.000000
11/14/2011	11:25:31 AM	H2 MFC set to  0.000000
11/14/2011	11:25:31 AM	BCl3 MFC set to  0.000000
11/14/2011	11:25:31 AM	PHl3 MFC set to  0.000000
11/14/2011	11:25:31 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:25:31 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:25:31 AM	Tube furnace set to 150
11/14/2011	11:26:01 AM	Helium valve closed
11/14/2011	11:26:01 AM	H2 valve closed
11/14/2011	11:26:01 AM	BCl3 valve closed
11/14/2011	11:26:01 AM	PH3 valve closed
11/14/2011	11:26:01 AM	SiCl4 pre valve closed
11/14/2011	11:26:01 AM	SiCl4 post valve closed
11/14/2011	11:26:01 AM	Bypass valve closed
11/14/2011	11:26:01 AM	Bubbler valve closed
11/14/2011	11:26:01 AM	Main Vac valve opened
11/14/2011	11:26:01 AM	Helium MFC set to  0.000000
11/14/2011	11:26:01 AM	H2 MFC set to  0.000000
11/14/2011	11:26:01 AM	BCl3 MFC set to  0.000000
11/14/2011	11:26:01 AM	PHl3 MFC set to  0.000000
11/14/2011	11:26:01 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:26:01 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:26:01 AM	Tube furnace set to 150
11/14/2011	11:26:31 AM	H2 valve closed
11/14/2011	11:26:31 AM	BCl3 valve closed
11/14/2011	11:26:31 AM	PH3 valve closed
11/14/2011	11:26:31 AM	SiCl4 pre valve closed
11/14/2011	11:26:31 AM	SiCl4 post valve closed
11/14/2011	11:26:31 AM	Bypass valve closed
11/14/2011	11:26:31 AM	Bubbler valve closed
11/14/2011	11:26:31 AM	Helium valve opened
11/14/2011	11:26:31 AM	Main Vac valve opened
11/14/2011	11:26:31 AM	Helium MFC set to  20.000000
11/14/2011	11:26:31 AM	H2 MFC set to  0.000000
11/14/2011	11:26:31 AM	BCl3 MFC set to  0.000000
11/14/2011	11:26:31 AM	PHl3 MFC set to  0.000000
11/14/2011	11:26:31 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:26:31 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:26:31 AM	Tube furnace set to 150
11/14/2011	11:27:01 AM	Helium valve closed
11/14/2011	11:27:01 AM	H2 valve closed
11/14/2011	11:27:01 AM	BCl3 valve closed
11/14/2011	11:27:01 AM	PH3 valve closed
11/14/2011	11:27:01 AM	SiCl4 pre valve closed
11/14/2011	11:27:01 AM	SiCl4 post valve closed
11/14/2011	11:27:01 AM	Bypass valve closed
11/14/2011	11:27:01 AM	Bubbler valve closed
11/14/2011	11:27:01 AM	Main Vac valve opened
11/14/2011	11:27:01 AM	Helium MFC set to  0.000000
11/14/2011	11:27:01 AM	H2 MFC set to  0.000000
11/14/2011	11:27:01 AM	BCl3 MFC set to  0.000000
11/14/2011	11:27:01 AM	PHl3 MFC set to  0.000000
11/14/2011	11:27:01 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:27:01 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:27:02 AM	Tube furnace set to 150
11/14/2011	11:27:32 AM	H2 valve closed
11/14/2011	11:27:32 AM	BCl3 valve closed
11/14/2011	11:27:32 AM	PH3 valve closed
11/14/2011	11:27:32 AM	SiCl4 pre valve closed
11/14/2011	11:27:32 AM	SiCl4 post valve closed
11/14/2011	11:27:32 AM	Bypass valve closed
11/14/2011	11:27:32 AM	Bubbler valve closed
11/14/2011	11:27:32 AM	Helium valve opened
11/14/2011	11:27:32 AM	Main Vac valve opened
11/14/2011	11:27:32 AM	Helium MFC set to  20.000000
11/14/2011	11:27:32 AM	H2 MFC set to  0.000000
11/14/2011	11:27:32 AM	BCl3 MFC set to  0.000000
11/14/2011	11:27:32 AM	PHl3 MFC set to  0.000000
11/14/2011	11:27:32 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:27:32 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:27:32 AM	Tube furnace set to 150
11/14/2011	11:28:02 AM	Helium valve closed
11/14/2011	11:28:02 AM	H2 valve closed
11/14/2011	11:28:02 AM	BCl3 valve closed
11/14/2011	11:28:02 AM	PH3 valve closed
11/14/2011	11:28:02 AM	SiCl4 pre valve closed
11/14/2011	11:28:02 AM	SiCl4 post valve closed
11/14/2011	11:28:02 AM	Bypass valve closed
11/14/2011	11:28:02 AM	Bubbler valve closed
11/14/2011	11:28:02 AM	Main Vac valve opened
11/14/2011	11:28:02 AM	Helium MFC set to  0.000000
11/14/2011	11:28:02 AM	H2 MFC set to  0.000000
11/14/2011	11:28:02 AM	BCl3 MFC set to  0.000000
11/14/2011	11:28:02 AM	PHl3 MFC set to  0.000000
11/14/2011	11:28:02 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:28:02 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:28:02 AM	Tube furnace set to 150
11/14/2011	11:28:32 AM	H2 valve closed
11/14/2011	11:28:32 AM	BCl3 valve closed
11/14/2011	11:28:32 AM	PH3 valve closed
11/14/2011	11:28:32 AM	SiCl4 pre valve closed
11/14/2011	11:28:32 AM	SiCl4 post valve closed
11/14/2011	11:28:32 AM	Bypass valve closed
11/14/2011	11:28:32 AM	Bubbler valve closed
11/14/2011	11:28:32 AM	Helium valve opened
11/14/2011	11:28:32 AM	Main Vac valve opened
11/14/2011	11:28:32 AM	Helium MFC set to  20.000000
11/14/2011	11:28:32 AM	H2 MFC set to  0.000000
11/14/2011	11:28:32 AM	BCl3 MFC set to  0.000000
11/14/2011	11:28:32 AM	PHl3 MFC set to  0.000000
11/14/2011	11:28:32 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:28:32 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:28:32 AM	Tube furnace set to 150
11/14/2011	11:29:02 AM	Helium valve closed
11/14/2011	11:29:02 AM	H2 valve closed
11/14/2011	11:29:02 AM	BCl3 valve closed
11/14/2011	11:29:02 AM	PH3 valve closed
11/14/2011	11:29:02 AM	SiCl4 pre valve closed
11/14/2011	11:29:02 AM	SiCl4 post valve closed
11/14/2011	11:29:02 AM	Bypass valve closed
11/14/2011	11:29:02 AM	Bubbler valve closed
11/14/2011	11:29:02 AM	Main Vac valve opened
11/14/2011	11:29:02 AM	Helium MFC set to  0.000000
11/14/2011	11:29:02 AM	H2 MFC set to  0.000000
11/14/2011	11:29:02 AM	BCl3 MFC set to  0.000000
11/14/2011	11:29:02 AM	PHl3 MFC set to  0.000000
11/14/2011	11:29:02 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:29:02 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:29:02 AM	Tube furnace set to 150
11/14/2011	11:29:30 AM	H2 valve closed
11/14/2011	11:29:30 AM	BCl3 valve closed
11/14/2011	11:29:30 AM	PH3 valve closed
11/14/2011	11:29:30 AM	SiCl4 pre valve closed
11/14/2011	11:29:30 AM	SiCl4 post valve closed
11/14/2011	11:29:30 AM	Bypass valve closed
11/14/2011	11:29:30 AM	Bubbler valve closed
11/14/2011	11:29:30 AM	Helium valve opened
11/14/2011	11:29:30 AM	Main Vac valve opened
11/14/2011	11:29:30 AM	Helium MFC set to  20.000000
11/14/2011	11:29:30 AM	H2 MFC set to  0.000000
11/14/2011	11:29:30 AM	BCl3 MFC set to  0.000000
11/14/2011	11:29:30 AM	PHl3 MFC set to  0.000000
11/14/2011	11:29:30 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:29:30 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:29:30 AM	Tube furnace set to 150
11/14/2011	11:29:41 AM	Helium valve closed
11/14/2011	11:29:41 AM	H2 valve closed
11/14/2011	11:29:41 AM	BCl3 valve closed
11/14/2011	11:29:41 AM	PH3 valve closed
11/14/2011	11:29:41 AM	SiCl4 pre valve closed
11/14/2011	11:29:41 AM	SiCl4 post valve closed
11/14/2011	11:29:41 AM	Bypass valve closed
11/14/2011	11:29:41 AM	Bubbler valve closed
11/14/2011	11:29:41 AM	Main Vac valve opened
11/14/2011	11:29:41 AM	Helium MFC set to  0.000000
11/14/2011	11:29:41 AM	H2 MFC set to  0.000000
11/14/2011	11:29:41 AM	BCl3 MFC set to  0.000000
11/14/2011	11:29:41 AM	PHl3 MFC set to  0.000000
11/14/2011	11:29:41 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:29:41 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:29:42 AM	Tube furnace set to 150
11/14/2011	11:29:43 AM	Run finished at 11:29 AM
11/14/2011	11:31:12 AM	Main Vac valve closed
11/14/2011	11:31:26 AM	Main Vac valve opened
11/14/2011	11:32:00 AM	Recipe started at 11:31 AM
11/14/2011	11:32:00 AM	Helium valve closed
11/14/2011	11:32:00 AM	H2 valve closed
11/14/2011	11:32:00 AM	BCl3 valve closed
11/14/2011	11:32:00 AM	PH3 valve closed
11/14/2011	11:32:00 AM	SiCl4 pre valve closed
11/14/2011	11:32:00 AM	SiCl4 post valve closed
11/14/2011	11:32:00 AM	Main Vac valve closed
11/14/2011	11:32:00 AM	Bypass valve closed
11/14/2011	11:32:00 AM	Bubbler valve closed
11/14/2011	11:32:00 AM	Helium MFC set to  0.000000
11/14/2011	11:32:00 AM	H2 MFC set to  0.000000
11/14/2011	11:32:00 AM	BCl3 MFC set to  0.000000
11/14/2011	11:32:00 AM	PHl3 MFC set to  0.000000
11/14/2011	11:32:00 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:32:00 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:32:00 AM	Tube furnace set to 0
11/14/2011	11:32:03 AM	Helium valve closed
11/14/2011	11:32:03 AM	BCl3 valve closed
11/14/2011	11:32:03 AM	PH3 valve closed
11/14/2011	11:32:03 AM	SiCl4 pre valve closed
11/14/2011	11:32:03 AM	SiCl4 post valve closed
11/14/2011	11:32:03 AM	Main Vac valve closed
11/14/2011	11:32:03 AM	Bypass valve closed
11/14/2011	11:32:03 AM	Bubbler valve closed
11/14/2011	11:32:03 AM	H2 valve opened
11/14/2011	11:32:03 AM	Helium MFC set to  0.000000
11/14/2011	11:32:03 AM	H2 MFC set to  500.000000
11/14/2011	11:32:03 AM	BCl3 MFC set to  0.000000
11/14/2011	11:32:03 AM	PHl3 MFC set to  0.000000
11/14/2011	11:32:03 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:32:03 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:32:03 AM	Tube furnace set to 0
11/14/2011	11:33:06 AM	Helium valve closed
11/14/2011	11:33:06 AM	BCl3 valve closed
11/14/2011	11:33:06 AM	PH3 valve closed
11/14/2011	11:33:06 AM	SiCl4 pre valve closed
11/14/2011	11:33:06 AM	SiCl4 post valve closed
11/14/2011	11:33:06 AM	Main Vac valve closed
11/14/2011	11:33:06 AM	Bypass valve closed
11/14/2011	11:33:06 AM	H2 valve opened
11/14/2011	11:33:06 AM	Bubbler valve opened
11/14/2011	11:33:06 AM	Helium MFC set to  0.000000
11/14/2011	11:33:06 AM	H2 MFC set to  500.000000
11/14/2011	11:33:06 AM	BCl3 MFC set to  0.000000
11/14/2011	11:33:06 AM	PHl3 MFC set to  0.000000
11/14/2011	11:33:06 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:33:06 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:33:07 AM	Tube furnace set to 0
11/14/2011	11:33:08 AM	Helium valve closed
11/14/2011	11:33:08 AM	BCl3 valve closed
11/14/2011	11:33:08 AM	PH3 valve closed
11/14/2011	11:33:08 AM	SiCl4 pre valve closed
11/14/2011	11:33:08 AM	SiCl4 post valve closed
11/14/2011	11:33:08 AM	Main Vac valve closed
11/14/2011	11:33:08 AM	Bypass valve closed
11/14/2011	11:33:08 AM	H2 valve opened
11/14/2011	11:33:08 AM	Bubbler valve opened
11/14/2011	11:33:08 AM	Helium MFC set to  0.000000
11/14/2011	11:33:08 AM	H2 MFC set to  500.000000
11/14/2011	11:33:08 AM	BCl3 MFC set to  0.000000
11/14/2011	11:33:08 AM	PHl3 MFC set to  0.000000
11/14/2011	11:33:08 AM	SiCl4 MFC set to  0.000000
11/14/2011	11:33:08 AM	Bypass solenoid MFC set to  0.000000
11/14/2011	11:33:08 AM	Tube furnace set to 1000
11/14/2011	12:03:08 PM	Helium valve closed
11/14/2011	12:03:08 PM	PH3 valve closed
11/14/2011	12:03:08 PM	Main Vac valve closed
11/14/2011	12:03:08 PM	Bypass valve closed
11/14/2011	12:03:08 PM	H2 valve opened
11/14/2011	12:03:08 PM	BCl3 valve opened
11/14/2011	12:03:08 PM	SiCl4 pre valve opened
11/14/2011	12:03:08 PM	SiCl4 post valve opened
11/14/2011	12:03:08 PM	Bubbler valve opened
11/14/2011	12:03:08 PM	Helium MFC set to  0.000000
11/14/2011	12:03:08 PM	H2 MFC set to  500.000000
11/14/2011	12:03:08 PM	BCl3 MFC set to  3.000000
11/14/2011	12:03:08 PM	PHl3 MFC set to  0.000000
11/14/2011	12:03:08 PM	SiCl4 MFC set to  18.000000
11/14/2011	12:03:08 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	12:03:08 PM	Tube furnace set to 1000
11/14/2011	12:21:08 PM	Helium valve closed
11/14/2011	12:21:08 PM	BCl3 valve closed
11/14/2011	12:21:08 PM	PH3 valve closed
11/14/2011	12:21:08 PM	SiCl4 pre valve closed
11/14/2011	12:21:08 PM	SiCl4 post valve closed
11/14/2011	12:21:08 PM	Main Vac valve closed
11/14/2011	12:21:08 PM	Bypass valve closed
11/14/2011	12:21:08 PM	H2 valve opened
11/14/2011	12:21:08 PM	Bubbler valve opened
11/14/2011	12:21:08 PM	Helium MFC set to  0.000000
11/14/2011	12:21:08 PM	H2 MFC set to  500.000000
11/14/2011	12:21:08 PM	BCl3 MFC set to  0.000000
11/14/2011	12:21:08 PM	PHl3 MFC set to  0.000000
11/14/2011	12:21:08 PM	SiCl4 MFC set to  0.000000
11/14/2011	12:21:08 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	12:21:08 PM	Tube furnace set to 750
11/14/2011	12:31:08 PM	H2 valve closed
11/14/2011	12:31:08 PM	BCl3 valve closed
11/14/2011	12:31:08 PM	PH3 valve closed
11/14/2011	12:31:08 PM	SiCl4 pre valve closed
11/14/2011	12:31:08 PM	SiCl4 post valve closed
11/14/2011	12:31:08 PM	Main Vac valve closed
11/14/2011	12:31:08 PM	Bypass valve closed
11/14/2011	12:31:08 PM	Helium valve opened
11/14/2011	12:31:08 PM	Bubbler valve opened
11/14/2011	12:31:08 PM	Helium MFC set to  500.000000
11/14/2011	12:31:08 PM	H2 MFC set to  0.000000
11/14/2011	12:31:08 PM	BCl3 MFC set to  0.000000
11/14/2011	12:31:08 PM	PHl3 MFC set to  0.000000
11/14/2011	12:31:08 PM	SiCl4 MFC set to  0.000000
11/14/2011	12:31:08 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	12:31:08 PM	Tube furnace set to 0
11/14/2011	12:39:41 PM	Helium valve closed
11/14/2011	12:39:41 PM	H2 valve closed
11/14/2011	12:39:41 PM	BCl3 valve closed
11/14/2011	12:39:41 PM	PH3 valve closed
11/14/2011	12:39:41 PM	SiCl4 pre valve closed
11/14/2011	12:39:41 PM	SiCl4 post valve closed
11/14/2011	12:39:41 PM	Main Vac valve closed
11/14/2011	12:39:41 PM	Bypass valve closed
11/14/2011	12:39:41 PM	Bubbler valve closed
11/14/2011	12:39:41 PM	Helium MFC set to  0.000000
11/14/2011	12:39:41 PM	H2 MFC set to  0.000000
11/14/2011	12:39:41 PM	BCl3 MFC set to  0.000000
11/14/2011	12:39:41 PM	PHl3 MFC set to  0.000000
11/14/2011	12:39:41 PM	SiCl4 MFC set to  0.000000
11/14/2011	12:39:41 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	12:39:41 PM	Tube furnace set to 0
11/14/2011	12:39:42 PM	Run finished at 12:39 PM
11/14/2011	12:39:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2011	12:39:46 PM	Recipe started at 12:39 PM
11/14/2011	12:39:46 PM	Helium valve closed
11/14/2011	12:39:46 PM	H2 valve closed
11/14/2011	12:39:46 PM	BCl3 valve closed
11/14/2011	12:39:46 PM	PH3 valve closed
11/14/2011	12:39:46 PM	SiCl4 pre valve closed
11/14/2011	12:39:46 PM	SiCl4 post valve closed
11/14/2011	12:39:46 PM	Main Vac valve closed
11/14/2011	12:39:46 PM	Bypass valve closed
11/14/2011	12:39:46 PM	Bubbler valve closed
11/14/2011	12:39:46 PM	Helium MFC set to  0.000000
11/14/2011	12:39:46 PM	H2 MFC set to  0.000000
11/14/2011	12:39:46 PM	BCl3 MFC set to  0.000000
11/14/2011	12:39:46 PM	PHl3 MFC set to  0.000000
11/14/2011	12:39:46 PM	SiCl4 MFC set to  0.000000
11/14/2011	12:39:46 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	12:39:46 PM	Tube furnace set to 0
11/14/2011	12:39:49 PM	H2 valve closed
11/14/2011	12:39:49 PM	BCl3 valve closed
11/14/2011	12:39:49 PM	PH3 valve closed
11/14/2011	12:39:49 PM	SiCl4 pre valve closed
11/14/2011	12:39:49 PM	SiCl4 post valve closed
11/14/2011	12:39:49 PM	Main Vac valve closed
11/14/2011	12:39:49 PM	Bypass valve closed
11/14/2011	12:39:49 PM	Bubbler valve closed
11/14/2011	12:39:49 PM	Helium valve opened
11/14/2011	12:39:49 PM	Helium MFC set to  500.000000
11/14/2011	12:39:49 PM	H2 MFC set to  0.000000
11/14/2011	12:39:49 PM	BCl3 MFC set to  0.000000
11/14/2011	12:39:49 PM	PHl3 MFC set to  0.000000
11/14/2011	12:39:49 PM	SiCl4 MFC set to  0.000000
11/14/2011	12:39:49 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	12:39:49 PM	Tube furnace set to 0
11/14/2011	12:39:49 PM	Helium valve closed
11/14/2011	12:39:49 PM	H2 valve closed
11/14/2011	12:39:49 PM	BCl3 valve closed
11/14/2011	12:39:49 PM	PH3 valve closed
11/14/2011	12:39:49 PM	SiCl4 pre valve closed
11/14/2011	12:39:49 PM	SiCl4 post valve closed
11/14/2011	12:39:49 PM	Main Vac valve closed
11/14/2011	12:39:49 PM	Bypass valve closed
11/14/2011	12:39:49 PM	Bubbler valve closed
11/14/2011	12:39:49 PM	Helium MFC set to  0.000000
11/14/2011	12:39:49 PM	H2 MFC set to  0.000000
11/14/2011	12:39:49 PM	BCl3 MFC set to  0.000000
11/14/2011	12:39:49 PM	PHl3 MFC set to  0.000000
11/14/2011	12:39:49 PM	SiCl4 MFC set to  0.000000
11/14/2011	12:39:49 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	12:39:50 PM	Tube furnace set to 0
11/14/2011	12:39:51 PM	Run finished at 12:39 PM
11/14/2011	12:39:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2011	12:46:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2011	12:46:12 PM	Recipe started at 12:46 PM
11/14/2011	12:46:12 PM	Helium valve closed
11/14/2011	12:46:12 PM	H2 valve closed
11/14/2011	12:46:12 PM	BCl3 valve closed
11/14/2011	12:46:12 PM	PH3 valve closed
11/14/2011	12:46:12 PM	SiCl4 pre valve closed
11/14/2011	12:46:12 PM	SiCl4 post valve closed
11/14/2011	12:46:12 PM	Main Vac valve closed
11/14/2011	12:46:12 PM	Bubbler valve closed
11/14/2011	12:46:12 PM	Bypass valve opened
11/14/2011	12:46:12 PM	Helium MFC set to  0.000000
11/14/2011	12:46:12 PM	H2 MFC set to  0.000000
11/14/2011	12:46:12 PM	BCl3 MFC set to  0.000000
11/14/2011	12:46:12 PM	PHl3 MFC set to  0.000000
11/14/2011	12:46:12 PM	SiCl4 MFC set to  0.000000
11/14/2011	12:46:12 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	12:46:12 PM	Tube furnace set to 0
11/14/2011	12:47:20 PM	Helium valve closed
11/14/2011	12:47:20 PM	H2 valve closed
11/14/2011	12:47:20 PM	BCl3 valve closed
11/14/2011	12:47:20 PM	PH3 valve closed
11/14/2011	12:47:20 PM	SiCl4 pre valve closed
11/14/2011	12:47:20 PM	SiCl4 post valve closed
11/14/2011	12:47:20 PM	Main Vac valve closed
11/14/2011	12:47:20 PM	Bubbler valve closed
11/14/2011	12:47:20 PM	Bypass valve opened
11/14/2011	12:47:20 PM	Helium MFC set to  0.000000
11/14/2011	12:47:20 PM	H2 MFC set to  0.000000
11/14/2011	12:47:20 PM	BCl3 MFC set to  0.000000
11/14/2011	12:47:20 PM	PHl3 MFC set to  0.000000
11/14/2011	12:47:20 PM	SiCl4 MFC set to  0.000000
11/14/2011	12:47:20 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	12:47:20 PM	Tube furnace set to 0
11/14/2011	12:48:20 PM	Helium valve closed
11/14/2011	12:48:20 PM	H2 valve closed
11/14/2011	12:48:20 PM	BCl3 valve closed
11/14/2011	12:48:20 PM	PH3 valve closed
11/14/2011	12:48:20 PM	SiCl4 pre valve closed
11/14/2011	12:48:20 PM	SiCl4 post valve closed
11/14/2011	12:48:20 PM	Bypass valve closed
11/14/2011	12:48:20 PM	Bubbler valve closed
11/14/2011	12:48:20 PM	Main Vac valve opened
11/14/2011	12:48:20 PM	Helium MFC set to  0.000000
11/14/2011	12:48:20 PM	H2 MFC set to  0.000000
11/14/2011	12:48:20 PM	BCl3 MFC set to  0.000000
11/14/2011	12:48:20 PM	PHl3 MFC set to  0.000000
11/14/2011	12:48:20 PM	SiCl4 MFC set to  0.000000
11/14/2011	12:48:20 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	12:48:20 PM	Tube furnace set to 0
11/14/2011	12:48:21 PM	Run finished at 12:48 PM
11/14/2011	12:48:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2011	12:55:00 PM	Recipe started at 12:54 PM
11/14/2011	12:55:00 PM	Helium valve closed
11/14/2011	12:55:00 PM	H2 valve closed
11/14/2011	12:55:00 PM	BCl3 valve closed
11/14/2011	12:55:00 PM	PH3 valve closed
11/14/2011	12:55:00 PM	SiCl4 pre valve closed
11/14/2011	12:55:00 PM	SiCl4 post valve closed
11/14/2011	12:55:00 PM	Bypass valve closed
11/14/2011	12:55:00 PM	Bubbler valve closed
11/14/2011	12:55:00 PM	Main Vac valve opened
11/14/2011	12:55:00 PM	Helium MFC set to  0.000000
11/14/2011	12:55:00 PM	H2 MFC set to  0.000000
11/14/2011	12:55:00 PM	BCl3 MFC set to  0.000000
11/14/2011	12:55:00 PM	PHl3 MFC set to  0.000000
11/14/2011	12:55:00 PM	SiCl4 MFC set to  0.000000
11/14/2011	12:55:00 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	12:55:00 PM	Tube furnace set to 150
11/14/2011	12:55:30 PM	H2 valve closed
11/14/2011	12:55:30 PM	BCl3 valve closed
11/14/2011	12:55:30 PM	PH3 valve closed
11/14/2011	12:55:30 PM	SiCl4 pre valve closed
11/14/2011	12:55:30 PM	SiCl4 post valve closed
11/14/2011	12:55:30 PM	Bypass valve closed
11/14/2011	12:55:30 PM	Bubbler valve closed
11/14/2011	12:55:30 PM	Helium valve opened
11/14/2011	12:55:30 PM	Main Vac valve opened
11/14/2011	12:55:30 PM	Helium MFC set to  20.000000
11/14/2011	12:55:30 PM	H2 MFC set to  0.000000
11/14/2011	12:55:30 PM	BCl3 MFC set to  0.000000
11/14/2011	12:55:30 PM	PHl3 MFC set to  0.000000
11/14/2011	12:55:30 PM	SiCl4 MFC set to  0.000000
11/14/2011	12:55:30 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	12:55:30 PM	Tube furnace set to 150
11/14/2011	12:56:00 PM	Helium valve closed
11/14/2011	12:56:00 PM	H2 valve closed
11/14/2011	12:56:00 PM	BCl3 valve closed
11/14/2011	12:56:00 PM	PH3 valve closed
11/14/2011	12:56:00 PM	SiCl4 pre valve closed
11/14/2011	12:56:00 PM	SiCl4 post valve closed
11/14/2011	12:56:00 PM	Bypass valve closed
11/14/2011	12:56:00 PM	Bubbler valve closed
11/14/2011	12:56:00 PM	Main Vac valve opened
11/14/2011	12:56:00 PM	Helium MFC set to  0.000000
11/14/2011	12:56:00 PM	H2 MFC set to  0.000000
11/14/2011	12:56:00 PM	BCl3 MFC set to  0.000000
11/14/2011	12:56:00 PM	PHl3 MFC set to  0.000000
11/14/2011	12:56:00 PM	SiCl4 MFC set to  0.000000
11/14/2011	12:56:00 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	12:56:00 PM	Tube furnace set to 150
11/14/2011	12:56:30 PM	H2 valve closed
11/14/2011	12:56:30 PM	BCl3 valve closed
11/14/2011	12:56:30 PM	PH3 valve closed
11/14/2011	12:56:30 PM	SiCl4 pre valve closed
11/14/2011	12:56:30 PM	SiCl4 post valve closed
11/14/2011	12:56:30 PM	Bypass valve closed
11/14/2011	12:56:30 PM	Bubbler valve closed
11/14/2011	12:56:30 PM	Helium valve opened
11/14/2011	12:56:30 PM	Main Vac valve opened
11/14/2011	12:56:30 PM	Helium MFC set to  20.000000
11/14/2011	12:56:30 PM	H2 MFC set to  0.000000
11/14/2011	12:56:30 PM	BCl3 MFC set to  0.000000
11/14/2011	12:56:30 PM	PHl3 MFC set to  0.000000
11/14/2011	12:56:30 PM	SiCl4 MFC set to  0.000000
11/14/2011	12:56:30 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	12:56:31 PM	Tube furnace set to 150
11/14/2011	12:57:01 PM	Helium valve closed
11/14/2011	12:57:01 PM	H2 valve closed
11/14/2011	12:57:01 PM	BCl3 valve closed
11/14/2011	12:57:01 PM	PH3 valve closed
11/14/2011	12:57:01 PM	SiCl4 pre valve closed
11/14/2011	12:57:01 PM	SiCl4 post valve closed
11/14/2011	12:57:01 PM	Bypass valve closed
11/14/2011	12:57:01 PM	Bubbler valve closed
11/14/2011	12:57:01 PM	Main Vac valve opened
11/14/2011	12:57:01 PM	Helium MFC set to  0.000000
11/14/2011	12:57:01 PM	H2 MFC set to  0.000000
11/14/2011	12:57:01 PM	BCl3 MFC set to  0.000000
11/14/2011	12:57:01 PM	PHl3 MFC set to  0.000000
11/14/2011	12:57:01 PM	SiCl4 MFC set to  0.000000
11/14/2011	12:57:01 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	12:57:01 PM	Tube furnace set to 150
11/14/2011	12:57:31 PM	H2 valve closed
11/14/2011	12:57:31 PM	BCl3 valve closed
11/14/2011	12:57:31 PM	PH3 valve closed
11/14/2011	12:57:31 PM	SiCl4 pre valve closed
11/14/2011	12:57:31 PM	SiCl4 post valve closed
11/14/2011	12:57:31 PM	Bypass valve closed
11/14/2011	12:57:31 PM	Bubbler valve closed
11/14/2011	12:57:31 PM	Helium valve opened
11/14/2011	12:57:31 PM	Main Vac valve opened
11/14/2011	12:57:31 PM	Helium MFC set to  20.000000
11/14/2011	12:57:31 PM	H2 MFC set to  0.000000
11/14/2011	12:57:31 PM	BCl3 MFC set to  0.000000
11/14/2011	12:57:31 PM	PHl3 MFC set to  0.000000
11/14/2011	12:57:31 PM	SiCl4 MFC set to  0.000000
11/14/2011	12:57:31 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	12:57:31 PM	Tube furnace set to 150
11/14/2011	12:58:01 PM	Helium valve closed
11/14/2011	12:58:01 PM	H2 valve closed
11/14/2011	12:58:01 PM	BCl3 valve closed
11/14/2011	12:58:01 PM	PH3 valve closed
11/14/2011	12:58:01 PM	SiCl4 pre valve closed
11/14/2011	12:58:01 PM	SiCl4 post valve closed
11/14/2011	12:58:01 PM	Bypass valve closed
11/14/2011	12:58:01 PM	Bubbler valve closed
11/14/2011	12:58:01 PM	Main Vac valve opened
11/14/2011	12:58:01 PM	Helium MFC set to  0.000000
11/14/2011	12:58:01 PM	H2 MFC set to  0.000000
11/14/2011	12:58:01 PM	BCl3 MFC set to  0.000000
11/14/2011	12:58:01 PM	PHl3 MFC set to  0.000000
11/14/2011	12:58:01 PM	SiCl4 MFC set to  0.000000
11/14/2011	12:58:01 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	12:58:01 PM	Tube furnace set to 150
11/14/2011	12:58:31 PM	H2 valve closed
11/14/2011	12:58:31 PM	BCl3 valve closed
11/14/2011	12:58:31 PM	PH3 valve closed
11/14/2011	12:58:31 PM	SiCl4 pre valve closed
11/14/2011	12:58:31 PM	SiCl4 post valve closed
11/14/2011	12:58:31 PM	Bypass valve closed
11/14/2011	12:58:31 PM	Bubbler valve closed
11/14/2011	12:58:31 PM	Helium valve opened
11/14/2011	12:58:31 PM	Main Vac valve opened
11/14/2011	12:58:31 PM	Helium MFC set to  20.000000
11/14/2011	12:58:31 PM	H2 MFC set to  0.000000
11/14/2011	12:58:31 PM	BCl3 MFC set to  0.000000
11/14/2011	12:58:31 PM	PHl3 MFC set to  0.000000
11/14/2011	12:58:31 PM	SiCl4 MFC set to  0.000000
11/14/2011	12:58:31 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	12:58:31 PM	Tube furnace set to 150
11/14/2011	12:59:01 PM	Helium valve closed
11/14/2011	12:59:01 PM	H2 valve closed
11/14/2011	12:59:01 PM	BCl3 valve closed
11/14/2011	12:59:01 PM	PH3 valve closed
11/14/2011	12:59:01 PM	SiCl4 pre valve closed
11/14/2011	12:59:01 PM	SiCl4 post valve closed
11/14/2011	12:59:01 PM	Bypass valve closed
11/14/2011	12:59:01 PM	Bubbler valve closed
11/14/2011	12:59:01 PM	Main Vac valve opened
11/14/2011	12:59:01 PM	Helium MFC set to  0.000000
11/14/2011	12:59:01 PM	H2 MFC set to  0.000000
11/14/2011	12:59:01 PM	BCl3 MFC set to  0.000000
11/14/2011	12:59:01 PM	PHl3 MFC set to  0.000000
11/14/2011	12:59:01 PM	SiCl4 MFC set to  0.000000
11/14/2011	12:59:01 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	12:59:02 PM	Tube furnace set to 150
11/14/2011	12:59:32 PM	H2 valve closed
11/14/2011	12:59:32 PM	BCl3 valve closed
11/14/2011	12:59:32 PM	PH3 valve closed
11/14/2011	12:59:32 PM	SiCl4 pre valve closed
11/14/2011	12:59:32 PM	SiCl4 post valve closed
11/14/2011	12:59:32 PM	Bypass valve closed
11/14/2011	12:59:32 PM	Bubbler valve closed
11/14/2011	12:59:32 PM	Helium valve opened
11/14/2011	12:59:32 PM	Main Vac valve opened
11/14/2011	12:59:32 PM	Helium MFC set to  20.000000
11/14/2011	12:59:32 PM	H2 MFC set to  0.000000
11/14/2011	12:59:32 PM	BCl3 MFC set to  0.000000
11/14/2011	12:59:32 PM	PHl3 MFC set to  0.000000
11/14/2011	12:59:32 PM	SiCl4 MFC set to  0.000000
11/14/2011	12:59:32 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	12:59:32 PM	Tube furnace set to 150
11/14/2011	1:00:02 PM	Helium valve closed
11/14/2011	1:00:02 PM	H2 valve closed
11/14/2011	1:00:02 PM	BCl3 valve closed
11/14/2011	1:00:02 PM	PH3 valve closed
11/14/2011	1:00:02 PM	SiCl4 pre valve closed
11/14/2011	1:00:02 PM	SiCl4 post valve closed
11/14/2011	1:00:02 PM	Bypass valve closed
11/14/2011	1:00:02 PM	Bubbler valve closed
11/14/2011	1:00:02 PM	Main Vac valve opened
11/14/2011	1:00:02 PM	Helium MFC set to  0.000000
11/14/2011	1:00:02 PM	H2 MFC set to  0.000000
11/14/2011	1:00:02 PM	BCl3 MFC set to  0.000000
11/14/2011	1:00:02 PM	PHl3 MFC set to  0.000000
11/14/2011	1:00:02 PM	SiCl4 MFC set to  0.000000
11/14/2011	1:00:02 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	1:00:02 PM	Tube furnace set to 150
11/14/2011	1:00:32 PM	H2 valve closed
11/14/2011	1:00:32 PM	BCl3 valve closed
11/14/2011	1:00:32 PM	PH3 valve closed
11/14/2011	1:00:32 PM	SiCl4 pre valve closed
11/14/2011	1:00:32 PM	SiCl4 post valve closed
11/14/2011	1:00:32 PM	Bypass valve closed
11/14/2011	1:00:32 PM	Bubbler valve closed
11/14/2011	1:00:32 PM	Helium valve opened
11/14/2011	1:00:32 PM	Main Vac valve opened
11/14/2011	1:00:32 PM	Helium MFC set to  20.000000
11/14/2011	1:00:32 PM	H2 MFC set to  0.000000
11/14/2011	1:00:32 PM	BCl3 MFC set to  0.000000
11/14/2011	1:00:32 PM	PHl3 MFC set to  0.000000
11/14/2011	1:00:32 PM	SiCl4 MFC set to  0.000000
11/14/2011	1:00:32 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	1:00:32 PM	Tube furnace set to 150
11/14/2011	1:01:02 PM	Helium valve closed
11/14/2011	1:01:02 PM	H2 valve closed
11/14/2011	1:01:02 PM	BCl3 valve closed
11/14/2011	1:01:02 PM	PH3 valve closed
11/14/2011	1:01:02 PM	SiCl4 pre valve closed
11/14/2011	1:01:02 PM	SiCl4 post valve closed
11/14/2011	1:01:02 PM	Bypass valve closed
11/14/2011	1:01:02 PM	Bubbler valve closed
11/14/2011	1:01:02 PM	Main Vac valve opened
11/14/2011	1:01:02 PM	Helium MFC set to  0.000000
11/14/2011	1:01:02 PM	H2 MFC set to  0.000000
11/14/2011	1:01:02 PM	BCl3 MFC set to  0.000000
11/14/2011	1:01:02 PM	PHl3 MFC set to  0.000000
11/14/2011	1:01:02 PM	SiCl4 MFC set to  0.000000
11/14/2011	1:01:02 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	1:01:02 PM	Tube furnace set to 150
11/14/2011	1:01:32 PM	H2 valve closed
11/14/2011	1:01:32 PM	BCl3 valve closed
11/14/2011	1:01:32 PM	PH3 valve closed
11/14/2011	1:01:32 PM	SiCl4 pre valve closed
11/14/2011	1:01:33 PM	SiCl4 post valve closed
11/14/2011	1:01:33 PM	Bypass valve closed
11/14/2011	1:01:33 PM	Bubbler valve closed
11/14/2011	1:01:33 PM	Helium valve opened
11/14/2011	1:01:33 PM	Main Vac valve opened
11/14/2011	1:01:33 PM	Helium MFC set to  20.000000
11/14/2011	1:01:33 PM	H2 MFC set to  0.000000
11/14/2011	1:01:33 PM	BCl3 MFC set to  0.000000
11/14/2011	1:01:33 PM	PHl3 MFC set to  0.000000
11/14/2011	1:01:33 PM	SiCl4 MFC set to  0.000000
11/14/2011	1:01:33 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	1:01:33 PM	Tube furnace set to 150
11/14/2011	1:02:03 PM	Helium valve closed
11/14/2011	1:02:03 PM	H2 valve closed
11/14/2011	1:02:03 PM	BCl3 valve closed
11/14/2011	1:02:03 PM	PH3 valve closed
11/14/2011	1:02:03 PM	SiCl4 pre valve closed
11/14/2011	1:02:03 PM	SiCl4 post valve closed
11/14/2011	1:02:03 PM	Bypass valve closed
11/14/2011	1:02:03 PM	Bubbler valve closed
11/14/2011	1:02:03 PM	Main Vac valve opened
11/14/2011	1:02:03 PM	Helium MFC set to  0.000000
11/14/2011	1:02:03 PM	H2 MFC set to  0.000000
11/14/2011	1:02:03 PM	BCl3 MFC set to  0.000000
11/14/2011	1:02:03 PM	PHl3 MFC set to  0.000000
11/14/2011	1:02:03 PM	SiCl4 MFC set to  0.000000
11/14/2011	1:02:03 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	1:02:03 PM	Tube furnace set to 150
11/14/2011	1:02:33 PM	H2 valve closed
11/14/2011	1:02:33 PM	BCl3 valve closed
11/14/2011	1:02:33 PM	PH3 valve closed
11/14/2011	1:02:33 PM	SiCl4 pre valve closed
11/14/2011	1:02:33 PM	SiCl4 post valve closed
11/14/2011	1:02:33 PM	Bypass valve closed
11/14/2011	1:02:33 PM	Bubbler valve closed
11/14/2011	1:02:33 PM	Helium valve opened
11/14/2011	1:02:33 PM	Main Vac valve opened
11/14/2011	1:02:33 PM	Helium MFC set to  20.000000
11/14/2011	1:02:33 PM	H2 MFC set to  0.000000
11/14/2011	1:02:33 PM	BCl3 MFC set to  0.000000
11/14/2011	1:02:33 PM	PHl3 MFC set to  0.000000
11/14/2011	1:02:33 PM	SiCl4 MFC set to  0.000000
11/14/2011	1:02:33 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	1:02:33 PM	Tube furnace set to 150
11/14/2011	1:03:03 PM	Helium valve closed
11/14/2011	1:03:03 PM	H2 valve closed
11/14/2011	1:03:03 PM	BCl3 valve closed
11/14/2011	1:03:03 PM	PH3 valve closed
11/14/2011	1:03:03 PM	SiCl4 pre valve closed
11/14/2011	1:03:03 PM	SiCl4 post valve closed
11/14/2011	1:03:03 PM	Bypass valve closed
11/14/2011	1:03:03 PM	Bubbler valve closed
11/14/2011	1:03:03 PM	Main Vac valve opened
11/14/2011	1:03:03 PM	Helium MFC set to  0.000000
11/14/2011	1:03:03 PM	H2 MFC set to  0.000000
11/14/2011	1:03:03 PM	BCl3 MFC set to  0.000000
11/14/2011	1:03:03 PM	PHl3 MFC set to  0.000000
11/14/2011	1:03:03 PM	SiCl4 MFC set to  0.000000
11/14/2011	1:03:03 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	1:03:03 PM	Tube furnace set to 150
11/14/2011	1:03:33 PM	H2 valve closed
11/14/2011	1:03:33 PM	BCl3 valve closed
11/14/2011	1:03:33 PM	PH3 valve closed
11/14/2011	1:03:33 PM	SiCl4 pre valve closed
11/14/2011	1:03:33 PM	SiCl4 post valve closed
11/14/2011	1:03:33 PM	Bypass valve closed
11/14/2011	1:03:33 PM	Bubbler valve closed
11/14/2011	1:03:33 PM	Helium valve opened
11/14/2011	1:03:33 PM	Main Vac valve opened
11/14/2011	1:03:33 PM	Helium MFC set to  20.000000
11/14/2011	1:03:33 PM	H2 MFC set to  0.000000
11/14/2011	1:03:33 PM	BCl3 MFC set to  0.000000
11/14/2011	1:03:33 PM	PHl3 MFC set to  0.000000
11/14/2011	1:03:33 PM	SiCl4 MFC set to  0.000000
11/14/2011	1:03:33 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	1:03:34 PM	Tube furnace set to 150
11/14/2011	1:04:04 PM	Helium valve closed
11/14/2011	1:04:04 PM	H2 valve closed
11/14/2011	1:04:04 PM	BCl3 valve closed
11/14/2011	1:04:04 PM	PH3 valve closed
11/14/2011	1:04:04 PM	SiCl4 pre valve closed
11/14/2011	1:04:04 PM	SiCl4 post valve closed
11/14/2011	1:04:04 PM	Bypass valve closed
11/14/2011	1:04:04 PM	Bubbler valve closed
11/14/2011	1:04:04 PM	Main Vac valve opened
11/14/2011	1:04:04 PM	Helium MFC set to  0.000000
11/14/2011	1:04:04 PM	H2 MFC set to  0.000000
11/14/2011	1:04:04 PM	BCl3 MFC set to  0.000000
11/14/2011	1:04:04 PM	PHl3 MFC set to  0.000000
11/14/2011	1:04:04 PM	SiCl4 MFC set to  0.000000
11/14/2011	1:04:04 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	1:04:04 PM	Tube furnace set to 150
11/14/2011	1:04:34 PM	H2 valve closed
11/14/2011	1:04:34 PM	BCl3 valve closed
11/14/2011	1:04:34 PM	PH3 valve closed
11/14/2011	1:04:34 PM	SiCl4 pre valve closed
11/14/2011	1:04:34 PM	SiCl4 post valve closed
11/14/2011	1:04:34 PM	Bypass valve closed
11/14/2011	1:04:34 PM	Bubbler valve closed
11/14/2011	1:04:34 PM	Helium valve opened
11/14/2011	1:04:34 PM	Main Vac valve opened
11/14/2011	1:04:34 PM	Helium MFC set to  20.000000
11/14/2011	1:04:34 PM	H2 MFC set to  0.000000
11/14/2011	1:04:34 PM	BCl3 MFC set to  0.000000
11/14/2011	1:04:34 PM	PHl3 MFC set to  0.000000
11/14/2011	1:04:34 PM	SiCl4 MFC set to  0.000000
11/14/2011	1:04:34 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	1:04:34 PM	Tube furnace set to 150
11/14/2011	1:05:04 PM	Helium valve closed
11/14/2011	1:05:04 PM	H2 valve closed
11/14/2011	1:05:04 PM	BCl3 valve closed
11/14/2011	1:05:04 PM	PH3 valve closed
11/14/2011	1:05:04 PM	SiCl4 pre valve closed
11/14/2011	1:05:04 PM	SiCl4 post valve closed
11/14/2011	1:05:04 PM	Bypass valve closed
11/14/2011	1:05:04 PM	Bubbler valve closed
11/14/2011	1:05:04 PM	Main Vac valve opened
11/14/2011	1:05:04 PM	Helium MFC set to  0.000000
11/14/2011	1:05:04 PM	H2 MFC set to  0.000000
11/14/2011	1:05:04 PM	BCl3 MFC set to  0.000000
11/14/2011	1:05:04 PM	PHl3 MFC set to  0.000000
11/14/2011	1:05:04 PM	SiCl4 MFC set to  0.000000
11/14/2011	1:05:04 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	1:05:04 PM	Tube furnace set to 150
11/14/2011	1:05:05 PM	Run finished at 1:05 PM
11/14/2011	1:05:50 PM	Recipe started at 1:05 PM
11/14/2011	1:05:50 PM	Helium valve closed
11/14/2011	1:05:50 PM	H2 valve closed
11/14/2011	1:05:50 PM	BCl3 valve closed
11/14/2011	1:05:50 PM	PH3 valve closed
11/14/2011	1:05:50 PM	SiCl4 pre valve closed
11/14/2011	1:05:50 PM	SiCl4 post valve closed
11/14/2011	1:05:50 PM	Bypass valve closed
11/14/2011	1:05:50 PM	Bubbler valve closed
11/14/2011	1:05:50 PM	Main Vac valve opened
11/14/2011	1:05:50 PM	Helium MFC set to  0.000000
11/14/2011	1:05:50 PM	H2 MFC set to  0.000000
11/14/2011	1:05:50 PM	BCl3 MFC set to  0.000000
11/14/2011	1:05:50 PM	PHl3 MFC set to  0.000000
11/14/2011	1:05:50 PM	SiCl4 MFC set to  0.000000
11/14/2011	1:05:50 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	1:05:50 PM	Tube furnace set to 150
11/14/2011	1:06:20 PM	H2 valve closed
11/14/2011	1:06:20 PM	BCl3 valve closed
11/14/2011	1:06:20 PM	PH3 valve closed
11/14/2011	1:06:20 PM	SiCl4 pre valve closed
11/14/2011	1:06:20 PM	SiCl4 post valve closed
11/14/2011	1:06:20 PM	Bypass valve closed
11/14/2011	1:06:20 PM	Bubbler valve closed
11/14/2011	1:06:20 PM	Helium valve opened
11/14/2011	1:06:20 PM	Main Vac valve opened
11/14/2011	1:06:20 PM	Helium MFC set to  20.000000
11/14/2011	1:06:20 PM	H2 MFC set to  0.000000
11/14/2011	1:06:20 PM	BCl3 MFC set to  0.000000
11/14/2011	1:06:20 PM	PHl3 MFC set to  0.000000
11/14/2011	1:06:20 PM	SiCl4 MFC set to  0.000000
11/14/2011	1:06:20 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	1:06:20 PM	Tube furnace set to 150
11/14/2011	1:06:50 PM	Helium valve closed
11/14/2011	1:06:50 PM	H2 valve closed
11/14/2011	1:06:50 PM	BCl3 valve closed
11/14/2011	1:06:50 PM	PH3 valve closed
11/14/2011	1:06:50 PM	SiCl4 pre valve closed
11/14/2011	1:06:50 PM	SiCl4 post valve closed
11/14/2011	1:06:50 PM	Bypass valve closed
11/14/2011	1:06:50 PM	Bubbler valve closed
11/14/2011	1:06:50 PM	Main Vac valve opened
11/14/2011	1:06:50 PM	Helium MFC set to  0.000000
11/14/2011	1:06:50 PM	H2 MFC set to  0.000000
11/14/2011	1:06:50 PM	BCl3 MFC set to  0.000000
11/14/2011	1:06:50 PM	PHl3 MFC set to  0.000000
11/14/2011	1:06:50 PM	SiCl4 MFC set to  0.000000
11/14/2011	1:06:50 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	1:06:50 PM	Tube furnace set to 150
11/14/2011	1:07:20 PM	H2 valve closed
11/14/2011	1:07:20 PM	BCl3 valve closed
11/14/2011	1:07:20 PM	PH3 valve closed
11/14/2011	1:07:20 PM	SiCl4 pre valve closed
11/14/2011	1:07:20 PM	SiCl4 post valve closed
11/14/2011	1:07:20 PM	Bypass valve closed
11/14/2011	1:07:20 PM	Bubbler valve closed
11/14/2011	1:07:20 PM	Helium valve opened
11/14/2011	1:07:20 PM	Main Vac valve opened
11/14/2011	1:07:20 PM	Helium MFC set to  20.000000
11/14/2011	1:07:20 PM	H2 MFC set to  0.000000
11/14/2011	1:07:20 PM	BCl3 MFC set to  0.000000
11/14/2011	1:07:20 PM	PHl3 MFC set to  0.000000
11/14/2011	1:07:20 PM	SiCl4 MFC set to  0.000000
11/14/2011	1:07:20 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	1:07:20 PM	Tube furnace set to 150
11/14/2011	1:07:50 PM	Helium valve closed
11/14/2011	1:07:50 PM	H2 valve closed
11/14/2011	1:07:50 PM	BCl3 valve closed
11/14/2011	1:07:50 PM	PH3 valve closed
11/14/2011	1:07:50 PM	SiCl4 pre valve closed
11/14/2011	1:07:50 PM	SiCl4 post valve closed
11/14/2011	1:07:50 PM	Bypass valve closed
11/14/2011	1:07:50 PM	Bubbler valve closed
11/14/2011	1:07:50 PM	Main Vac valve opened
11/14/2011	1:07:50 PM	Helium MFC set to  0.000000
11/14/2011	1:07:50 PM	H2 MFC set to  0.000000
11/14/2011	1:07:50 PM	BCl3 MFC set to  0.000000
11/14/2011	1:07:50 PM	PHl3 MFC set to  0.000000
11/14/2011	1:07:50 PM	SiCl4 MFC set to  0.000000
11/14/2011	1:07:50 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	1:07:50 PM	Tube furnace set to 150
11/14/2011	1:08:21 PM	H2 valve closed
11/14/2011	1:08:21 PM	BCl3 valve closed
11/14/2011	1:08:21 PM	PH3 valve closed
11/14/2011	1:08:21 PM	SiCl4 pre valve closed
11/14/2011	1:08:21 PM	SiCl4 post valve closed
11/14/2011	1:08:21 PM	Bypass valve closed
11/14/2011	1:08:21 PM	Bubbler valve closed
11/14/2011	1:08:21 PM	Helium valve opened
11/14/2011	1:08:21 PM	Main Vac valve opened
11/14/2011	1:08:21 PM	Helium MFC set to  20.000000
11/14/2011	1:08:21 PM	H2 MFC set to  0.000000
11/14/2011	1:08:21 PM	BCl3 MFC set to  0.000000
11/14/2011	1:08:21 PM	PHl3 MFC set to  0.000000
11/14/2011	1:08:21 PM	SiCl4 MFC set to  0.000000
11/14/2011	1:08:21 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	1:08:21 PM	Tube furnace set to 150
11/14/2011	1:08:51 PM	Helium valve closed
11/14/2011	1:08:51 PM	H2 valve closed
11/14/2011	1:08:51 PM	BCl3 valve closed
11/14/2011	1:08:51 PM	PH3 valve closed
11/14/2011	1:08:51 PM	SiCl4 pre valve closed
11/14/2011	1:08:51 PM	SiCl4 post valve closed
11/14/2011	1:08:51 PM	Bypass valve closed
11/14/2011	1:08:51 PM	Bubbler valve closed
11/14/2011	1:08:51 PM	Main Vac valve opened
11/14/2011	1:08:51 PM	Helium MFC set to  0.000000
11/14/2011	1:08:51 PM	H2 MFC set to  0.000000
11/14/2011	1:08:51 PM	BCl3 MFC set to  0.000000
11/14/2011	1:08:51 PM	PHl3 MFC set to  0.000000
11/14/2011	1:08:51 PM	SiCl4 MFC set to  0.000000
11/14/2011	1:08:51 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	1:08:51 PM	Tube furnace set to 150
11/14/2011	1:09:21 PM	H2 valve closed
11/14/2011	1:09:21 PM	BCl3 valve closed
11/14/2011	1:09:21 PM	PH3 valve closed
11/14/2011	1:09:21 PM	SiCl4 pre valve closed
11/14/2011	1:09:21 PM	SiCl4 post valve closed
11/14/2011	1:09:21 PM	Bypass valve closed
11/14/2011	1:09:21 PM	Bubbler valve closed
11/14/2011	1:09:21 PM	Helium valve opened
11/14/2011	1:09:21 PM	Main Vac valve opened
11/14/2011	1:09:21 PM	Helium MFC set to  20.000000
11/14/2011	1:09:21 PM	H2 MFC set to  0.000000
11/14/2011	1:09:21 PM	BCl3 MFC set to  0.000000
11/14/2011	1:09:21 PM	PHl3 MFC set to  0.000000
11/14/2011	1:09:21 PM	SiCl4 MFC set to  0.000000
11/14/2011	1:09:21 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	1:09:21 PM	Tube furnace set to 150
11/14/2011	1:09:51 PM	Helium valve closed
11/14/2011	1:09:51 PM	H2 valve closed
11/14/2011	1:09:51 PM	BCl3 valve closed
11/14/2011	1:09:51 PM	PH3 valve closed
11/14/2011	1:09:51 PM	SiCl4 pre valve closed
11/14/2011	1:09:51 PM	SiCl4 post valve closed
11/14/2011	1:09:51 PM	Bypass valve closed
11/14/2011	1:09:51 PM	Bubbler valve closed
11/14/2011	1:09:51 PM	Main Vac valve opened
11/14/2011	1:09:51 PM	Helium MFC set to  0.000000
11/14/2011	1:09:51 PM	H2 MFC set to  0.000000
11/14/2011	1:09:51 PM	BCl3 MFC set to  0.000000
11/14/2011	1:09:51 PM	PHl3 MFC set to  0.000000
11/14/2011	1:09:51 PM	SiCl4 MFC set to  0.000000
11/14/2011	1:09:51 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	1:09:51 PM	Tube furnace set to 150
11/14/2011	1:10:21 PM	H2 valve closed
11/14/2011	1:10:21 PM	BCl3 valve closed
11/14/2011	1:10:21 PM	PH3 valve closed
11/14/2011	1:10:21 PM	SiCl4 pre valve closed
11/14/2011	1:10:21 PM	SiCl4 post valve closed
11/14/2011	1:10:21 PM	Bypass valve closed
11/14/2011	1:10:21 PM	Bubbler valve closed
11/14/2011	1:10:21 PM	Helium valve opened
11/14/2011	1:10:21 PM	Main Vac valve opened
11/14/2011	1:10:21 PM	Helium MFC set to  20.000000
11/14/2011	1:10:21 PM	H2 MFC set to  0.000000
11/14/2011	1:10:21 PM	BCl3 MFC set to  0.000000
11/14/2011	1:10:21 PM	PHl3 MFC set to  0.000000
11/14/2011	1:10:21 PM	SiCl4 MFC set to  0.000000
11/14/2011	1:10:21 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	1:10:21 PM	Tube furnace set to 150
11/14/2011	1:10:51 PM	Helium valve closed
11/14/2011	1:10:51 PM	H2 valve closed
11/14/2011	1:10:51 PM	BCl3 valve closed
11/14/2011	1:10:52 PM	PH3 valve closed
11/14/2011	1:10:52 PM	SiCl4 pre valve closed
11/14/2011	1:10:52 PM	SiCl4 post valve closed
11/14/2011	1:10:52 PM	Bypass valve closed
11/14/2011	1:10:52 PM	Bubbler valve closed
11/14/2011	1:10:52 PM	Main Vac valve opened
11/14/2011	1:10:52 PM	Helium MFC set to  0.000000
11/14/2011	1:10:52 PM	H2 MFC set to  0.000000
11/14/2011	1:10:52 PM	BCl3 MFC set to  0.000000
11/14/2011	1:10:52 PM	PHl3 MFC set to  0.000000
11/14/2011	1:10:52 PM	SiCl4 MFC set to  0.000000
11/14/2011	1:10:52 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	1:10:52 PM	Tube furnace set to 150
11/14/2011	1:11:22 PM	H2 valve closed
11/14/2011	1:11:22 PM	BCl3 valve closed
11/14/2011	1:11:22 PM	PH3 valve closed
11/14/2011	1:11:22 PM	SiCl4 pre valve closed
11/14/2011	1:11:22 PM	SiCl4 post valve closed
11/14/2011	1:11:22 PM	Bypass valve closed
11/14/2011	1:11:22 PM	Bubbler valve closed
11/14/2011	1:11:22 PM	Helium valve opened
11/14/2011	1:11:22 PM	Main Vac valve opened
11/14/2011	1:11:22 PM	Helium MFC set to  20.000000
11/14/2011	1:11:22 PM	H2 MFC set to  0.000000
11/14/2011	1:11:22 PM	BCl3 MFC set to  0.000000
11/14/2011	1:11:22 PM	PHl3 MFC set to  0.000000
11/14/2011	1:11:22 PM	SiCl4 MFC set to  0.000000
11/14/2011	1:11:22 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	1:11:22 PM	Tube furnace set to 150
11/14/2011	1:11:52 PM	Helium valve closed
11/14/2011	1:11:52 PM	H2 valve closed
11/14/2011	1:11:52 PM	BCl3 valve closed
11/14/2011	1:11:52 PM	PH3 valve closed
11/14/2011	1:11:52 PM	SiCl4 pre valve closed
11/14/2011	1:11:52 PM	SiCl4 post valve closed
11/14/2011	1:11:52 PM	Bypass valve closed
11/14/2011	1:11:52 PM	Bubbler valve closed
11/14/2011	1:11:52 PM	Main Vac valve opened
11/14/2011	1:11:52 PM	Helium MFC set to  0.000000
11/14/2011	1:11:52 PM	H2 MFC set to  0.000000
11/14/2011	1:11:52 PM	BCl3 MFC set to  0.000000
11/14/2011	1:11:52 PM	PHl3 MFC set to  0.000000
11/14/2011	1:11:52 PM	SiCl4 MFC set to  0.000000
11/14/2011	1:11:52 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	1:11:52 PM	Tube furnace set to 150
11/14/2011	1:12:22 PM	H2 valve closed
11/14/2011	1:12:22 PM	BCl3 valve closed
11/14/2011	1:12:22 PM	PH3 valve closed
11/14/2011	1:12:22 PM	SiCl4 pre valve closed
11/14/2011	1:12:22 PM	SiCl4 post valve closed
11/14/2011	1:12:22 PM	Bypass valve closed
11/14/2011	1:12:22 PM	Bubbler valve closed
11/14/2011	1:12:22 PM	Helium valve opened
11/14/2011	1:12:22 PM	Main Vac valve opened
11/14/2011	1:12:22 PM	Helium MFC set to  20.000000
11/14/2011	1:12:22 PM	H2 MFC set to  0.000000
11/14/2011	1:12:22 PM	BCl3 MFC set to  0.000000
11/14/2011	1:12:22 PM	PHl3 MFC set to  0.000000
11/14/2011	1:12:22 PM	SiCl4 MFC set to  0.000000
11/14/2011	1:12:22 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	1:12:22 PM	Tube furnace set to 150
11/14/2011	1:12:52 PM	Helium valve closed
11/14/2011	1:12:52 PM	H2 valve closed
11/14/2011	1:12:52 PM	BCl3 valve closed
11/14/2011	1:12:52 PM	PH3 valve closed
11/14/2011	1:12:52 PM	SiCl4 pre valve closed
11/14/2011	1:12:52 PM	SiCl4 post valve closed
11/14/2011	1:12:52 PM	Bypass valve closed
11/14/2011	1:12:52 PM	Bubbler valve closed
11/14/2011	1:12:52 PM	Main Vac valve opened
11/14/2011	1:12:52 PM	Helium MFC set to  0.000000
11/14/2011	1:12:52 PM	H2 MFC set to  0.000000
11/14/2011	1:12:52 PM	BCl3 MFC set to  0.000000
11/14/2011	1:12:52 PM	PHl3 MFC set to  0.000000
11/14/2011	1:12:52 PM	SiCl4 MFC set to  0.000000
11/14/2011	1:12:52 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	1:12:52 PM	Tube furnace set to 150
11/14/2011	1:13:22 PM	H2 valve closed
11/14/2011	1:13:22 PM	BCl3 valve closed
11/14/2011	1:13:22 PM	PH3 valve closed
11/14/2011	1:13:22 PM	SiCl4 pre valve closed
11/14/2011	1:13:22 PM	SiCl4 post valve closed
11/14/2011	1:13:22 PM	Bypass valve closed
11/14/2011	1:13:22 PM	Bubbler valve closed
11/14/2011	1:13:22 PM	Helium valve opened
11/14/2011	1:13:22 PM	Main Vac valve opened
11/14/2011	1:13:22 PM	Helium MFC set to  20.000000
11/14/2011	1:13:22 PM	H2 MFC set to  0.000000
11/14/2011	1:13:22 PM	BCl3 MFC set to  0.000000
11/14/2011	1:13:23 PM	PHl3 MFC set to  0.000000
11/14/2011	1:13:23 PM	SiCl4 MFC set to  0.000000
11/14/2011	1:13:23 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	1:13:23 PM	Tube furnace set to 150
11/14/2011	1:13:53 PM	Helium valve closed
11/14/2011	1:13:53 PM	H2 valve closed
11/14/2011	1:13:53 PM	BCl3 valve closed
11/14/2011	1:13:53 PM	PH3 valve closed
11/14/2011	1:13:53 PM	SiCl4 pre valve closed
11/14/2011	1:13:53 PM	SiCl4 post valve closed
11/14/2011	1:13:53 PM	Bypass valve closed
11/14/2011	1:13:53 PM	Bubbler valve closed
11/14/2011	1:13:53 PM	Main Vac valve opened
11/14/2011	1:13:53 PM	Helium MFC set to  0.000000
11/14/2011	1:13:53 PM	H2 MFC set to  0.000000
11/14/2011	1:13:53 PM	BCl3 MFC set to  0.000000
11/14/2011	1:13:53 PM	PHl3 MFC set to  0.000000
11/14/2011	1:13:53 PM	SiCl4 MFC set to  0.000000
11/14/2011	1:13:53 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	1:13:53 PM	Tube furnace set to 150
11/14/2011	1:14:23 PM	H2 valve closed
11/14/2011	1:14:23 PM	BCl3 valve closed
11/14/2011	1:14:23 PM	PH3 valve closed
11/14/2011	1:14:23 PM	SiCl4 pre valve closed
11/14/2011	1:14:23 PM	SiCl4 post valve closed
11/14/2011	1:14:23 PM	Bypass valve closed
11/14/2011	1:14:23 PM	Bubbler valve closed
11/14/2011	1:14:23 PM	Helium valve opened
11/14/2011	1:14:23 PM	Main Vac valve opened
11/14/2011	1:14:23 PM	Helium MFC set to  20.000000
11/14/2011	1:14:23 PM	H2 MFC set to  0.000000
11/14/2011	1:14:23 PM	BCl3 MFC set to  0.000000
11/14/2011	1:14:23 PM	PHl3 MFC set to  0.000000
11/14/2011	1:14:23 PM	SiCl4 MFC set to  0.000000
11/14/2011	1:14:23 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	1:14:23 PM	Tube furnace set to 150
11/14/2011	1:14:53 PM	Helium valve closed
11/14/2011	1:14:53 PM	H2 valve closed
11/14/2011	1:14:53 PM	BCl3 valve closed
11/14/2011	1:14:53 PM	PH3 valve closed
11/14/2011	1:14:53 PM	SiCl4 pre valve closed
11/14/2011	1:14:53 PM	SiCl4 post valve closed
11/14/2011	1:14:53 PM	Bypass valve closed
11/14/2011	1:14:53 PM	Bubbler valve closed
11/14/2011	1:14:53 PM	Main Vac valve opened
11/14/2011	1:14:53 PM	Helium MFC set to  0.000000
11/14/2011	1:14:53 PM	H2 MFC set to  0.000000
11/14/2011	1:14:53 PM	BCl3 MFC set to  0.000000
11/14/2011	1:14:53 PM	PHl3 MFC set to  0.000000
11/14/2011	1:14:53 PM	SiCl4 MFC set to  0.000000
11/14/2011	1:14:53 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	1:14:53 PM	Tube furnace set to 150
11/14/2011	1:15:23 PM	H2 valve closed
11/14/2011	1:15:23 PM	BCl3 valve closed
11/14/2011	1:15:23 PM	PH3 valve closed
11/14/2011	1:15:23 PM	SiCl4 pre valve closed
11/14/2011	1:15:23 PM	SiCl4 post valve closed
11/14/2011	1:15:23 PM	Bypass valve closed
11/14/2011	1:15:23 PM	Bubbler valve closed
11/14/2011	1:15:23 PM	Helium valve opened
11/14/2011	1:15:23 PM	Main Vac valve opened
11/14/2011	1:15:23 PM	Helium MFC set to  20.000000
11/14/2011	1:15:23 PM	H2 MFC set to  0.000000
11/14/2011	1:15:23 PM	BCl3 MFC set to  0.000000
11/14/2011	1:15:23 PM	PHl3 MFC set to  0.000000
11/14/2011	1:15:23 PM	SiCl4 MFC set to  0.000000
11/14/2011	1:15:23 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	1:15:23 PM	Tube furnace set to 150
11/14/2011	1:15:53 PM	Helium valve closed
11/14/2011	1:15:53 PM	H2 valve closed
11/14/2011	1:15:53 PM	BCl3 valve closed
11/14/2011	1:15:53 PM	PH3 valve closed
11/14/2011	1:15:53 PM	SiCl4 pre valve closed
11/14/2011	1:15:53 PM	SiCl4 post valve closed
11/14/2011	1:15:53 PM	Bypass valve closed
11/14/2011	1:15:53 PM	Bubbler valve closed
11/14/2011	1:15:53 PM	Main Vac valve opened
11/14/2011	1:15:53 PM	Helium MFC set to  0.000000
11/14/2011	1:15:53 PM	H2 MFC set to  0.000000
11/14/2011	1:15:53 PM	BCl3 MFC set to  0.000000
11/14/2011	1:15:53 PM	PHl3 MFC set to  0.000000
11/14/2011	1:15:53 PM	SiCl4 MFC set to  0.000000
11/14/2011	1:15:53 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	1:15:54 PM	Tube furnace set to 150
11/14/2011	1:15:55 PM	Run finished at 1:15 PM
11/14/2011	1:17:02 PM	Main Vac valve closed
11/14/2011	1:17:11 PM	Main Vac valve opened
11/14/2011	1:17:47 PM	Recipe started at 1:17 PM
11/14/2011	1:17:47 PM	Helium valve closed
11/14/2011	1:17:47 PM	H2 valve closed
11/14/2011	1:17:47 PM	BCl3 valve closed
11/14/2011	1:17:47 PM	PH3 valve closed
11/14/2011	1:17:47 PM	SiCl4 pre valve closed
11/14/2011	1:17:47 PM	SiCl4 post valve closed
11/14/2011	1:17:47 PM	Main Vac valve closed
11/14/2011	1:17:47 PM	Bypass valve closed
11/14/2011	1:17:47 PM	Bubbler valve closed
11/14/2011	1:17:47 PM	Helium MFC set to  0.000000
11/14/2011	1:17:47 PM	H2 MFC set to  0.000000
11/14/2011	1:17:47 PM	BCl3 MFC set to  0.000000
11/14/2011	1:17:47 PM	PHl3 MFC set to  0.000000
11/14/2011	1:17:47 PM	SiCl4 MFC set to  0.000000
11/14/2011	1:17:47 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	1:17:48 PM	Tube furnace set to 0
11/14/2011	1:17:51 PM	Helium valve closed
11/14/2011	1:17:51 PM	BCl3 valve closed
11/14/2011	1:17:51 PM	PH3 valve closed
11/14/2011	1:17:51 PM	SiCl4 pre valve closed
11/14/2011	1:17:51 PM	SiCl4 post valve closed
11/14/2011	1:17:51 PM	Main Vac valve closed
11/14/2011	1:17:51 PM	Bypass valve closed
11/14/2011	1:17:51 PM	Bubbler valve closed
11/14/2011	1:17:51 PM	H2 valve opened
11/14/2011	1:17:51 PM	Helium MFC set to  0.000000
11/14/2011	1:17:51 PM	H2 MFC set to  500.000000
11/14/2011	1:17:51 PM	BCl3 MFC set to  0.000000
11/14/2011	1:17:51 PM	PHl3 MFC set to  0.000000
11/14/2011	1:17:51 PM	SiCl4 MFC set to  0.000000
11/14/2011	1:17:51 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	1:17:51 PM	Tube furnace set to 0
11/14/2011	1:18:53 PM	Helium valve closed
11/14/2011	1:18:53 PM	BCl3 valve closed
11/14/2011	1:18:53 PM	PH3 valve closed
11/14/2011	1:18:53 PM	SiCl4 pre valve closed
11/14/2011	1:18:53 PM	SiCl4 post valve closed
11/14/2011	1:18:53 PM	Main Vac valve closed
11/14/2011	1:18:53 PM	Bypass valve closed
11/14/2011	1:18:53 PM	H2 valve opened
11/14/2011	1:18:53 PM	Bubbler valve opened
11/14/2011	1:18:53 PM	Helium MFC set to  0.000000
11/14/2011	1:18:53 PM	H2 MFC set to  500.000000
11/14/2011	1:18:54 PM	BCl3 MFC set to  0.000000
11/14/2011	1:18:54 PM	PHl3 MFC set to  0.000000
11/14/2011	1:18:54 PM	SiCl4 MFC set to  0.000000
11/14/2011	1:18:54 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	1:18:54 PM	Tube furnace set to 0
11/14/2011	1:18:55 PM	Helium valve closed
11/14/2011	1:18:55 PM	BCl3 valve closed
11/14/2011	1:18:55 PM	PH3 valve closed
11/14/2011	1:18:55 PM	SiCl4 pre valve closed
11/14/2011	1:18:55 PM	SiCl4 post valve closed
11/14/2011	1:18:55 PM	Main Vac valve closed
11/14/2011	1:18:55 PM	Bypass valve closed
11/14/2011	1:18:55 PM	H2 valve opened
11/14/2011	1:18:55 PM	Bubbler valve opened
11/14/2011	1:18:55 PM	Helium MFC set to  0.000000
11/14/2011	1:18:55 PM	H2 MFC set to  500.000000
11/14/2011	1:18:55 PM	BCl3 MFC set to  0.000000
11/14/2011	1:18:55 PM	PHl3 MFC set to  0.000000
11/14/2011	1:18:55 PM	SiCl4 MFC set to  0.000000
11/14/2011	1:18:55 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	1:18:55 PM	Tube furnace set to 1000
11/14/2011	1:48:55 PM	Helium valve closed
11/14/2011	1:48:55 PM	PH3 valve closed
11/14/2011	1:48:55 PM	Main Vac valve closed
11/14/2011	1:48:55 PM	Bypass valve closed
11/14/2011	1:48:55 PM	H2 valve opened
11/14/2011	1:48:55 PM	BCl3 valve opened
11/14/2011	1:48:55 PM	SiCl4 pre valve opened
11/14/2011	1:48:55 PM	SiCl4 post valve opened
11/14/2011	1:48:55 PM	Bubbler valve opened
11/14/2011	1:48:55 PM	Helium MFC set to  0.000000
11/14/2011	1:48:55 PM	H2 MFC set to  500.000000
11/14/2011	1:48:55 PM	BCl3 MFC set to  3.000000
11/14/2011	1:48:55 PM	PHl3 MFC set to  0.000000
11/14/2011	1:48:55 PM	SiCl4 MFC set to  18.000000
11/14/2011	1:48:55 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	1:48:55 PM	Tube furnace set to 1000
11/14/2011	2:06:55 PM	Helium valve closed
11/14/2011	2:06:55 PM	BCl3 valve closed
11/14/2011	2:06:55 PM	PH3 valve closed
11/14/2011	2:06:55 PM	SiCl4 pre valve closed
11/14/2011	2:06:55 PM	SiCl4 post valve closed
11/14/2011	2:06:55 PM	Main Vac valve closed
11/14/2011	2:06:55 PM	Bypass valve closed
11/14/2011	2:06:55 PM	H2 valve opened
11/14/2011	2:06:55 PM	Bubbler valve opened
11/14/2011	2:06:55 PM	Helium MFC set to  0.000000
11/14/2011	2:06:55 PM	H2 MFC set to  500.000000
11/14/2011	2:06:55 PM	BCl3 MFC set to  0.000000
11/14/2011	2:06:55 PM	PHl3 MFC set to  0.000000
11/14/2011	2:06:55 PM	SiCl4 MFC set to  0.000000
11/14/2011	2:06:55 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	2:06:55 PM	Tube furnace set to 750
11/14/2011	2:16:55 PM	H2 valve closed
11/14/2011	2:16:55 PM	BCl3 valve closed
11/14/2011	2:16:55 PM	PH3 valve closed
11/14/2011	2:16:55 PM	SiCl4 pre valve closed
11/14/2011	2:16:55 PM	SiCl4 post valve closed
11/14/2011	2:16:55 PM	Main Vac valve closed
11/14/2011	2:16:55 PM	Bypass valve closed
11/14/2011	2:16:55 PM	Helium valve opened
11/14/2011	2:16:55 PM	Bubbler valve opened
11/14/2011	2:16:55 PM	Helium MFC set to  500.000000
11/14/2011	2:16:55 PM	H2 MFC set to  0.000000
11/14/2011	2:16:55 PM	BCl3 MFC set to  0.000000
11/14/2011	2:16:55 PM	PHl3 MFC set to  0.000000
11/14/2011	2:16:55 PM	SiCl4 MFC set to  0.000000
11/14/2011	2:16:55 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	2:16:55 PM	Tube furnace set to 0
11/14/2011	2:36:55 PM	Helium valve closed
11/14/2011	2:36:55 PM	H2 valve closed
11/14/2011	2:36:55 PM	BCl3 valve closed
11/14/2011	2:36:55 PM	PH3 valve closed
11/14/2011	2:36:55 PM	SiCl4 pre valve closed
11/14/2011	2:36:55 PM	SiCl4 post valve closed
11/14/2011	2:36:55 PM	Main Vac valve closed
11/14/2011	2:36:55 PM	Bypass valve closed
11/14/2011	2:36:55 PM	Bubbler valve closed
11/14/2011	2:36:55 PM	Helium MFC set to  0.000000
11/14/2011	2:36:55 PM	H2 MFC set to  0.000000
11/14/2011	2:36:55 PM	BCl3 MFC set to  0.000000
11/14/2011	2:36:55 PM	PHl3 MFC set to  0.000000
11/14/2011	2:36:55 PM	SiCl4 MFC set to  0.000000
11/14/2011	2:36:55 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	2:36:55 PM	Tube furnace set to 0
11/14/2011	2:36:56 PM	Run finished at 2:36 PM
11/14/2011	2:52:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2011	2:52:36 PM	Recipe started at 2:52 PM
11/14/2011	2:52:36 PM	Helium valve closed
11/14/2011	2:52:36 PM	H2 valve closed
11/14/2011	2:52:36 PM	BCl3 valve closed
11/14/2011	2:52:36 PM	PH3 valve closed
11/14/2011	2:52:36 PM	SiCl4 pre valve closed
11/14/2011	2:52:36 PM	SiCl4 post valve closed
11/14/2011	2:52:36 PM	Main Vac valve closed
11/14/2011	2:52:36 PM	Bypass valve closed
11/14/2011	2:52:36 PM	Bubbler valve closed
11/14/2011	2:52:36 PM	Helium MFC set to  0.000000
11/14/2011	2:52:36 PM	H2 MFC set to  0.000000
11/14/2011	2:52:36 PM	BCl3 MFC set to  0.000000
11/14/2011	2:52:36 PM	PHl3 MFC set to  0.000000
11/14/2011	2:52:36 PM	SiCl4 MFC set to  0.000000
11/14/2011	2:52:36 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	2:52:36 PM	Tube furnace set to 0
11/14/2011	2:52:39 PM	H2 valve closed
11/14/2011	2:52:39 PM	BCl3 valve closed
11/14/2011	2:52:39 PM	PH3 valve closed
11/14/2011	2:52:39 PM	SiCl4 pre valve closed
11/14/2011	2:52:39 PM	SiCl4 post valve closed
11/14/2011	2:52:39 PM	Main Vac valve closed
11/14/2011	2:52:39 PM	Bypass valve closed
11/14/2011	2:52:39 PM	Bubbler valve closed
11/14/2011	2:52:39 PM	Helium valve opened
11/14/2011	2:52:39 PM	Helium MFC set to  500.000000
11/14/2011	2:52:39 PM	H2 MFC set to  0.000000
11/14/2011	2:52:39 PM	BCl3 MFC set to  0.000000
11/14/2011	2:52:39 PM	PHl3 MFC set to  0.000000
11/14/2011	2:52:39 PM	SiCl4 MFC set to  0.000000
11/14/2011	2:52:39 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	2:52:39 PM	Tube furnace set to 0
11/14/2011	2:52:42 PM	Helium valve closed
11/14/2011	2:52:42 PM	H2 valve closed
11/14/2011	2:52:42 PM	BCl3 valve closed
11/14/2011	2:52:42 PM	PH3 valve closed
11/14/2011	2:52:42 PM	SiCl4 pre valve closed
11/14/2011	2:52:42 PM	SiCl4 post valve closed
11/14/2011	2:52:42 PM	Main Vac valve closed
11/14/2011	2:52:42 PM	Bypass valve closed
11/14/2011	2:52:42 PM	Bubbler valve closed
11/14/2011	2:52:42 PM	Helium MFC set to  0.000000
11/14/2011	2:52:42 PM	H2 MFC set to  0.000000
11/14/2011	2:52:42 PM	BCl3 MFC set to  0.000000
11/14/2011	2:52:42 PM	PHl3 MFC set to  0.000000
11/14/2011	2:52:42 PM	SiCl4 MFC set to  0.000000
11/14/2011	2:52:42 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	2:52:42 PM	Tube furnace set to 0
11/14/2011	2:52:43 PM	Run finished at 2:52 PM
11/14/2011	2:52:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2011	2:53:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2011	2:53:26 PM	Recipe started at 2:53 PM
11/14/2011	2:53:26 PM	Helium valve closed
11/14/2011	2:53:26 PM	H2 valve closed
11/14/2011	2:53:26 PM	BCl3 valve closed
11/14/2011	2:53:26 PM	PH3 valve closed
11/14/2011	2:53:26 PM	SiCl4 pre valve closed
11/14/2011	2:53:26 PM	SiCl4 post valve closed
11/14/2011	2:53:26 PM	Main Vac valve closed
11/14/2011	2:53:26 PM	Bypass valve closed
11/14/2011	2:53:26 PM	Bubbler valve closed
11/14/2011	2:53:26 PM	Helium MFC set to  0.000000
11/14/2011	2:53:26 PM	H2 MFC set to  0.000000
11/14/2011	2:53:26 PM	BCl3 MFC set to  0.000000
11/14/2011	2:53:26 PM	PHl3 MFC set to  0.000000
11/14/2011	2:53:26 PM	SiCl4 MFC set to  0.000000
11/14/2011	2:53:26 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	2:53:27 PM	Tube furnace set to 0
11/14/2011	2:53:30 PM	H2 valve closed
11/14/2011	2:53:30 PM	BCl3 valve closed
11/14/2011	2:53:30 PM	PH3 valve closed
11/14/2011	2:53:30 PM	SiCl4 pre valve closed
11/14/2011	2:53:30 PM	SiCl4 post valve closed
11/14/2011	2:53:30 PM	Main Vac valve closed
11/14/2011	2:53:30 PM	Bypass valve closed
11/14/2011	2:53:30 PM	Bubbler valve closed
11/14/2011	2:53:30 PM	Helium valve opened
11/14/2011	2:53:30 PM	Helium MFC set to  500.000000
11/14/2011	2:53:30 PM	H2 MFC set to  0.000000
11/14/2011	2:53:30 PM	BCl3 MFC set to  0.000000
11/14/2011	2:53:30 PM	PHl3 MFC set to  0.000000
11/14/2011	2:53:30 PM	SiCl4 MFC set to  0.000000
11/14/2011	2:53:30 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	2:53:30 PM	Tube furnace set to 0
11/14/2011	2:53:30 PM	Helium valve closed
11/14/2011	2:53:30 PM	H2 valve closed
11/14/2011	2:53:30 PM	BCl3 valve closed
11/14/2011	2:53:30 PM	PH3 valve closed
11/14/2011	2:53:30 PM	SiCl4 pre valve closed
11/14/2011	2:53:30 PM	SiCl4 post valve closed
11/14/2011	2:53:30 PM	Main Vac valve closed
11/14/2011	2:53:30 PM	Bypass valve closed
11/14/2011	2:53:30 PM	Bubbler valve closed
11/14/2011	2:53:30 PM	Helium MFC set to  0.000000
11/14/2011	2:53:30 PM	H2 MFC set to  0.000000
11/14/2011	2:53:30 PM	BCl3 MFC set to  0.000000
11/14/2011	2:53:30 PM	PHl3 MFC set to  0.000000
11/14/2011	2:53:30 PM	SiCl4 MFC set to  0.000000
11/14/2011	2:53:30 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	2:53:30 PM	Tube furnace set to 0
11/14/2011	2:53:31 PM	Run finished at 2:53 PM
11/14/2011	2:53:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2011	3:00:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2011	3:00:10 PM	Recipe started at 3:00 PM
11/14/2011	3:00:10 PM	Helium valve closed
11/14/2011	3:00:10 PM	H2 valve closed
11/14/2011	3:00:10 PM	BCl3 valve closed
11/14/2011	3:00:10 PM	PH3 valve closed
11/14/2011	3:00:10 PM	SiCl4 pre valve closed
11/14/2011	3:00:10 PM	SiCl4 post valve closed
11/14/2011	3:00:10 PM	Main Vac valve closed
11/14/2011	3:00:10 PM	Bubbler valve closed
11/14/2011	3:00:10 PM	Bypass valve opened
11/14/2011	3:00:10 PM	Helium MFC set to  0.000000
11/14/2011	3:00:10 PM	H2 MFC set to  0.000000
11/14/2011	3:00:10 PM	BCl3 MFC set to  0.000000
11/14/2011	3:00:10 PM	PHl3 MFC set to  0.000000
11/14/2011	3:00:10 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:00:10 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:00:10 PM	Tube furnace set to 0
11/14/2011	3:01:19 PM	Helium valve closed
11/14/2011	3:01:19 PM	H2 valve closed
11/14/2011	3:01:19 PM	BCl3 valve closed
11/14/2011	3:01:19 PM	PH3 valve closed
11/14/2011	3:01:19 PM	SiCl4 pre valve closed
11/14/2011	3:01:19 PM	SiCl4 post valve closed
11/14/2011	3:01:19 PM	Main Vac valve closed
11/14/2011	3:01:19 PM	Bubbler valve closed
11/14/2011	3:01:19 PM	Bypass valve opened
11/14/2011	3:01:19 PM	Helium MFC set to  0.000000
11/14/2011	3:01:19 PM	H2 MFC set to  0.000000
11/14/2011	3:01:19 PM	BCl3 MFC set to  0.000000
11/14/2011	3:01:19 PM	PHl3 MFC set to  0.000000
11/14/2011	3:01:19 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:01:19 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:01:19 PM	Tube furnace set to 0
11/14/2011	3:02:19 PM	Helium valve closed
11/14/2011	3:02:19 PM	H2 valve closed
11/14/2011	3:02:19 PM	BCl3 valve closed
11/14/2011	3:02:19 PM	PH3 valve closed
11/14/2011	3:02:19 PM	SiCl4 pre valve closed
11/14/2011	3:02:19 PM	SiCl4 post valve closed
11/14/2011	3:02:19 PM	Bypass valve closed
11/14/2011	3:02:19 PM	Bubbler valve closed
11/14/2011	3:02:19 PM	Main Vac valve opened
11/14/2011	3:02:19 PM	Helium MFC set to  0.000000
11/14/2011	3:02:19 PM	H2 MFC set to  0.000000
11/14/2011	3:02:19 PM	BCl3 MFC set to  0.000000
11/14/2011	3:02:19 PM	PHl3 MFC set to  0.000000
11/14/2011	3:02:19 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:02:19 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:02:19 PM	Tube furnace set to 0
11/14/2011	3:02:20 PM	Run finished at 3:02 PM
11/14/2011	3:02:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2011	3:11:45 PM	Recipe started at 3:11 PM
11/14/2011	3:11:45 PM	Helium valve closed
11/14/2011	3:11:45 PM	H2 valve closed
11/14/2011	3:11:45 PM	BCl3 valve closed
11/14/2011	3:11:45 PM	PH3 valve closed
11/14/2011	3:11:45 PM	SiCl4 pre valve closed
11/14/2011	3:11:45 PM	SiCl4 post valve closed
11/14/2011	3:11:45 PM	Bypass valve closed
11/14/2011	3:11:45 PM	Bubbler valve closed
11/14/2011	3:11:45 PM	Main Vac valve opened
11/14/2011	3:11:45 PM	Helium MFC set to  0.000000
11/14/2011	3:11:45 PM	H2 MFC set to  0.000000
11/14/2011	3:11:45 PM	BCl3 MFC set to  0.000000
11/14/2011	3:11:45 PM	PHl3 MFC set to  0.000000
11/14/2011	3:11:45 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:11:45 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:11:45 PM	Tube furnace set to 150
11/14/2011	3:12:15 PM	H2 valve closed
11/14/2011	3:12:15 PM	BCl3 valve closed
11/14/2011	3:12:15 PM	PH3 valve closed
11/14/2011	3:12:15 PM	SiCl4 pre valve closed
11/14/2011	3:12:15 PM	SiCl4 post valve closed
11/14/2011	3:12:15 PM	Bypass valve closed
11/14/2011	3:12:15 PM	Bubbler valve closed
11/14/2011	3:12:15 PM	Helium valve opened
11/14/2011	3:12:15 PM	Main Vac valve opened
11/14/2011	3:12:15 PM	Helium MFC set to  20.000000
11/14/2011	3:12:15 PM	H2 MFC set to  0.000000
11/14/2011	3:12:15 PM	BCl3 MFC set to  0.000000
11/14/2011	3:12:15 PM	PHl3 MFC set to  0.000000
11/14/2011	3:12:15 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:12:15 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:12:15 PM	Tube furnace set to 150
11/14/2011	3:12:45 PM	Helium valve closed
11/14/2011	3:12:45 PM	H2 valve closed
11/14/2011	3:12:45 PM	BCl3 valve closed
11/14/2011	3:12:45 PM	PH3 valve closed
11/14/2011	3:12:45 PM	SiCl4 pre valve closed
11/14/2011	3:12:45 PM	SiCl4 post valve closed
11/14/2011	3:12:45 PM	Bypass valve closed
11/14/2011	3:12:45 PM	Bubbler valve closed
11/14/2011	3:12:45 PM	Main Vac valve opened
11/14/2011	3:12:45 PM	Helium MFC set to  0.000000
11/14/2011	3:12:45 PM	H2 MFC set to  0.000000
11/14/2011	3:12:45 PM	BCl3 MFC set to  0.000000
11/14/2011	3:12:45 PM	PHl3 MFC set to  0.000000
11/14/2011	3:12:45 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:12:45 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:12:45 PM	Tube furnace set to 150
11/14/2011	3:13:15 PM	H2 valve closed
11/14/2011	3:13:15 PM	BCl3 valve closed
11/14/2011	3:13:15 PM	PH3 valve closed
11/14/2011	3:13:15 PM	SiCl4 pre valve closed
11/14/2011	3:13:15 PM	SiCl4 post valve closed
11/14/2011	3:13:15 PM	Bypass valve closed
11/14/2011	3:13:15 PM	Bubbler valve closed
11/14/2011	3:13:15 PM	Helium valve opened
11/14/2011	3:13:15 PM	Main Vac valve opened
11/14/2011	3:13:15 PM	Helium MFC set to  20.000000
11/14/2011	3:13:15 PM	H2 MFC set to  0.000000
11/14/2011	3:13:15 PM	BCl3 MFC set to  0.000000
11/14/2011	3:13:15 PM	PHl3 MFC set to  0.000000
11/14/2011	3:13:15 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:13:15 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:13:15 PM	Tube furnace set to 150
11/14/2011	3:13:45 PM	Helium valve closed
11/14/2011	3:13:45 PM	H2 valve closed
11/14/2011	3:13:45 PM	BCl3 valve closed
11/14/2011	3:13:45 PM	PH3 valve closed
11/14/2011	3:13:45 PM	SiCl4 pre valve closed
11/14/2011	3:13:45 PM	SiCl4 post valve closed
11/14/2011	3:13:45 PM	Bypass valve closed
11/14/2011	3:13:45 PM	Bubbler valve closed
11/14/2011	3:13:45 PM	Main Vac valve opened
11/14/2011	3:13:45 PM	Helium MFC set to  0.000000
11/14/2011	3:13:45 PM	H2 MFC set to  0.000000
11/14/2011	3:13:45 PM	BCl3 MFC set to  0.000000
11/14/2011	3:13:45 PM	PHl3 MFC set to  0.000000
11/14/2011	3:13:45 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:13:45 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:13:46 PM	Tube furnace set to 150
11/14/2011	3:14:16 PM	H2 valve closed
11/14/2011	3:14:16 PM	BCl3 valve closed
11/14/2011	3:14:16 PM	PH3 valve closed
11/14/2011	3:14:16 PM	SiCl4 pre valve closed
11/14/2011	3:14:16 PM	SiCl4 post valve closed
11/14/2011	3:14:16 PM	Bypass valve closed
11/14/2011	3:14:16 PM	Bubbler valve closed
11/14/2011	3:14:16 PM	Helium valve opened
11/14/2011	3:14:16 PM	Main Vac valve opened
11/14/2011	3:14:16 PM	Helium MFC set to  20.000000
11/14/2011	3:14:16 PM	H2 MFC set to  0.000000
11/14/2011	3:14:16 PM	BCl3 MFC set to  0.000000
11/14/2011	3:14:16 PM	PHl3 MFC set to  0.000000
11/14/2011	3:14:16 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:14:16 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:14:16 PM	Tube furnace set to 150
11/14/2011	3:14:46 PM	Helium valve closed
11/14/2011	3:14:46 PM	H2 valve closed
11/14/2011	3:14:46 PM	BCl3 valve closed
11/14/2011	3:14:46 PM	PH3 valve closed
11/14/2011	3:14:46 PM	SiCl4 pre valve closed
11/14/2011	3:14:46 PM	SiCl4 post valve closed
11/14/2011	3:14:46 PM	Bypass valve closed
11/14/2011	3:14:46 PM	Bubbler valve closed
11/14/2011	3:14:46 PM	Main Vac valve opened
11/14/2011	3:14:46 PM	Helium MFC set to  0.000000
11/14/2011	3:14:46 PM	H2 MFC set to  0.000000
11/14/2011	3:14:46 PM	BCl3 MFC set to  0.000000
11/14/2011	3:14:46 PM	PHl3 MFC set to  0.000000
11/14/2011	3:14:46 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:14:46 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:14:46 PM	Tube furnace set to 150
11/14/2011	3:15:16 PM	H2 valve closed
11/14/2011	3:15:16 PM	BCl3 valve closed
11/14/2011	3:15:16 PM	PH3 valve closed
11/14/2011	3:15:16 PM	SiCl4 pre valve closed
11/14/2011	3:15:16 PM	SiCl4 post valve closed
11/14/2011	3:15:16 PM	Bypass valve closed
11/14/2011	3:15:16 PM	Bubbler valve closed
11/14/2011	3:15:16 PM	Helium valve opened
11/14/2011	3:15:16 PM	Main Vac valve opened
11/14/2011	3:15:16 PM	Helium MFC set to  20.000000
11/14/2011	3:15:16 PM	H2 MFC set to  0.000000
11/14/2011	3:15:16 PM	BCl3 MFC set to  0.000000
11/14/2011	3:15:16 PM	PHl3 MFC set to  0.000000
11/14/2011	3:15:16 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:15:16 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:15:16 PM	Tube furnace set to 150
11/14/2011	3:15:46 PM	Helium valve closed
11/14/2011	3:15:46 PM	H2 valve closed
11/14/2011	3:15:46 PM	BCl3 valve closed
11/14/2011	3:15:46 PM	PH3 valve closed
11/14/2011	3:15:46 PM	SiCl4 pre valve closed
11/14/2011	3:15:46 PM	SiCl4 post valve closed
11/14/2011	3:15:46 PM	Bypass valve closed
11/14/2011	3:15:46 PM	Bubbler valve closed
11/14/2011	3:15:46 PM	Main Vac valve opened
11/14/2011	3:15:46 PM	Helium MFC set to  0.000000
11/14/2011	3:15:46 PM	H2 MFC set to  0.000000
11/14/2011	3:15:46 PM	BCl3 MFC set to  0.000000
11/14/2011	3:15:46 PM	PHl3 MFC set to  0.000000
11/14/2011	3:15:46 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:15:46 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:15:46 PM	Tube furnace set to 150
11/14/2011	3:16:16 PM	H2 valve closed
11/14/2011	3:16:16 PM	BCl3 valve closed
11/14/2011	3:16:16 PM	PH3 valve closed
11/14/2011	3:16:16 PM	SiCl4 pre valve closed
11/14/2011	3:16:16 PM	SiCl4 post valve closed
11/14/2011	3:16:16 PM	Bypass valve closed
11/14/2011	3:16:16 PM	Bubbler valve closed
11/14/2011	3:16:16 PM	Helium valve opened
11/14/2011	3:16:16 PM	Main Vac valve opened
11/14/2011	3:16:16 PM	Helium MFC set to  20.000000
11/14/2011	3:16:16 PM	H2 MFC set to  0.000000
11/14/2011	3:16:16 PM	BCl3 MFC set to  0.000000
11/14/2011	3:16:16 PM	PHl3 MFC set to  0.000000
11/14/2011	3:16:16 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:16:16 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:16:17 PM	Tube furnace set to 150
11/14/2011	3:16:47 PM	Helium valve closed
11/14/2011	3:16:47 PM	H2 valve closed
11/14/2011	3:16:47 PM	BCl3 valve closed
11/14/2011	3:16:47 PM	PH3 valve closed
11/14/2011	3:16:47 PM	SiCl4 pre valve closed
11/14/2011	3:16:47 PM	SiCl4 post valve closed
11/14/2011	3:16:47 PM	Bypass valve closed
11/14/2011	3:16:47 PM	Bubbler valve closed
11/14/2011	3:16:47 PM	Main Vac valve opened
11/14/2011	3:16:47 PM	Helium MFC set to  0.000000
11/14/2011	3:16:47 PM	H2 MFC set to  0.000000
11/14/2011	3:16:47 PM	BCl3 MFC set to  0.000000
11/14/2011	3:16:47 PM	PHl3 MFC set to  0.000000
11/14/2011	3:16:47 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:16:47 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:16:47 PM	Tube furnace set to 150
11/14/2011	3:17:17 PM	H2 valve closed
11/14/2011	3:17:17 PM	BCl3 valve closed
11/14/2011	3:17:17 PM	PH3 valve closed
11/14/2011	3:17:17 PM	SiCl4 pre valve closed
11/14/2011	3:17:17 PM	SiCl4 post valve closed
11/14/2011	3:17:17 PM	Bypass valve closed
11/14/2011	3:17:17 PM	Bubbler valve closed
11/14/2011	3:17:17 PM	Helium valve opened
11/14/2011	3:17:17 PM	Main Vac valve opened
11/14/2011	3:17:17 PM	Helium MFC set to  20.000000
11/14/2011	3:17:17 PM	H2 MFC set to  0.000000
11/14/2011	3:17:17 PM	BCl3 MFC set to  0.000000
11/14/2011	3:17:17 PM	PHl3 MFC set to  0.000000
11/14/2011	3:17:17 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:17:17 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:17:17 PM	Tube furnace set to 150
11/14/2011	3:17:47 PM	Helium valve closed
11/14/2011	3:17:47 PM	H2 valve closed
11/14/2011	3:17:47 PM	BCl3 valve closed
11/14/2011	3:17:47 PM	PH3 valve closed
11/14/2011	3:17:47 PM	SiCl4 pre valve closed
11/14/2011	3:17:47 PM	SiCl4 post valve closed
11/14/2011	3:17:47 PM	Bypass valve closed
11/14/2011	3:17:47 PM	Bubbler valve closed
11/14/2011	3:17:47 PM	Main Vac valve opened
11/14/2011	3:17:47 PM	Helium MFC set to  0.000000
11/14/2011	3:17:47 PM	H2 MFC set to  0.000000
11/14/2011	3:17:47 PM	BCl3 MFC set to  0.000000
11/14/2011	3:17:47 PM	PHl3 MFC set to  0.000000
11/14/2011	3:17:47 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:17:47 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:17:47 PM	Tube furnace set to 150
11/14/2011	3:18:17 PM	H2 valve closed
11/14/2011	3:18:17 PM	BCl3 valve closed
11/14/2011	3:18:17 PM	PH3 valve closed
11/14/2011	3:18:17 PM	SiCl4 pre valve closed
11/14/2011	3:18:17 PM	SiCl4 post valve closed
11/14/2011	3:18:17 PM	Bypass valve closed
11/14/2011	3:18:17 PM	Bubbler valve closed
11/14/2011	3:18:17 PM	Helium valve opened
11/14/2011	3:18:17 PM	Main Vac valve opened
11/14/2011	3:18:17 PM	Helium MFC set to  20.000000
11/14/2011	3:18:17 PM	H2 MFC set to  0.000000
11/14/2011	3:18:17 PM	BCl3 MFC set to  0.000000
11/14/2011	3:18:17 PM	PHl3 MFC set to  0.000000
11/14/2011	3:18:17 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:18:17 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:18:17 PM	Tube furnace set to 150
11/14/2011	3:18:47 PM	Helium valve closed
11/14/2011	3:18:47 PM	H2 valve closed
11/14/2011	3:18:47 PM	BCl3 valve closed
11/14/2011	3:18:47 PM	PH3 valve closed
11/14/2011	3:18:47 PM	SiCl4 pre valve closed
11/14/2011	3:18:47 PM	SiCl4 post valve closed
11/14/2011	3:18:47 PM	Bypass valve closed
11/14/2011	3:18:47 PM	Bubbler valve closed
11/14/2011	3:18:47 PM	Main Vac valve opened
11/14/2011	3:18:47 PM	Helium MFC set to  0.000000
11/14/2011	3:18:47 PM	H2 MFC set to  0.000000
11/14/2011	3:18:47 PM	BCl3 MFC set to  0.000000
11/14/2011	3:18:47 PM	PHl3 MFC set to  0.000000
11/14/2011	3:18:47 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:18:47 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:18:48 PM	Tube furnace set to 150
11/14/2011	3:19:18 PM	H2 valve closed
11/14/2011	3:19:18 PM	BCl3 valve closed
11/14/2011	3:19:18 PM	PH3 valve closed
11/14/2011	3:19:18 PM	SiCl4 pre valve closed
11/14/2011	3:19:18 PM	SiCl4 post valve closed
11/14/2011	3:19:18 PM	Bypass valve closed
11/14/2011	3:19:18 PM	Bubbler valve closed
11/14/2011	3:19:18 PM	Helium valve opened
11/14/2011	3:19:18 PM	Main Vac valve opened
11/14/2011	3:19:18 PM	Helium MFC set to  20.000000
11/14/2011	3:19:18 PM	H2 MFC set to  0.000000
11/14/2011	3:19:18 PM	BCl3 MFC set to  0.000000
11/14/2011	3:19:18 PM	PHl3 MFC set to  0.000000
11/14/2011	3:19:18 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:19:18 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:19:18 PM	Tube furnace set to 150
11/14/2011	3:19:48 PM	Helium valve closed
11/14/2011	3:19:48 PM	H2 valve closed
11/14/2011	3:19:48 PM	BCl3 valve closed
11/14/2011	3:19:48 PM	PH3 valve closed
11/14/2011	3:19:48 PM	SiCl4 pre valve closed
11/14/2011	3:19:48 PM	SiCl4 post valve closed
11/14/2011	3:19:48 PM	Bypass valve closed
11/14/2011	3:19:48 PM	Bubbler valve closed
11/14/2011	3:19:48 PM	Main Vac valve opened
11/14/2011	3:19:48 PM	Helium MFC set to  0.000000
11/14/2011	3:19:48 PM	H2 MFC set to  0.000000
11/14/2011	3:19:48 PM	BCl3 MFC set to  0.000000
11/14/2011	3:19:48 PM	PHl3 MFC set to  0.000000
11/14/2011	3:19:48 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:19:48 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:19:48 PM	Tube furnace set to 150
11/14/2011	3:20:18 PM	H2 valve closed
11/14/2011	3:20:18 PM	BCl3 valve closed
11/14/2011	3:20:18 PM	PH3 valve closed
11/14/2011	3:20:18 PM	SiCl4 pre valve closed
11/14/2011	3:20:18 PM	SiCl4 post valve closed
11/14/2011	3:20:18 PM	Bypass valve closed
11/14/2011	3:20:18 PM	Bubbler valve closed
11/14/2011	3:20:18 PM	Helium valve opened
11/14/2011	3:20:18 PM	Main Vac valve opened
11/14/2011	3:20:18 PM	Helium MFC set to  20.000000
11/14/2011	3:20:18 PM	H2 MFC set to  0.000000
11/14/2011	3:20:18 PM	BCl3 MFC set to  0.000000
11/14/2011	3:20:18 PM	PHl3 MFC set to  0.000000
11/14/2011	3:20:18 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:20:18 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:20:18 PM	Tube furnace set to 150
11/14/2011	3:20:48 PM	Helium valve closed
11/14/2011	3:20:48 PM	H2 valve closed
11/14/2011	3:20:48 PM	BCl3 valve closed
11/14/2011	3:20:48 PM	PH3 valve closed
11/14/2011	3:20:48 PM	SiCl4 pre valve closed
11/14/2011	3:20:48 PM	SiCl4 post valve closed
11/14/2011	3:20:48 PM	Bypass valve closed
11/14/2011	3:20:48 PM	Bubbler valve closed
11/14/2011	3:20:48 PM	Main Vac valve opened
11/14/2011	3:20:48 PM	Helium MFC set to  0.000000
11/14/2011	3:20:48 PM	H2 MFC set to  0.000000
11/14/2011	3:20:48 PM	BCl3 MFC set to  0.000000
11/14/2011	3:20:48 PM	PHl3 MFC set to  0.000000
11/14/2011	3:20:48 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:20:48 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:20:48 PM	Tube furnace set to 150
11/14/2011	3:21:18 PM	H2 valve closed
11/14/2011	3:21:18 PM	BCl3 valve closed
11/14/2011	3:21:18 PM	PH3 valve closed
11/14/2011	3:21:18 PM	SiCl4 pre valve closed
11/14/2011	3:21:18 PM	SiCl4 post valve closed
11/14/2011	3:21:18 PM	Bypass valve closed
11/14/2011	3:21:18 PM	Bubbler valve closed
11/14/2011	3:21:18 PM	Helium valve opened
11/14/2011	3:21:18 PM	Main Vac valve opened
11/14/2011	3:21:18 PM	Helium MFC set to  20.000000
11/14/2011	3:21:18 PM	H2 MFC set to  0.000000
11/14/2011	3:21:18 PM	BCl3 MFC set to  0.000000
11/14/2011	3:21:18 PM	PHl3 MFC set to  0.000000
11/14/2011	3:21:18 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:21:18 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:21:19 PM	Tube furnace set to 150
11/14/2011	3:21:49 PM	Helium valve closed
11/14/2011	3:21:49 PM	H2 valve closed
11/14/2011	3:21:49 PM	BCl3 valve closed
11/14/2011	3:21:49 PM	PH3 valve closed
11/14/2011	3:21:49 PM	SiCl4 pre valve closed
11/14/2011	3:21:49 PM	SiCl4 post valve closed
11/14/2011	3:21:49 PM	Bypass valve closed
11/14/2011	3:21:49 PM	Bubbler valve closed
11/14/2011	3:21:49 PM	Main Vac valve opened
11/14/2011	3:21:49 PM	Helium MFC set to  0.000000
11/14/2011	3:21:49 PM	H2 MFC set to  0.000000
11/14/2011	3:21:49 PM	BCl3 MFC set to  0.000000
11/14/2011	3:21:49 PM	PHl3 MFC set to  0.000000
11/14/2011	3:21:49 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:21:49 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:21:49 PM	Tube furnace set to 150
11/14/2011	3:21:50 PM	Run finished at 3:21 PM
11/14/2011	3:22:30 PM	Recipe started at 3:22 PM
11/14/2011	3:22:30 PM	Helium valve closed
11/14/2011	3:22:30 PM	H2 valve closed
11/14/2011	3:22:30 PM	BCl3 valve closed
11/14/2011	3:22:30 PM	PH3 valve closed
11/14/2011	3:22:30 PM	SiCl4 pre valve closed
11/14/2011	3:22:30 PM	SiCl4 post valve closed
11/14/2011	3:22:30 PM	Bypass valve closed
11/14/2011	3:22:30 PM	Bubbler valve closed
11/14/2011	3:22:30 PM	Main Vac valve opened
11/14/2011	3:22:30 PM	Helium MFC set to  0.000000
11/14/2011	3:22:30 PM	H2 MFC set to  0.000000
11/14/2011	3:22:30 PM	BCl3 MFC set to  0.000000
11/14/2011	3:22:30 PM	PHl3 MFC set to  0.000000
11/14/2011	3:22:30 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:22:30 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:22:30 PM	Tube furnace set to 150
11/14/2011	3:23:00 PM	H2 valve closed
11/14/2011	3:23:00 PM	BCl3 valve closed
11/14/2011	3:23:00 PM	PH3 valve closed
11/14/2011	3:23:00 PM	SiCl4 pre valve closed
11/14/2011	3:23:00 PM	SiCl4 post valve closed
11/14/2011	3:23:00 PM	Bypass valve closed
11/14/2011	3:23:00 PM	Bubbler valve closed
11/14/2011	3:23:00 PM	Helium valve opened
11/14/2011	3:23:00 PM	Main Vac valve opened
11/14/2011	3:23:00 PM	Helium MFC set to  20.000000
11/14/2011	3:23:00 PM	H2 MFC set to  0.000000
11/14/2011	3:23:00 PM	BCl3 MFC set to  0.000000
11/14/2011	3:23:00 PM	PHl3 MFC set to  0.000000
11/14/2011	3:23:00 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:23:00 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:23:00 PM	Tube furnace set to 150
11/14/2011	3:23:30 PM	Helium valve closed
11/14/2011	3:23:30 PM	H2 valve closed
11/14/2011	3:23:30 PM	BCl3 valve closed
11/14/2011	3:23:30 PM	PH3 valve closed
11/14/2011	3:23:30 PM	SiCl4 pre valve closed
11/14/2011	3:23:30 PM	SiCl4 post valve closed
11/14/2011	3:23:30 PM	Bypass valve closed
11/14/2011	3:23:30 PM	Bubbler valve closed
11/14/2011	3:23:30 PM	Main Vac valve opened
11/14/2011	3:23:30 PM	Helium MFC set to  0.000000
11/14/2011	3:23:30 PM	H2 MFC set to  0.000000
11/14/2011	3:23:30 PM	BCl3 MFC set to  0.000000
11/14/2011	3:23:30 PM	PHl3 MFC set to  0.000000
11/14/2011	3:23:30 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:23:30 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:23:30 PM	Tube furnace set to 150
11/14/2011	3:24:00 PM	H2 valve closed
11/14/2011	3:24:00 PM	BCl3 valve closed
11/14/2011	3:24:00 PM	PH3 valve closed
11/14/2011	3:24:00 PM	SiCl4 pre valve closed
11/14/2011	3:24:00 PM	SiCl4 post valve closed
11/14/2011	3:24:00 PM	Bypass valve closed
11/14/2011	3:24:00 PM	Bubbler valve closed
11/14/2011	3:24:00 PM	Helium valve opened
11/14/2011	3:24:00 PM	Main Vac valve opened
11/14/2011	3:24:00 PM	Helium MFC set to  20.000000
11/14/2011	3:24:00 PM	H2 MFC set to  0.000000
11/14/2011	3:24:00 PM	BCl3 MFC set to  0.000000
11/14/2011	3:24:00 PM	PHl3 MFC set to  0.000000
11/14/2011	3:24:00 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:24:00 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:24:01 PM	Tube furnace set to 150
11/14/2011	3:24:31 PM	Helium valve closed
11/14/2011	3:24:31 PM	H2 valve closed
11/14/2011	3:24:31 PM	BCl3 valve closed
11/14/2011	3:24:31 PM	PH3 valve closed
11/14/2011	3:24:31 PM	SiCl4 pre valve closed
11/14/2011	3:24:31 PM	SiCl4 post valve closed
11/14/2011	3:24:31 PM	Bypass valve closed
11/14/2011	3:24:31 PM	Bubbler valve closed
11/14/2011	3:24:31 PM	Main Vac valve opened
11/14/2011	3:24:31 PM	Helium MFC set to  0.000000
11/14/2011	3:24:31 PM	H2 MFC set to  0.000000
11/14/2011	3:24:31 PM	BCl3 MFC set to  0.000000
11/14/2011	3:24:31 PM	PHl3 MFC set to  0.000000
11/14/2011	3:24:31 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:24:31 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:24:31 PM	Tube furnace set to 150
11/14/2011	3:25:01 PM	H2 valve closed
11/14/2011	3:25:01 PM	BCl3 valve closed
11/14/2011	3:25:01 PM	PH3 valve closed
11/14/2011	3:25:01 PM	SiCl4 pre valve closed
11/14/2011	3:25:01 PM	SiCl4 post valve closed
11/14/2011	3:25:01 PM	Bypass valve closed
11/14/2011	3:25:01 PM	Bubbler valve closed
11/14/2011	3:25:01 PM	Helium valve opened
11/14/2011	3:25:01 PM	Main Vac valve opened
11/14/2011	3:25:01 PM	Helium MFC set to  20.000000
11/14/2011	3:25:01 PM	H2 MFC set to  0.000000
11/14/2011	3:25:01 PM	BCl3 MFC set to  0.000000
11/14/2011	3:25:01 PM	PHl3 MFC set to  0.000000
11/14/2011	3:25:01 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:25:01 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:25:01 PM	Tube furnace set to 150
11/14/2011	3:25:31 PM	Helium valve closed
11/14/2011	3:25:31 PM	H2 valve closed
11/14/2011	3:25:31 PM	BCl3 valve closed
11/14/2011	3:25:31 PM	PH3 valve closed
11/14/2011	3:25:31 PM	SiCl4 pre valve closed
11/14/2011	3:25:31 PM	SiCl4 post valve closed
11/14/2011	3:25:31 PM	Bypass valve closed
11/14/2011	3:25:31 PM	Bubbler valve closed
11/14/2011	3:25:31 PM	Main Vac valve opened
11/14/2011	3:25:31 PM	Helium MFC set to  0.000000
11/14/2011	3:25:31 PM	H2 MFC set to  0.000000
11/14/2011	3:25:31 PM	BCl3 MFC set to  0.000000
11/14/2011	3:25:31 PM	PHl3 MFC set to  0.000000
11/14/2011	3:25:31 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:25:31 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:25:31 PM	Tube furnace set to 150
11/14/2011	3:26:01 PM	H2 valve closed
11/14/2011	3:26:01 PM	BCl3 valve closed
11/14/2011	3:26:01 PM	PH3 valve closed
11/14/2011	3:26:01 PM	SiCl4 pre valve closed
11/14/2011	3:26:01 PM	SiCl4 post valve closed
11/14/2011	3:26:01 PM	Bypass valve closed
11/14/2011	3:26:01 PM	Bubbler valve closed
11/14/2011	3:26:01 PM	Helium valve opened
11/14/2011	3:26:01 PM	Main Vac valve opened
11/14/2011	3:26:01 PM	Helium MFC set to  20.000000
11/14/2011	3:26:01 PM	H2 MFC set to  0.000000
11/14/2011	3:26:01 PM	BCl3 MFC set to  0.000000
11/14/2011	3:26:01 PM	PHl3 MFC set to  0.000000
11/14/2011	3:26:01 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:26:01 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:26:01 PM	Tube furnace set to 150
11/14/2011	3:26:32 PM	Helium valve closed
11/14/2011	3:26:32 PM	H2 valve closed
11/14/2011	3:26:32 PM	BCl3 valve closed
11/14/2011	3:26:32 PM	PH3 valve closed
11/14/2011	3:26:32 PM	SiCl4 pre valve closed
11/14/2011	3:26:32 PM	SiCl4 post valve closed
11/14/2011	3:26:32 PM	Bypass valve closed
11/14/2011	3:26:32 PM	Bubbler valve closed
11/14/2011	3:26:32 PM	Main Vac valve opened
11/14/2011	3:26:32 PM	Helium MFC set to  0.000000
11/14/2011	3:26:32 PM	H2 MFC set to  0.000000
11/14/2011	3:26:32 PM	BCl3 MFC set to  0.000000
11/14/2011	3:26:32 PM	PHl3 MFC set to  0.000000
11/14/2011	3:26:32 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:26:32 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:26:32 PM	Tube furnace set to 150
11/14/2011	3:27:02 PM	H2 valve closed
11/14/2011	3:27:02 PM	BCl3 valve closed
11/14/2011	3:27:02 PM	PH3 valve closed
11/14/2011	3:27:02 PM	SiCl4 pre valve closed
11/14/2011	3:27:02 PM	SiCl4 post valve closed
11/14/2011	3:27:02 PM	Bypass valve closed
11/14/2011	3:27:02 PM	Bubbler valve closed
11/14/2011	3:27:02 PM	Helium valve opened
11/14/2011	3:27:02 PM	Main Vac valve opened
11/14/2011	3:27:02 PM	Helium MFC set to  20.000000
11/14/2011	3:27:02 PM	H2 MFC set to  0.000000
11/14/2011	3:27:02 PM	BCl3 MFC set to  0.000000
11/14/2011	3:27:02 PM	PHl3 MFC set to  0.000000
11/14/2011	3:27:02 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:27:02 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:27:02 PM	Tube furnace set to 150
11/14/2011	3:27:32 PM	Helium valve closed
11/14/2011	3:27:32 PM	H2 valve closed
11/14/2011	3:27:32 PM	BCl3 valve closed
11/14/2011	3:27:32 PM	PH3 valve closed
11/14/2011	3:27:32 PM	SiCl4 pre valve closed
11/14/2011	3:27:32 PM	SiCl4 post valve closed
11/14/2011	3:27:32 PM	Bypass valve closed
11/14/2011	3:27:32 PM	Bubbler valve closed
11/14/2011	3:27:32 PM	Main Vac valve opened
11/14/2011	3:27:32 PM	Helium MFC set to  0.000000
11/14/2011	3:27:32 PM	H2 MFC set to  0.000000
11/14/2011	3:27:32 PM	BCl3 MFC set to  0.000000
11/14/2011	3:27:32 PM	PHl3 MFC set to  0.000000
11/14/2011	3:27:32 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:27:32 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:27:32 PM	Tube furnace set to 150
11/14/2011	3:28:02 PM	H2 valve closed
11/14/2011	3:28:02 PM	BCl3 valve closed
11/14/2011	3:28:02 PM	PH3 valve closed
11/14/2011	3:28:02 PM	SiCl4 pre valve closed
11/14/2011	3:28:02 PM	SiCl4 post valve closed
11/14/2011	3:28:02 PM	Bypass valve closed
11/14/2011	3:28:02 PM	Bubbler valve closed
11/14/2011	3:28:02 PM	Helium valve opened
11/14/2011	3:28:02 PM	Main Vac valve opened
11/14/2011	3:28:02 PM	Helium MFC set to  20.000000
11/14/2011	3:28:02 PM	H2 MFC set to  0.000000
11/14/2011	3:28:02 PM	BCl3 MFC set to  0.000000
11/14/2011	3:28:02 PM	PHl3 MFC set to  0.000000
11/14/2011	3:28:02 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:28:02 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:28:02 PM	Tube furnace set to 150
11/14/2011	3:28:32 PM	Helium valve closed
11/14/2011	3:28:32 PM	H2 valve closed
11/14/2011	3:28:32 PM	BCl3 valve closed
11/14/2011	3:28:32 PM	PH3 valve closed
11/14/2011	3:28:32 PM	SiCl4 pre valve closed
11/14/2011	3:28:32 PM	SiCl4 post valve closed
11/14/2011	3:28:32 PM	Bypass valve closed
11/14/2011	3:28:32 PM	Bubbler valve closed
11/14/2011	3:28:32 PM	Main Vac valve opened
11/14/2011	3:28:32 PM	Helium MFC set to  0.000000
11/14/2011	3:28:32 PM	H2 MFC set to  0.000000
11/14/2011	3:28:32 PM	BCl3 MFC set to  0.000000
11/14/2011	3:28:32 PM	PHl3 MFC set to  0.000000
11/14/2011	3:28:32 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:28:32 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:28:33 PM	Tube furnace set to 150
11/14/2011	3:29:03 PM	H2 valve closed
11/14/2011	3:29:03 PM	BCl3 valve closed
11/14/2011	3:29:03 PM	PH3 valve closed
11/14/2011	3:29:03 PM	SiCl4 pre valve closed
11/14/2011	3:29:03 PM	SiCl4 post valve closed
11/14/2011	3:29:03 PM	Bypass valve closed
11/14/2011	3:29:03 PM	Bubbler valve closed
11/14/2011	3:29:03 PM	Helium valve opened
11/14/2011	3:29:03 PM	Main Vac valve opened
11/14/2011	3:29:03 PM	Helium MFC set to  20.000000
11/14/2011	3:29:03 PM	H2 MFC set to  0.000000
11/14/2011	3:29:03 PM	BCl3 MFC set to  0.000000
11/14/2011	3:29:03 PM	PHl3 MFC set to  0.000000
11/14/2011	3:29:03 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:29:03 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:29:03 PM	Tube furnace set to 150
11/14/2011	3:29:33 PM	Helium valve closed
11/14/2011	3:29:33 PM	H2 valve closed
11/14/2011	3:29:33 PM	BCl3 valve closed
11/14/2011	3:29:33 PM	PH3 valve closed
11/14/2011	3:29:33 PM	SiCl4 pre valve closed
11/14/2011	3:29:33 PM	SiCl4 post valve closed
11/14/2011	3:29:33 PM	Bypass valve closed
11/14/2011	3:29:33 PM	Bubbler valve closed
11/14/2011	3:29:33 PM	Main Vac valve opened
11/14/2011	3:29:33 PM	Helium MFC set to  0.000000
11/14/2011	3:29:33 PM	H2 MFC set to  0.000000
11/14/2011	3:29:33 PM	BCl3 MFC set to  0.000000
11/14/2011	3:29:33 PM	PHl3 MFC set to  0.000000
11/14/2011	3:29:33 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:29:33 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:29:33 PM	Tube furnace set to 150
11/14/2011	3:30:03 PM	H2 valve closed
11/14/2011	3:30:03 PM	BCl3 valve closed
11/14/2011	3:30:03 PM	PH3 valve closed
11/14/2011	3:30:03 PM	SiCl4 pre valve closed
11/14/2011	3:30:03 PM	SiCl4 post valve closed
11/14/2011	3:30:03 PM	Bypass valve closed
11/14/2011	3:30:03 PM	Bubbler valve closed
11/14/2011	3:30:03 PM	Helium valve opened
11/14/2011	3:30:03 PM	Main Vac valve opened
11/14/2011	3:30:03 PM	Helium MFC set to  20.000000
11/14/2011	3:30:03 PM	H2 MFC set to  0.000000
11/14/2011	3:30:03 PM	BCl3 MFC set to  0.000000
11/14/2011	3:30:03 PM	PHl3 MFC set to  0.000000
11/14/2011	3:30:03 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:30:03 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:30:03 PM	Tube furnace set to 150
11/14/2011	3:30:33 PM	Helium valve closed
11/14/2011	3:30:33 PM	H2 valve closed
11/14/2011	3:30:33 PM	BCl3 valve closed
11/14/2011	3:30:33 PM	PH3 valve closed
11/14/2011	3:30:33 PM	SiCl4 pre valve closed
11/14/2011	3:30:33 PM	SiCl4 post valve closed
11/14/2011	3:30:33 PM	Bypass valve closed
11/14/2011	3:30:33 PM	Bubbler valve closed
11/14/2011	3:30:33 PM	Main Vac valve opened
11/14/2011	3:30:33 PM	Helium MFC set to  0.000000
11/14/2011	3:30:33 PM	H2 MFC set to  0.000000
11/14/2011	3:30:33 PM	BCl3 MFC set to  0.000000
11/14/2011	3:30:33 PM	PHl3 MFC set to  0.000000
11/14/2011	3:30:33 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:30:33 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:30:33 PM	Tube furnace set to 150
11/14/2011	3:31:03 PM	H2 valve closed
11/14/2011	3:31:03 PM	BCl3 valve closed
11/14/2011	3:31:03 PM	PH3 valve closed
11/14/2011	3:31:03 PM	SiCl4 pre valve closed
11/14/2011	3:31:03 PM	SiCl4 post valve closed
11/14/2011	3:31:03 PM	Bypass valve closed
11/14/2011	3:31:03 PM	Bubbler valve closed
11/14/2011	3:31:03 PM	Helium valve opened
11/14/2011	3:31:03 PM	Main Vac valve opened
11/14/2011	3:31:03 PM	Helium MFC set to  20.000000
11/14/2011	3:31:03 PM	H2 MFC set to  0.000000
11/14/2011	3:31:03 PM	BCl3 MFC set to  0.000000
11/14/2011	3:31:03 PM	PHl3 MFC set to  0.000000
11/14/2011	3:31:03 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:31:03 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:31:04 PM	Tube furnace set to 150
11/14/2011	3:31:34 PM	Helium valve closed
11/14/2011	3:31:34 PM	H2 valve closed
11/14/2011	3:31:34 PM	BCl3 valve closed
11/14/2011	3:31:34 PM	PH3 valve closed
11/14/2011	3:31:34 PM	SiCl4 pre valve closed
11/14/2011	3:31:34 PM	SiCl4 post valve closed
11/14/2011	3:31:34 PM	Bypass valve closed
11/14/2011	3:31:34 PM	Bubbler valve closed
11/14/2011	3:31:34 PM	Main Vac valve opened
11/14/2011	3:31:34 PM	Helium MFC set to  0.000000
11/14/2011	3:31:34 PM	H2 MFC set to  0.000000
11/14/2011	3:31:34 PM	BCl3 MFC set to  0.000000
11/14/2011	3:31:34 PM	PHl3 MFC set to  0.000000
11/14/2011	3:31:34 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:31:34 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:31:34 PM	Tube furnace set to 150
11/14/2011	3:32:04 PM	H2 valve closed
11/14/2011	3:32:04 PM	BCl3 valve closed
11/14/2011	3:32:04 PM	PH3 valve closed
11/14/2011	3:32:04 PM	SiCl4 pre valve closed
11/14/2011	3:32:04 PM	SiCl4 post valve closed
11/14/2011	3:32:04 PM	Bypass valve closed
11/14/2011	3:32:04 PM	Bubbler valve closed
11/14/2011	3:32:04 PM	Helium valve opened
11/14/2011	3:32:04 PM	Main Vac valve opened
11/14/2011	3:32:04 PM	Helium MFC set to  20.000000
11/14/2011	3:32:04 PM	H2 MFC set to  0.000000
11/14/2011	3:32:04 PM	BCl3 MFC set to  0.000000
11/14/2011	3:32:04 PM	PHl3 MFC set to  0.000000
11/14/2011	3:32:04 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:32:04 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:32:04 PM	Tube furnace set to 150
11/14/2011	3:32:34 PM	Helium valve closed
11/14/2011	3:32:34 PM	H2 valve closed
11/14/2011	3:32:34 PM	BCl3 valve closed
11/14/2011	3:32:34 PM	PH3 valve closed
11/14/2011	3:32:34 PM	SiCl4 pre valve closed
11/14/2011	3:32:34 PM	SiCl4 post valve closed
11/14/2011	3:32:34 PM	Bypass valve closed
11/14/2011	3:32:34 PM	Bubbler valve closed
11/14/2011	3:32:34 PM	Main Vac valve opened
11/14/2011	3:32:34 PM	Helium MFC set to  0.000000
11/14/2011	3:32:34 PM	H2 MFC set to  0.000000
11/14/2011	3:32:34 PM	BCl3 MFC set to  0.000000
11/14/2011	3:32:34 PM	PHl3 MFC set to  0.000000
11/14/2011	3:32:34 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:32:34 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:32:34 PM	Tube furnace set to 150
11/14/2011	3:32:35 PM	Run finished at 3:32 PM
11/14/2011	3:34:50 PM	Recipe started at 3:34 PM
11/14/2011	3:34:50 PM	Helium valve closed
11/14/2011	3:34:50 PM	H2 valve closed
11/14/2011	3:34:50 PM	BCl3 valve closed
11/14/2011	3:34:50 PM	PH3 valve closed
11/14/2011	3:34:50 PM	SiCl4 pre valve closed
11/14/2011	3:34:50 PM	SiCl4 post valve closed
11/14/2011	3:34:50 PM	Bypass valve closed
11/14/2011	3:34:50 PM	Bubbler valve closed
11/14/2011	3:34:50 PM	Main Vac valve opened
11/14/2011	3:34:50 PM	Helium MFC set to  0.000000
11/14/2011	3:34:50 PM	H2 MFC set to  0.000000
11/14/2011	3:34:50 PM	BCl3 MFC set to  0.000000
11/14/2011	3:34:50 PM	PHl3 MFC set to  0.000000
11/14/2011	3:34:50 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:34:50 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:34:51 PM	Tube furnace set to 150
11/14/2011	3:35:21 PM	H2 valve closed
11/14/2011	3:35:21 PM	BCl3 valve closed
11/14/2011	3:35:21 PM	PH3 valve closed
11/14/2011	3:35:21 PM	SiCl4 pre valve closed
11/14/2011	3:35:21 PM	SiCl4 post valve closed
11/14/2011	3:35:21 PM	Bypass valve closed
11/14/2011	3:35:21 PM	Bubbler valve closed
11/14/2011	3:35:21 PM	Helium valve opened
11/14/2011	3:35:21 PM	Main Vac valve opened
11/14/2011	3:35:21 PM	Helium MFC set to  20.000000
11/14/2011	3:35:21 PM	H2 MFC set to  0.000000
11/14/2011	3:35:21 PM	BCl3 MFC set to  0.000000
11/14/2011	3:35:21 PM	PHl3 MFC set to  0.000000
11/14/2011	3:35:21 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:35:21 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:35:21 PM	Tube furnace set to 150
11/14/2011	3:35:51 PM	Helium valve closed
11/14/2011	3:35:51 PM	H2 valve closed
11/14/2011	3:35:51 PM	BCl3 valve closed
11/14/2011	3:35:51 PM	PH3 valve closed
11/14/2011	3:35:51 PM	SiCl4 pre valve closed
11/14/2011	3:35:51 PM	SiCl4 post valve closed
11/14/2011	3:35:51 PM	Bypass valve closed
11/14/2011	3:35:51 PM	Bubbler valve closed
11/14/2011	3:35:51 PM	Main Vac valve opened
11/14/2011	3:35:51 PM	Helium MFC set to  0.000000
11/14/2011	3:35:51 PM	H2 MFC set to  0.000000
11/14/2011	3:35:51 PM	BCl3 MFC set to  0.000000
11/14/2011	3:35:51 PM	PHl3 MFC set to  0.000000
11/14/2011	3:35:51 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:35:51 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:35:51 PM	Tube furnace set to 150
11/14/2011	3:36:21 PM	H2 valve closed
11/14/2011	3:36:21 PM	BCl3 valve closed
11/14/2011	3:36:21 PM	PH3 valve closed
11/14/2011	3:36:21 PM	SiCl4 pre valve closed
11/14/2011	3:36:21 PM	SiCl4 post valve closed
11/14/2011	3:36:21 PM	Bypass valve closed
11/14/2011	3:36:21 PM	Bubbler valve closed
11/14/2011	3:36:21 PM	Helium valve opened
11/14/2011	3:36:21 PM	Main Vac valve opened
11/14/2011	3:36:21 PM	Helium MFC set to  20.000000
11/14/2011	3:36:21 PM	H2 MFC set to  0.000000
11/14/2011	3:36:21 PM	BCl3 MFC set to  0.000000
11/14/2011	3:36:21 PM	PHl3 MFC set to  0.000000
11/14/2011	3:36:21 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:36:21 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:36:21 PM	Tube furnace set to 150
11/14/2011	3:36:51 PM	Helium valve closed
11/14/2011	3:36:51 PM	H2 valve closed
11/14/2011	3:36:51 PM	BCl3 valve closed
11/14/2011	3:36:51 PM	PH3 valve closed
11/14/2011	3:36:51 PM	SiCl4 pre valve closed
11/14/2011	3:36:51 PM	SiCl4 post valve closed
11/14/2011	3:36:51 PM	Bypass valve closed
11/14/2011	3:36:51 PM	Bubbler valve closed
11/14/2011	3:36:51 PM	Main Vac valve opened
11/14/2011	3:36:51 PM	Helium MFC set to  0.000000
11/14/2011	3:36:51 PM	H2 MFC set to  0.000000
11/14/2011	3:36:51 PM	BCl3 MFC set to  0.000000
11/14/2011	3:36:51 PM	PHl3 MFC set to  0.000000
11/14/2011	3:36:51 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:36:51 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:36:51 PM	Tube furnace set to 150
11/14/2011	3:37:21 PM	H2 valve closed
11/14/2011	3:37:21 PM	BCl3 valve closed
11/14/2011	3:37:21 PM	PH3 valve closed
11/14/2011	3:37:21 PM	SiCl4 pre valve closed
11/14/2011	3:37:21 PM	SiCl4 post valve closed
11/14/2011	3:37:21 PM	Bypass valve closed
11/14/2011	3:37:21 PM	Bubbler valve closed
11/14/2011	3:37:21 PM	Helium valve opened
11/14/2011	3:37:21 PM	Main Vac valve opened
11/14/2011	3:37:21 PM	Helium MFC set to  20.000000
11/14/2011	3:37:21 PM	H2 MFC set to  0.000000
11/14/2011	3:37:21 PM	BCl3 MFC set to  0.000000
11/14/2011	3:37:21 PM	PHl3 MFC set to  0.000000
11/14/2011	3:37:21 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:37:21 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:37:22 PM	Tube furnace set to 150
11/14/2011	3:37:52 PM	Helium valve closed
11/14/2011	3:37:52 PM	H2 valve closed
11/14/2011	3:37:52 PM	BCl3 valve closed
11/14/2011	3:37:52 PM	PH3 valve closed
11/14/2011	3:37:52 PM	SiCl4 pre valve closed
11/14/2011	3:37:52 PM	SiCl4 post valve closed
11/14/2011	3:37:52 PM	Bypass valve closed
11/14/2011	3:37:52 PM	Bubbler valve closed
11/14/2011	3:37:52 PM	Main Vac valve opened
11/14/2011	3:37:52 PM	Helium MFC set to  0.000000
11/14/2011	3:37:52 PM	H2 MFC set to  0.000000
11/14/2011	3:37:52 PM	BCl3 MFC set to  0.000000
11/14/2011	3:37:52 PM	PHl3 MFC set to  0.000000
11/14/2011	3:37:52 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:37:52 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:37:52 PM	Tube furnace set to 150
11/14/2011	3:38:22 PM	H2 valve closed
11/14/2011	3:38:22 PM	BCl3 valve closed
11/14/2011	3:38:22 PM	PH3 valve closed
11/14/2011	3:38:22 PM	SiCl4 pre valve closed
11/14/2011	3:38:22 PM	SiCl4 post valve closed
11/14/2011	3:38:22 PM	Bypass valve closed
11/14/2011	3:38:22 PM	Bubbler valve closed
11/14/2011	3:38:22 PM	Helium valve opened
11/14/2011	3:38:22 PM	Main Vac valve opened
11/14/2011	3:38:22 PM	Helium MFC set to  20.000000
11/14/2011	3:38:22 PM	H2 MFC set to  0.000000
11/14/2011	3:38:22 PM	BCl3 MFC set to  0.000000
11/14/2011	3:38:22 PM	PHl3 MFC set to  0.000000
11/14/2011	3:38:22 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:38:22 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:38:22 PM	Tube furnace set to 150
11/14/2011	3:38:52 PM	Helium valve closed
11/14/2011	3:38:52 PM	H2 valve closed
11/14/2011	3:38:52 PM	BCl3 valve closed
11/14/2011	3:38:52 PM	PH3 valve closed
11/14/2011	3:38:52 PM	SiCl4 pre valve closed
11/14/2011	3:38:52 PM	SiCl4 post valve closed
11/14/2011	3:38:52 PM	Bypass valve closed
11/14/2011	3:38:52 PM	Bubbler valve closed
11/14/2011	3:38:52 PM	Main Vac valve opened
11/14/2011	3:38:52 PM	Helium MFC set to  0.000000
11/14/2011	3:38:52 PM	H2 MFC set to  0.000000
11/14/2011	3:38:52 PM	BCl3 MFC set to  0.000000
11/14/2011	3:38:52 PM	PHl3 MFC set to  0.000000
11/14/2011	3:38:52 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:38:52 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:38:52 PM	Tube furnace set to 150
11/14/2011	3:39:22 PM	H2 valve closed
11/14/2011	3:39:22 PM	BCl3 valve closed
11/14/2011	3:39:22 PM	PH3 valve closed
11/14/2011	3:39:22 PM	SiCl4 pre valve closed
11/14/2011	3:39:22 PM	SiCl4 post valve closed
11/14/2011	3:39:22 PM	Bypass valve closed
11/14/2011	3:39:22 PM	Bubbler valve closed
11/14/2011	3:39:22 PM	Helium valve opened
11/14/2011	3:39:22 PM	Main Vac valve opened
11/14/2011	3:39:22 PM	Helium MFC set to  20.000000
11/14/2011	3:39:22 PM	H2 MFC set to  0.000000
11/14/2011	3:39:22 PM	BCl3 MFC set to  0.000000
11/14/2011	3:39:22 PM	PHl3 MFC set to  0.000000
11/14/2011	3:39:22 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:39:22 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:39:22 PM	Tube furnace set to 150
11/14/2011	3:39:52 PM	Helium valve closed
11/14/2011	3:39:52 PM	H2 valve closed
11/14/2011	3:39:52 PM	BCl3 valve closed
11/14/2011	3:39:52 PM	PH3 valve closed
11/14/2011	3:39:52 PM	SiCl4 pre valve closed
11/14/2011	3:39:52 PM	SiCl4 post valve closed
11/14/2011	3:39:52 PM	Bypass valve closed
11/14/2011	3:39:52 PM	Bubbler valve closed
11/14/2011	3:39:52 PM	Main Vac valve opened
11/14/2011	3:39:52 PM	Helium MFC set to  0.000000
11/14/2011	3:39:52 PM	H2 MFC set to  0.000000
11/14/2011	3:39:52 PM	BCl3 MFC set to  0.000000
11/14/2011	3:39:52 PM	PHl3 MFC set to  0.000000
11/14/2011	3:39:52 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:39:52 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:39:53 PM	Tube furnace set to 150
11/14/2011	3:40:23 PM	H2 valve closed
11/14/2011	3:40:23 PM	BCl3 valve closed
11/14/2011	3:40:23 PM	PH3 valve closed
11/14/2011	3:40:23 PM	SiCl4 pre valve closed
11/14/2011	3:40:23 PM	SiCl4 post valve closed
11/14/2011	3:40:23 PM	Bypass valve closed
11/14/2011	3:40:23 PM	Bubbler valve closed
11/14/2011	3:40:23 PM	Helium valve opened
11/14/2011	3:40:23 PM	Main Vac valve opened
11/14/2011	3:40:23 PM	Helium MFC set to  20.000000
11/14/2011	3:40:23 PM	H2 MFC set to  0.000000
11/14/2011	3:40:23 PM	BCl3 MFC set to  0.000000
11/14/2011	3:40:23 PM	PHl3 MFC set to  0.000000
11/14/2011	3:40:23 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:40:23 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:40:23 PM	Tube furnace set to 150
11/14/2011	3:40:53 PM	Helium valve closed
11/14/2011	3:40:53 PM	H2 valve closed
11/14/2011	3:40:53 PM	BCl3 valve closed
11/14/2011	3:40:53 PM	PH3 valve closed
11/14/2011	3:40:53 PM	SiCl4 pre valve closed
11/14/2011	3:40:53 PM	SiCl4 post valve closed
11/14/2011	3:40:53 PM	Bypass valve closed
11/14/2011	3:40:53 PM	Bubbler valve closed
11/14/2011	3:40:53 PM	Main Vac valve opened
11/14/2011	3:40:53 PM	Helium MFC set to  0.000000
11/14/2011	3:40:53 PM	H2 MFC set to  0.000000
11/14/2011	3:40:53 PM	BCl3 MFC set to  0.000000
11/14/2011	3:40:53 PM	PHl3 MFC set to  0.000000
11/14/2011	3:40:53 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:40:53 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:40:53 PM	Tube furnace set to 150
11/14/2011	3:41:23 PM	H2 valve closed
11/14/2011	3:41:23 PM	BCl3 valve closed
11/14/2011	3:41:23 PM	PH3 valve closed
11/14/2011	3:41:23 PM	SiCl4 pre valve closed
11/14/2011	3:41:23 PM	SiCl4 post valve closed
11/14/2011	3:41:23 PM	Bypass valve closed
11/14/2011	3:41:23 PM	Bubbler valve closed
11/14/2011	3:41:23 PM	Helium valve opened
11/14/2011	3:41:23 PM	Main Vac valve opened
11/14/2011	3:41:23 PM	Helium MFC set to  20.000000
11/14/2011	3:41:23 PM	H2 MFC set to  0.000000
11/14/2011	3:41:23 PM	BCl3 MFC set to  0.000000
11/14/2011	3:41:23 PM	PHl3 MFC set to  0.000000
11/14/2011	3:41:23 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:41:23 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:41:23 PM	Tube furnace set to 150
11/14/2011	3:41:53 PM	Helium valve closed
11/14/2011	3:41:53 PM	H2 valve closed
11/14/2011	3:41:53 PM	BCl3 valve closed
11/14/2011	3:41:53 PM	PH3 valve closed
11/14/2011	3:41:53 PM	SiCl4 pre valve closed
11/14/2011	3:41:53 PM	SiCl4 post valve closed
11/14/2011	3:41:53 PM	Bypass valve closed
11/14/2011	3:41:53 PM	Bubbler valve closed
11/14/2011	3:41:53 PM	Main Vac valve opened
11/14/2011	3:41:53 PM	Helium MFC set to  0.000000
11/14/2011	3:41:53 PM	H2 MFC set to  0.000000
11/14/2011	3:41:53 PM	BCl3 MFC set to  0.000000
11/14/2011	3:41:53 PM	PHl3 MFC set to  0.000000
11/14/2011	3:41:53 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:41:53 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:41:54 PM	Tube furnace set to 150
11/14/2011	3:42:24 PM	H2 valve closed
11/14/2011	3:42:24 PM	BCl3 valve closed
11/14/2011	3:42:24 PM	PH3 valve closed
11/14/2011	3:42:24 PM	SiCl4 pre valve closed
11/14/2011	3:42:24 PM	SiCl4 post valve closed
11/14/2011	3:42:24 PM	Bypass valve closed
11/14/2011	3:42:24 PM	Bubbler valve closed
11/14/2011	3:42:24 PM	Helium valve opened
11/14/2011	3:42:24 PM	Main Vac valve opened
11/14/2011	3:42:24 PM	Helium MFC set to  20.000000
11/14/2011	3:42:24 PM	H2 MFC set to  0.000000
11/14/2011	3:42:24 PM	BCl3 MFC set to  0.000000
11/14/2011	3:42:24 PM	PHl3 MFC set to  0.000000
11/14/2011	3:42:24 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:42:24 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:42:24 PM	Tube furnace set to 150
11/14/2011	3:42:54 PM	Helium valve closed
11/14/2011	3:42:54 PM	H2 valve closed
11/14/2011	3:42:54 PM	BCl3 valve closed
11/14/2011	3:42:54 PM	PH3 valve closed
11/14/2011	3:42:54 PM	SiCl4 pre valve closed
11/14/2011	3:42:54 PM	SiCl4 post valve closed
11/14/2011	3:42:54 PM	Bypass valve closed
11/14/2011	3:42:54 PM	Bubbler valve closed
11/14/2011	3:42:54 PM	Main Vac valve opened
11/14/2011	3:42:54 PM	Helium MFC set to  0.000000
11/14/2011	3:42:54 PM	H2 MFC set to  0.000000
11/14/2011	3:42:54 PM	BCl3 MFC set to  0.000000
11/14/2011	3:42:54 PM	PHl3 MFC set to  0.000000
11/14/2011	3:42:54 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:42:54 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:42:54 PM	Tube furnace set to 150
11/14/2011	3:43:24 PM	H2 valve closed
11/14/2011	3:43:24 PM	BCl3 valve closed
11/14/2011	3:43:24 PM	PH3 valve closed
11/14/2011	3:43:24 PM	SiCl4 pre valve closed
11/14/2011	3:43:24 PM	SiCl4 post valve closed
11/14/2011	3:43:24 PM	Bypass valve closed
11/14/2011	3:43:24 PM	Bubbler valve closed
11/14/2011	3:43:24 PM	Helium valve opened
11/14/2011	3:43:24 PM	Main Vac valve opened
11/14/2011	3:43:24 PM	Helium MFC set to  20.000000
11/14/2011	3:43:24 PM	H2 MFC set to  0.000000
11/14/2011	3:43:24 PM	BCl3 MFC set to  0.000000
11/14/2011	3:43:24 PM	PHl3 MFC set to  0.000000
11/14/2011	3:43:24 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:43:24 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:43:24 PM	Tube furnace set to 150
11/14/2011	3:43:54 PM	Helium valve closed
11/14/2011	3:43:54 PM	H2 valve closed
11/14/2011	3:43:54 PM	BCl3 valve closed
11/14/2011	3:43:54 PM	PH3 valve closed
11/14/2011	3:43:54 PM	SiCl4 pre valve closed
11/14/2011	3:43:54 PM	SiCl4 post valve closed
11/14/2011	3:43:54 PM	Bypass valve closed
11/14/2011	3:43:54 PM	Bubbler valve closed
11/14/2011	3:43:54 PM	Main Vac valve opened
11/14/2011	3:43:54 PM	Helium MFC set to  0.000000
11/14/2011	3:43:54 PM	H2 MFC set to  0.000000
11/14/2011	3:43:54 PM	BCl3 MFC set to  0.000000
11/14/2011	3:43:54 PM	PHl3 MFC set to  0.000000
11/14/2011	3:43:54 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:43:54 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:43:54 PM	Tube furnace set to 150
11/14/2011	3:44:24 PM	H2 valve closed
11/14/2011	3:44:24 PM	BCl3 valve closed
11/14/2011	3:44:24 PM	PH3 valve closed
11/14/2011	3:44:24 PM	SiCl4 pre valve closed
11/14/2011	3:44:24 PM	SiCl4 post valve closed
11/14/2011	3:44:24 PM	Bypass valve closed
11/14/2011	3:44:24 PM	Bubbler valve closed
11/14/2011	3:44:24 PM	Helium valve opened
11/14/2011	3:44:24 PM	Main Vac valve opened
11/14/2011	3:44:24 PM	Helium MFC set to  20.000000
11/14/2011	3:44:24 PM	H2 MFC set to  0.000000
11/14/2011	3:44:24 PM	BCl3 MFC set to  0.000000
11/14/2011	3:44:24 PM	PHl3 MFC set to  0.000000
11/14/2011	3:44:24 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:44:24 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:44:25 PM	Tube furnace set to 150
11/14/2011	3:44:55 PM	Helium valve closed
11/14/2011	3:44:55 PM	H2 valve closed
11/14/2011	3:44:55 PM	BCl3 valve closed
11/14/2011	3:44:55 PM	PH3 valve closed
11/14/2011	3:44:55 PM	SiCl4 pre valve closed
11/14/2011	3:44:55 PM	SiCl4 post valve closed
11/14/2011	3:44:55 PM	Bypass valve closed
11/14/2011	3:44:55 PM	Bubbler valve closed
11/14/2011	3:44:55 PM	Main Vac valve opened
11/14/2011	3:44:55 PM	Helium MFC set to  0.000000
11/14/2011	3:44:55 PM	H2 MFC set to  0.000000
11/14/2011	3:44:55 PM	BCl3 MFC set to  0.000000
11/14/2011	3:44:55 PM	PHl3 MFC set to  0.000000
11/14/2011	3:44:55 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:44:55 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:44:55 PM	Tube furnace set to 150
11/14/2011	3:44:56 PM	Run finished at 3:44 PM
11/14/2011	3:47:00 PM	Main Vac valve closed
11/14/2011	3:47:11 PM	Main Vac valve opened
11/14/2011	3:49:17 PM	Recipe started at 3:49 PM
11/14/2011	3:49:17 PM	Helium valve closed
11/14/2011	3:49:17 PM	H2 valve closed
11/14/2011	3:49:17 PM	BCl3 valve closed
11/14/2011	3:49:17 PM	PH3 valve closed
11/14/2011	3:49:17 PM	SiCl4 pre valve closed
11/14/2011	3:49:17 PM	SiCl4 post valve closed
11/14/2011	3:49:17 PM	Main Vac valve closed
11/14/2011	3:49:17 PM	Bypass valve closed
11/14/2011	3:49:17 PM	Bubbler valve closed
11/14/2011	3:49:17 PM	Helium MFC set to  0.000000
11/14/2011	3:49:17 PM	H2 MFC set to  0.000000
11/14/2011	3:49:17 PM	BCl3 MFC set to  0.000000
11/14/2011	3:49:17 PM	PHl3 MFC set to  0.000000
11/14/2011	3:49:17 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:49:17 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:49:17 PM	Tube furnace set to 0
11/14/2011	3:49:20 PM	Helium valve closed
11/14/2011	3:49:20 PM	BCl3 valve closed
11/14/2011	3:49:20 PM	PH3 valve closed
11/14/2011	3:49:20 PM	SiCl4 pre valve closed
11/14/2011	3:49:20 PM	SiCl4 post valve closed
11/14/2011	3:49:20 PM	Main Vac valve closed
11/14/2011	3:49:20 PM	Bypass valve closed
11/14/2011	3:49:20 PM	Bubbler valve closed
11/14/2011	3:49:20 PM	H2 valve opened
11/14/2011	3:49:20 PM	Helium MFC set to  0.000000
11/14/2011	3:49:20 PM	H2 MFC set to  500.000000
11/14/2011	3:49:20 PM	BCl3 MFC set to  0.000000
11/14/2011	3:49:20 PM	PHl3 MFC set to  0.000000
11/14/2011	3:49:20 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:49:20 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:49:21 PM	Tube furnace set to 0
11/14/2011	3:50:24 PM	Helium valve closed
11/14/2011	3:50:24 PM	BCl3 valve closed
11/14/2011	3:50:24 PM	PH3 valve closed
11/14/2011	3:50:24 PM	SiCl4 pre valve closed
11/14/2011	3:50:24 PM	SiCl4 post valve closed
11/14/2011	3:50:24 PM	Main Vac valve closed
11/14/2011	3:50:24 PM	Bypass valve closed
11/14/2011	3:50:24 PM	H2 valve opened
11/14/2011	3:50:24 PM	Bubbler valve opened
11/14/2011	3:50:24 PM	Helium MFC set to  0.000000
11/14/2011	3:50:24 PM	H2 MFC set to  500.000000
11/14/2011	3:50:24 PM	BCl3 MFC set to  0.000000
11/14/2011	3:50:24 PM	PHl3 MFC set to  0.000000
11/14/2011	3:50:24 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:50:24 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:50:25 PM	Tube furnace set to 0
11/14/2011	3:50:26 PM	Helium valve closed
11/14/2011	3:50:26 PM	BCl3 valve closed
11/14/2011	3:50:26 PM	PH3 valve closed
11/14/2011	3:50:26 PM	SiCl4 pre valve closed
11/14/2011	3:50:26 PM	SiCl4 post valve closed
11/14/2011	3:50:26 PM	Main Vac valve closed
11/14/2011	3:50:26 PM	Bypass valve closed
11/14/2011	3:50:26 PM	H2 valve opened
11/14/2011	3:50:26 PM	Bubbler valve opened
11/14/2011	3:50:26 PM	Helium MFC set to  0.000000
11/14/2011	3:50:26 PM	H2 MFC set to  500.000000
11/14/2011	3:50:26 PM	BCl3 MFC set to  0.000000
11/14/2011	3:50:26 PM	PHl3 MFC set to  0.000000
11/14/2011	3:50:26 PM	SiCl4 MFC set to  0.000000
11/14/2011	3:50:26 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	3:50:26 PM	Tube furnace set to 1000
11/14/2011	4:20:26 PM	Helium valve closed
11/14/2011	4:20:26 PM	BCl3 valve closed
11/14/2011	4:20:26 PM	PH3 valve closed
11/14/2011	4:20:26 PM	Main Vac valve closed
11/14/2011	4:20:26 PM	Bypass valve closed
11/14/2011	4:20:26 PM	H2 valve opened
11/14/2011	4:20:26 PM	SiCl4 pre valve opened
11/14/2011	4:20:26 PM	SiCl4 post valve opened
11/14/2011	4:20:26 PM	Bubbler valve opened
11/14/2011	4:20:26 PM	Helium MFC set to  0.000000
11/14/2011	4:20:26 PM	H2 MFC set to  500.000000
11/14/2011	4:20:26 PM	BCl3 MFC set to  0.000000
11/14/2011	4:20:26 PM	PHl3 MFC set to  0.000000
11/14/2011	4:20:26 PM	SiCl4 MFC set to  32.000000
11/14/2011	4:20:26 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	4:20:26 PM	Tube furnace set to 1000
11/14/2011	4:30:26 PM	Helium valve closed
11/14/2011	4:30:26 PM	BCl3 valve closed
11/14/2011	4:30:26 PM	PH3 valve closed
11/14/2011	4:30:26 PM	SiCl4 pre valve closed
11/14/2011	4:30:26 PM	SiCl4 post valve closed
11/14/2011	4:30:26 PM	Main Vac valve closed
11/14/2011	4:30:26 PM	Bypass valve closed
11/14/2011	4:30:26 PM	H2 valve opened
11/14/2011	4:30:26 PM	Bubbler valve opened
11/14/2011	4:30:26 PM	Helium MFC set to  0.000000
11/14/2011	4:30:26 PM	H2 MFC set to  500.000000
11/14/2011	4:30:26 PM	BCl3 MFC set to  0.000000
11/14/2011	4:30:26 PM	PHl3 MFC set to  0.000000
11/14/2011	4:30:26 PM	SiCl4 MFC set to  0.000000
11/14/2011	4:30:26 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	4:30:26 PM	Tube furnace set to 750
11/14/2011	4:40:26 PM	H2 valve closed
11/14/2011	4:40:26 PM	BCl3 valve closed
11/14/2011	4:40:26 PM	PH3 valve closed
11/14/2011	4:40:26 PM	SiCl4 pre valve closed
11/14/2011	4:40:26 PM	SiCl4 post valve closed
11/14/2011	4:40:26 PM	Main Vac valve closed
11/14/2011	4:40:26 PM	Bypass valve closed
11/14/2011	4:40:26 PM	Helium valve opened
11/14/2011	4:40:26 PM	Bubbler valve opened
11/14/2011	4:40:26 PM	Helium MFC set to  500.000000
11/14/2011	4:40:26 PM	H2 MFC set to  0.000000
11/14/2011	4:40:26 PM	BCl3 MFC set to  0.000000
11/14/2011	4:40:26 PM	PHl3 MFC set to  0.000000
11/14/2011	4:40:26 PM	SiCl4 MFC set to  0.000000
11/14/2011	4:40:26 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	4:40:26 PM	Tube furnace set to 0
11/14/2011	5:00:26 PM	Helium valve closed
11/14/2011	5:00:26 PM	H2 valve closed
11/14/2011	5:00:26 PM	BCl3 valve closed
11/14/2011	5:00:26 PM	PH3 valve closed
11/14/2011	5:00:26 PM	SiCl4 pre valve closed
11/14/2011	5:00:26 PM	SiCl4 post valve closed
11/14/2011	5:00:26 PM	Main Vac valve closed
11/14/2011	5:00:26 PM	Bypass valve closed
11/14/2011	5:00:26 PM	Bubbler valve closed
11/14/2011	5:00:26 PM	Helium MFC set to  0.000000
11/14/2011	5:00:26 PM	H2 MFC set to  0.000000
11/14/2011	5:00:26 PM	BCl3 MFC set to  0.000000
11/14/2011	5:00:26 PM	PHl3 MFC set to  0.000000
11/14/2011	5:00:26 PM	SiCl4 MFC set to  0.000000
11/14/2011	5:00:26 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	5:00:26 PM	Tube furnace set to 0
11/14/2011	5:00:27 PM	Run finished at 5:00 PM
11/14/2011	6:17:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2011	6:17:09 PM	Recipe started at 6:17 PM
11/14/2011	6:17:09 PM	Helium valve closed
11/14/2011	6:17:09 PM	H2 valve closed
11/14/2011	6:17:09 PM	BCl3 valve closed
11/14/2011	6:17:09 PM	PH3 valve closed
11/14/2011	6:17:09 PM	SiCl4 pre valve closed
11/14/2011	6:17:09 PM	SiCl4 post valve closed
11/14/2011	6:17:09 PM	Main Vac valve closed
11/14/2011	6:17:09 PM	Bubbler valve closed
11/14/2011	6:17:09 PM	Bypass valve opened
11/14/2011	6:17:09 PM	Helium MFC set to  0.000000
11/14/2011	6:17:09 PM	H2 MFC set to  0.000000
11/14/2011	6:17:09 PM	BCl3 MFC set to  0.000000
11/14/2011	6:17:09 PM	PHl3 MFC set to  0.000000
11/14/2011	6:17:09 PM	SiCl4 MFC set to  0.000000
11/14/2011	6:17:09 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	6:17:09 PM	Tube furnace set to 0
11/14/2011	6:18:03 PM	Helium valve closed
11/14/2011	6:18:03 PM	H2 valve closed
11/14/2011	6:18:03 PM	BCl3 valve closed
11/14/2011	6:18:03 PM	PH3 valve closed
11/14/2011	6:18:03 PM	SiCl4 pre valve closed
11/14/2011	6:18:03 PM	SiCl4 post valve closed
11/14/2011	6:18:03 PM	Main Vac valve closed
11/14/2011	6:18:03 PM	Bubbler valve closed
11/14/2011	6:18:03 PM	Bypass valve opened
11/14/2011	6:18:03 PM	Helium MFC set to  0.000000
11/14/2011	6:18:03 PM	H2 MFC set to  0.000000
11/14/2011	6:18:03 PM	BCl3 MFC set to  0.000000
11/14/2011	6:18:03 PM	PHl3 MFC set to  0.000000
11/14/2011	6:18:03 PM	SiCl4 MFC set to  0.000000
11/14/2011	6:18:03 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	6:18:03 PM	Tube furnace set to 0
11/14/2011	6:19:03 PM	Helium valve closed
11/14/2011	6:19:03 PM	H2 valve closed
11/14/2011	6:19:03 PM	BCl3 valve closed
11/14/2011	6:19:03 PM	PH3 valve closed
11/14/2011	6:19:03 PM	SiCl4 pre valve closed
11/14/2011	6:19:03 PM	SiCl4 post valve closed
11/14/2011	6:19:03 PM	Bypass valve closed
11/14/2011	6:19:03 PM	Bubbler valve closed
11/14/2011	6:19:03 PM	Main Vac valve opened
11/14/2011	6:19:03 PM	Helium MFC set to  0.000000
11/14/2011	6:19:03 PM	H2 MFC set to  0.000000
11/14/2011	6:19:03 PM	BCl3 MFC set to  0.000000
11/14/2011	6:19:03 PM	PHl3 MFC set to  0.000000
11/14/2011	6:19:03 PM	SiCl4 MFC set to  0.000000
11/14/2011	6:19:03 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	6:19:03 PM	Tube furnace set to 0
11/14/2011	6:19:04 PM	Run finished at 6:19 PM
11/14/2011	6:19:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2011	7:40:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2011	7:40:47 PM	Recipe started at 7:40 PM
11/14/2011	7:40:47 PM	Helium valve closed
11/14/2011	7:40:47 PM	H2 valve closed
11/14/2011	7:40:47 PM	BCl3 valve closed
11/14/2011	7:40:47 PM	PH3 valve closed
11/14/2011	7:40:47 PM	SiCl4 pre valve closed
11/14/2011	7:40:47 PM	SiCl4 post valve closed
11/14/2011	7:40:47 PM	Main Vac valve closed
11/14/2011	7:40:47 PM	Bypass valve closed
11/14/2011	7:40:47 PM	Bubbler valve closed
11/14/2011	7:40:47 PM	Helium MFC set to  0.000000
11/14/2011	7:40:47 PM	H2 MFC set to  0.000000
11/14/2011	7:40:47 PM	BCl3 MFC set to  0.000000
11/14/2011	7:40:47 PM	PHl3 MFC set to  0.000000
11/14/2011	7:40:47 PM	SiCl4 MFC set to  0.000000
11/14/2011	7:40:47 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	7:40:47 PM	Tube furnace set to 0
11/14/2011	7:40:50 PM	H2 valve closed
11/14/2011	7:40:50 PM	BCl3 valve closed
11/14/2011	7:40:50 PM	PH3 valve closed
11/14/2011	7:40:50 PM	SiCl4 pre valve closed
11/14/2011	7:40:50 PM	SiCl4 post valve closed
11/14/2011	7:40:50 PM	Main Vac valve closed
11/14/2011	7:40:50 PM	Bypass valve closed
11/14/2011	7:40:50 PM	Bubbler valve closed
11/14/2011	7:40:50 PM	Helium valve opened
11/14/2011	7:40:50 PM	Helium MFC set to  500.000000
11/14/2011	7:40:50 PM	H2 MFC set to  0.000000
11/14/2011	7:40:50 PM	BCl3 MFC set to  0.000000
11/14/2011	7:40:50 PM	PHl3 MFC set to  0.000000
11/14/2011	7:40:50 PM	SiCl4 MFC set to  0.000000
11/14/2011	7:40:50 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	7:40:50 PM	Tube furnace set to 0
11/14/2011	7:41:54 PM	Helium valve closed
11/14/2011	7:41:54 PM	H2 valve closed
11/14/2011	7:41:54 PM	BCl3 valve closed
11/14/2011	7:41:54 PM	PH3 valve closed
11/14/2011	7:41:54 PM	SiCl4 pre valve closed
11/14/2011	7:41:54 PM	SiCl4 post valve closed
11/14/2011	7:41:54 PM	Main Vac valve closed
11/14/2011	7:41:54 PM	Bypass valve closed
11/14/2011	7:41:54 PM	Bubbler valve closed
11/14/2011	7:41:54 PM	Helium MFC set to  0.000000
11/14/2011	7:41:54 PM	H2 MFC set to  0.000000
11/14/2011	7:41:54 PM	BCl3 MFC set to  0.000000
11/14/2011	7:41:54 PM	PHl3 MFC set to  0.000000
11/14/2011	7:41:54 PM	SiCl4 MFC set to  0.000000
11/14/2011	7:41:54 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	7:41:54 PM	Tube furnace set to 0
11/14/2011	7:41:55 PM	Run finished at 7:41 PM
11/14/2011	7:41:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2011	7:47:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2011	7:47:06 PM	Recipe started at 7:47 PM
11/14/2011	7:47:06 PM	Helium valve closed
11/14/2011	7:47:06 PM	H2 valve closed
11/14/2011	7:47:06 PM	BCl3 valve closed
11/14/2011	7:47:06 PM	PH3 valve closed
11/14/2011	7:47:06 PM	SiCl4 pre valve closed
11/14/2011	7:47:06 PM	SiCl4 post valve closed
11/14/2011	7:47:06 PM	Main Vac valve closed
11/14/2011	7:47:06 PM	Bubbler valve closed
11/14/2011	7:47:06 PM	Bypass valve opened
11/14/2011	7:47:06 PM	Helium MFC set to  0.000000
11/14/2011	7:47:06 PM	H2 MFC set to  0.000000
11/14/2011	7:47:06 PM	BCl3 MFC set to  0.000000
11/14/2011	7:47:06 PM	PHl3 MFC set to  0.000000
11/14/2011	7:47:06 PM	SiCl4 MFC set to  0.000000
11/14/2011	7:47:06 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	7:47:06 PM	Tube furnace set to 0
11/14/2011	7:48:16 PM	Helium valve closed
11/14/2011	7:48:16 PM	H2 valve closed
11/14/2011	7:48:16 PM	BCl3 valve closed
11/14/2011	7:48:16 PM	PH3 valve closed
11/14/2011	7:48:16 PM	SiCl4 pre valve closed
11/14/2011	7:48:16 PM	SiCl4 post valve closed
11/14/2011	7:48:16 PM	Main Vac valve closed
11/14/2011	7:48:16 PM	Bubbler valve closed
11/14/2011	7:48:16 PM	Bypass valve opened
11/14/2011	7:48:16 PM	Helium MFC set to  0.000000
11/14/2011	7:48:16 PM	H2 MFC set to  0.000000
11/14/2011	7:48:16 PM	BCl3 MFC set to  0.000000
11/14/2011	7:48:16 PM	PHl3 MFC set to  0.000000
11/14/2011	7:48:16 PM	SiCl4 MFC set to  0.000000
11/14/2011	7:48:16 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	7:48:16 PM	Tube furnace set to 0
11/14/2011	7:49:16 PM	Helium valve closed
11/14/2011	7:49:16 PM	H2 valve closed
11/14/2011	7:49:16 PM	BCl3 valve closed
11/14/2011	7:49:16 PM	PH3 valve closed
11/14/2011	7:49:16 PM	SiCl4 pre valve closed
11/14/2011	7:49:16 PM	SiCl4 post valve closed
11/14/2011	7:49:16 PM	Bypass valve closed
11/14/2011	7:49:16 PM	Bubbler valve closed
11/14/2011	7:49:16 PM	Main Vac valve opened
11/14/2011	7:49:16 PM	Helium MFC set to  0.000000
11/14/2011	7:49:16 PM	H2 MFC set to  0.000000
11/14/2011	7:49:16 PM	BCl3 MFC set to  0.000000
11/14/2011	7:49:16 PM	PHl3 MFC set to  0.000000
11/14/2011	7:49:16 PM	SiCl4 MFC set to  0.000000
11/14/2011	7:49:16 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	7:49:16 PM	Tube furnace set to 0
11/14/2011	7:49:17 PM	Run finished at 7:49 PM
11/14/2011	7:49:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2011	7:54:21 PM	Recipe started at 7:54 PM
11/14/2011	7:54:21 PM	Helium valve closed
11/14/2011	7:54:21 PM	H2 valve closed
11/14/2011	7:54:21 PM	BCl3 valve closed
11/14/2011	7:54:21 PM	PH3 valve closed
11/14/2011	7:54:21 PM	SiCl4 pre valve closed
11/14/2011	7:54:21 PM	SiCl4 post valve closed
11/14/2011	7:54:21 PM	Bypass valve closed
11/14/2011	7:54:21 PM	Bubbler valve closed
11/14/2011	7:54:21 PM	Main Vac valve opened
11/14/2011	7:54:21 PM	Helium MFC set to  0.000000
11/14/2011	7:54:21 PM	H2 MFC set to  0.000000
11/14/2011	7:54:21 PM	BCl3 MFC set to  0.000000
11/14/2011	7:54:21 PM	PHl3 MFC set to  0.000000
11/14/2011	7:54:21 PM	SiCl4 MFC set to  0.000000
11/14/2011	7:54:21 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	7:54:21 PM	Tube furnace set to 150
11/14/2011	7:54:51 PM	H2 valve closed
11/14/2011	7:54:51 PM	BCl3 valve closed
11/14/2011	7:54:51 PM	PH3 valve closed
11/14/2011	7:54:51 PM	SiCl4 pre valve closed
11/14/2011	7:54:51 PM	SiCl4 post valve closed
11/14/2011	7:54:51 PM	Bypass valve closed
11/14/2011	7:54:51 PM	Bubbler valve closed
11/14/2011	7:54:51 PM	Helium valve opened
11/14/2011	7:54:51 PM	Main Vac valve opened
11/14/2011	7:54:51 PM	Helium MFC set to  20.000000
11/14/2011	7:54:51 PM	H2 MFC set to  0.000000
11/14/2011	7:54:51 PM	BCl3 MFC set to  0.000000
11/14/2011	7:54:51 PM	PHl3 MFC set to  0.000000
11/14/2011	7:54:51 PM	SiCl4 MFC set to  0.000000
11/14/2011	7:54:51 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	7:54:51 PM	Tube furnace set to 150
11/14/2011	7:55:21 PM	Helium valve closed
11/14/2011	7:55:21 PM	H2 valve closed
11/14/2011	7:55:22 PM	BCl3 valve closed
11/14/2011	7:55:22 PM	PH3 valve closed
11/14/2011	7:55:22 PM	SiCl4 pre valve closed
11/14/2011	7:55:22 PM	SiCl4 post valve closed
11/14/2011	7:55:22 PM	Bypass valve closed
11/14/2011	7:55:22 PM	Bubbler valve closed
11/14/2011	7:55:22 PM	Main Vac valve opened
11/14/2011	7:55:22 PM	Helium MFC set to  0.000000
11/14/2011	7:55:22 PM	H2 MFC set to  0.000000
11/14/2011	7:55:22 PM	BCl3 MFC set to  0.000000
11/14/2011	7:55:22 PM	PHl3 MFC set to  0.000000
11/14/2011	7:55:22 PM	SiCl4 MFC set to  0.000000
11/14/2011	7:55:22 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	7:55:22 PM	Tube furnace set to 150
11/14/2011	7:55:52 PM	H2 valve closed
11/14/2011	7:55:52 PM	BCl3 valve closed
11/14/2011	7:55:52 PM	PH3 valve closed
11/14/2011	7:55:52 PM	SiCl4 pre valve closed
11/14/2011	7:55:52 PM	SiCl4 post valve closed
11/14/2011	7:55:52 PM	Bypass valve closed
11/14/2011	7:55:52 PM	Bubbler valve closed
11/14/2011	7:55:52 PM	Helium valve opened
11/14/2011	7:55:52 PM	Main Vac valve opened
11/14/2011	7:55:52 PM	Helium MFC set to  20.000000
11/14/2011	7:55:52 PM	H2 MFC set to  0.000000
11/14/2011	7:55:52 PM	BCl3 MFC set to  0.000000
11/14/2011	7:55:52 PM	PHl3 MFC set to  0.000000
11/14/2011	7:55:52 PM	SiCl4 MFC set to  0.000000
11/14/2011	7:55:52 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	7:55:52 PM	Tube furnace set to 150
11/14/2011	7:56:22 PM	Helium valve closed
11/14/2011	7:56:22 PM	H2 valve closed
11/14/2011	7:56:22 PM	BCl3 valve closed
11/14/2011	7:56:22 PM	PH3 valve closed
11/14/2011	7:56:22 PM	SiCl4 pre valve closed
11/14/2011	7:56:22 PM	SiCl4 post valve closed
11/14/2011	7:56:22 PM	Bypass valve closed
11/14/2011	7:56:22 PM	Bubbler valve closed
11/14/2011	7:56:22 PM	Main Vac valve opened
11/14/2011	7:56:22 PM	Helium MFC set to  0.000000
11/14/2011	7:56:22 PM	H2 MFC set to  0.000000
11/14/2011	7:56:22 PM	BCl3 MFC set to  0.000000
11/14/2011	7:56:22 PM	PHl3 MFC set to  0.000000
11/14/2011	7:56:22 PM	SiCl4 MFC set to  0.000000
11/14/2011	7:56:22 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	7:56:22 PM	Tube furnace set to 150
11/14/2011	7:56:52 PM	H2 valve closed
11/14/2011	7:56:52 PM	BCl3 valve closed
11/14/2011	7:56:52 PM	PH3 valve closed
11/14/2011	7:56:52 PM	SiCl4 pre valve closed
11/14/2011	7:56:52 PM	SiCl4 post valve closed
11/14/2011	7:56:52 PM	Bypass valve closed
11/14/2011	7:56:52 PM	Bubbler valve closed
11/14/2011	7:56:52 PM	Helium valve opened
11/14/2011	7:56:52 PM	Main Vac valve opened
11/14/2011	7:56:52 PM	Helium MFC set to  20.000000
11/14/2011	7:56:52 PM	H2 MFC set to  0.000000
11/14/2011	7:56:52 PM	BCl3 MFC set to  0.000000
11/14/2011	7:56:52 PM	PHl3 MFC set to  0.000000
11/14/2011	7:56:52 PM	SiCl4 MFC set to  0.000000
11/14/2011	7:56:52 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	7:56:52 PM	Tube furnace set to 150
11/14/2011	7:57:22 PM	Helium valve closed
11/14/2011	7:57:22 PM	H2 valve closed
11/14/2011	7:57:22 PM	BCl3 valve closed
11/14/2011	7:57:22 PM	PH3 valve closed
11/14/2011	7:57:22 PM	SiCl4 pre valve closed
11/14/2011	7:57:22 PM	SiCl4 post valve closed
11/14/2011	7:57:22 PM	Bypass valve closed
11/14/2011	7:57:22 PM	Bubbler valve closed
11/14/2011	7:57:22 PM	Main Vac valve opened
11/14/2011	7:57:22 PM	Helium MFC set to  0.000000
11/14/2011	7:57:22 PM	H2 MFC set to  0.000000
11/14/2011	7:57:22 PM	BCl3 MFC set to  0.000000
11/14/2011	7:57:22 PM	PHl3 MFC set to  0.000000
11/14/2011	7:57:22 PM	SiCl4 MFC set to  0.000000
11/14/2011	7:57:22 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	7:57:22 PM	Tube furnace set to 150
11/14/2011	7:57:52 PM	H2 valve closed
11/14/2011	7:57:52 PM	BCl3 valve closed
11/14/2011	7:57:52 PM	PH3 valve closed
11/14/2011	7:57:52 PM	SiCl4 pre valve closed
11/14/2011	7:57:52 PM	SiCl4 post valve closed
11/14/2011	7:57:52 PM	Bypass valve closed
11/14/2011	7:57:52 PM	Bubbler valve closed
11/14/2011	7:57:53 PM	Helium valve opened
11/14/2011	7:57:53 PM	Main Vac valve opened
11/14/2011	7:57:53 PM	Helium MFC set to  20.000000
11/14/2011	7:57:53 PM	H2 MFC set to  0.000000
11/14/2011	7:57:53 PM	BCl3 MFC set to  0.000000
11/14/2011	7:57:53 PM	PHl3 MFC set to  0.000000
11/14/2011	7:57:53 PM	SiCl4 MFC set to  0.000000
11/14/2011	7:57:53 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	7:57:53 PM	Tube furnace set to 150
11/14/2011	7:58:23 PM	Helium valve closed
11/14/2011	7:58:23 PM	H2 valve closed
11/14/2011	7:58:23 PM	BCl3 valve closed
11/14/2011	7:58:23 PM	PH3 valve closed
11/14/2011	7:58:23 PM	SiCl4 pre valve closed
11/14/2011	7:58:23 PM	SiCl4 post valve closed
11/14/2011	7:58:23 PM	Bypass valve closed
11/14/2011	7:58:23 PM	Bubbler valve closed
11/14/2011	7:58:23 PM	Main Vac valve opened
11/14/2011	7:58:23 PM	Helium MFC set to  0.000000
11/14/2011	7:58:23 PM	H2 MFC set to  0.000000
11/14/2011	7:58:23 PM	BCl3 MFC set to  0.000000
11/14/2011	7:58:23 PM	PHl3 MFC set to  0.000000
11/14/2011	7:58:23 PM	SiCl4 MFC set to  0.000000
11/14/2011	7:58:23 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	7:58:23 PM	Tube furnace set to 150
11/14/2011	7:58:53 PM	H2 valve closed
11/14/2011	7:58:53 PM	BCl3 valve closed
11/14/2011	7:58:53 PM	PH3 valve closed
11/14/2011	7:58:53 PM	SiCl4 pre valve closed
11/14/2011	7:58:53 PM	SiCl4 post valve closed
11/14/2011	7:58:53 PM	Bypass valve closed
11/14/2011	7:58:53 PM	Bubbler valve closed
11/14/2011	7:58:53 PM	Helium valve opened
11/14/2011	7:58:53 PM	Main Vac valve opened
11/14/2011	7:58:53 PM	Helium MFC set to  20.000000
11/14/2011	7:58:53 PM	H2 MFC set to  0.000000
11/14/2011	7:58:53 PM	BCl3 MFC set to  0.000000
11/14/2011	7:58:53 PM	PHl3 MFC set to  0.000000
11/14/2011	7:58:53 PM	SiCl4 MFC set to  0.000000
11/14/2011	7:58:53 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	7:58:53 PM	Tube furnace set to 150
11/14/2011	7:59:23 PM	Helium valve closed
11/14/2011	7:59:23 PM	H2 valve closed
11/14/2011	7:59:23 PM	BCl3 valve closed
11/14/2011	7:59:23 PM	PH3 valve closed
11/14/2011	7:59:23 PM	SiCl4 pre valve closed
11/14/2011	7:59:23 PM	SiCl4 post valve closed
11/14/2011	7:59:23 PM	Bypass valve closed
11/14/2011	7:59:23 PM	Bubbler valve closed
11/14/2011	7:59:23 PM	Main Vac valve opened
11/14/2011	7:59:23 PM	Helium MFC set to  0.000000
11/14/2011	7:59:23 PM	H2 MFC set to  0.000000
11/14/2011	7:59:23 PM	BCl3 MFC set to  0.000000
11/14/2011	7:59:23 PM	PHl3 MFC set to  0.000000
11/14/2011	7:59:23 PM	SiCl4 MFC set to  0.000000
11/14/2011	7:59:23 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	7:59:23 PM	Tube furnace set to 150
11/14/2011	7:59:53 PM	H2 valve closed
11/14/2011	7:59:53 PM	BCl3 valve closed
11/14/2011	7:59:53 PM	PH3 valve closed
11/14/2011	7:59:53 PM	SiCl4 pre valve closed
11/14/2011	7:59:53 PM	SiCl4 post valve closed
11/14/2011	7:59:53 PM	Bypass valve closed
11/14/2011	7:59:53 PM	Bubbler valve closed
11/14/2011	7:59:53 PM	Helium valve opened
11/14/2011	7:59:53 PM	Main Vac valve opened
11/14/2011	7:59:53 PM	Helium MFC set to  20.000000
11/14/2011	7:59:53 PM	H2 MFC set to  0.000000
11/14/2011	7:59:53 PM	BCl3 MFC set to  0.000000
11/14/2011	7:59:53 PM	PHl3 MFC set to  0.000000
11/14/2011	7:59:53 PM	SiCl4 MFC set to  0.000000
11/14/2011	7:59:53 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	7:59:54 PM	Tube furnace set to 150
11/14/2011	8:00:24 PM	Helium valve closed
11/14/2011	8:00:24 PM	H2 valve closed
11/14/2011	8:00:24 PM	BCl3 valve closed
11/14/2011	8:00:24 PM	PH3 valve closed
11/14/2011	8:00:24 PM	SiCl4 pre valve closed
11/14/2011	8:00:24 PM	SiCl4 post valve closed
11/14/2011	8:00:24 PM	Bypass valve closed
11/14/2011	8:00:24 PM	Bubbler valve closed
11/14/2011	8:00:24 PM	Main Vac valve opened
11/14/2011	8:00:24 PM	Helium MFC set to  0.000000
11/14/2011	8:00:24 PM	H2 MFC set to  0.000000
11/14/2011	8:00:24 PM	BCl3 MFC set to  0.000000
11/14/2011	8:00:24 PM	PHl3 MFC set to  0.000000
11/14/2011	8:00:24 PM	SiCl4 MFC set to  0.000000
11/14/2011	8:00:24 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:00:24 PM	Tube furnace set to 150
11/14/2011	8:00:54 PM	H2 valve closed
11/14/2011	8:00:54 PM	BCl3 valve closed
11/14/2011	8:00:54 PM	PH3 valve closed
11/14/2011	8:00:54 PM	SiCl4 pre valve closed
11/14/2011	8:00:54 PM	SiCl4 post valve closed
11/14/2011	8:00:54 PM	Bypass valve closed
11/14/2011	8:00:54 PM	Bubbler valve closed
11/14/2011	8:00:54 PM	Helium valve opened
11/14/2011	8:00:54 PM	Main Vac valve opened
11/14/2011	8:00:54 PM	Helium MFC set to  20.000000
11/14/2011	8:00:54 PM	H2 MFC set to  0.000000
11/14/2011	8:00:54 PM	BCl3 MFC set to  0.000000
11/14/2011	8:00:54 PM	PHl3 MFC set to  0.000000
11/14/2011	8:00:54 PM	SiCl4 MFC set to  0.000000
11/14/2011	8:00:54 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:00:54 PM	Tube furnace set to 150
11/14/2011	8:01:24 PM	Helium valve closed
11/14/2011	8:01:24 PM	H2 valve closed
11/14/2011	8:01:24 PM	BCl3 valve closed
11/14/2011	8:01:24 PM	PH3 valve closed
11/14/2011	8:01:24 PM	SiCl4 pre valve closed
11/14/2011	8:01:24 PM	SiCl4 post valve closed
11/14/2011	8:01:24 PM	Bypass valve closed
11/14/2011	8:01:24 PM	Bubbler valve closed
11/14/2011	8:01:24 PM	Main Vac valve opened
11/14/2011	8:01:24 PM	Helium MFC set to  0.000000
11/14/2011	8:01:24 PM	H2 MFC set to  0.000000
11/14/2011	8:01:24 PM	BCl3 MFC set to  0.000000
11/14/2011	8:01:24 PM	PHl3 MFC set to  0.000000
11/14/2011	8:01:24 PM	SiCl4 MFC set to  0.000000
11/14/2011	8:01:24 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:01:24 PM	Tube furnace set to 150
11/14/2011	8:01:54 PM	H2 valve closed
11/14/2011	8:01:54 PM	BCl3 valve closed
11/14/2011	8:01:54 PM	PH3 valve closed
11/14/2011	8:01:54 PM	SiCl4 pre valve closed
11/14/2011	8:01:54 PM	SiCl4 post valve closed
11/14/2011	8:01:54 PM	Bypass valve closed
11/14/2011	8:01:54 PM	Bubbler valve closed
11/14/2011	8:01:54 PM	Helium valve opened
11/14/2011	8:01:54 PM	Main Vac valve opened
11/14/2011	8:01:54 PM	Helium MFC set to  20.000000
11/14/2011	8:01:54 PM	H2 MFC set to  0.000000
11/14/2011	8:01:54 PM	BCl3 MFC set to  0.000000
11/14/2011	8:01:54 PM	PHl3 MFC set to  0.000000
11/14/2011	8:01:54 PM	SiCl4 MFC set to  0.000000
11/14/2011	8:01:54 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:01:54 PM	Tube furnace set to 150
11/14/2011	8:02:24 PM	Helium valve closed
11/14/2011	8:02:24 PM	H2 valve closed
11/14/2011	8:02:24 PM	BCl3 valve closed
11/14/2011	8:02:24 PM	PH3 valve closed
11/14/2011	8:02:24 PM	SiCl4 pre valve closed
11/14/2011	8:02:24 PM	SiCl4 post valve closed
11/14/2011	8:02:24 PM	Bypass valve closed
11/14/2011	8:02:24 PM	Bubbler valve closed
11/14/2011	8:02:24 PM	Main Vac valve opened
11/14/2011	8:02:24 PM	Helium MFC set to  0.000000
11/14/2011	8:02:24 PM	H2 MFC set to  0.000000
11/14/2011	8:02:24 PM	BCl3 MFC set to  0.000000
11/14/2011	8:02:24 PM	PHl3 MFC set to  0.000000
11/14/2011	8:02:24 PM	SiCl4 MFC set to  0.000000
11/14/2011	8:02:24 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:02:25 PM	Tube furnace set to 150
11/14/2011	8:02:55 PM	H2 valve closed
11/14/2011	8:02:55 PM	BCl3 valve closed
11/14/2011	8:02:55 PM	PH3 valve closed
11/14/2011	8:02:55 PM	SiCl4 pre valve closed
11/14/2011	8:02:55 PM	SiCl4 post valve closed
11/14/2011	8:02:55 PM	Bypass valve closed
11/14/2011	8:02:55 PM	Bubbler valve closed
11/14/2011	8:02:55 PM	Helium valve opened
11/14/2011	8:02:55 PM	Main Vac valve opened
11/14/2011	8:02:55 PM	Helium MFC set to  20.000000
11/14/2011	8:02:55 PM	H2 MFC set to  0.000000
11/14/2011	8:02:55 PM	BCl3 MFC set to  0.000000
11/14/2011	8:02:55 PM	PHl3 MFC set to  0.000000
11/14/2011	8:02:55 PM	SiCl4 MFC set to  0.000000
11/14/2011	8:02:55 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:02:55 PM	Tube furnace set to 150
11/14/2011	8:03:25 PM	Helium valve closed
11/14/2011	8:03:25 PM	H2 valve closed
11/14/2011	8:03:25 PM	BCl3 valve closed
11/14/2011	8:03:25 PM	PH3 valve closed
11/14/2011	8:03:25 PM	SiCl4 pre valve closed
11/14/2011	8:03:25 PM	SiCl4 post valve closed
11/14/2011	8:03:25 PM	Bypass valve closed
11/14/2011	8:03:25 PM	Bubbler valve closed
11/14/2011	8:03:25 PM	Main Vac valve opened
11/14/2011	8:03:25 PM	Helium MFC set to  0.000000
11/14/2011	8:03:25 PM	H2 MFC set to  0.000000
11/14/2011	8:03:25 PM	BCl3 MFC set to  0.000000
11/14/2011	8:03:25 PM	PHl3 MFC set to  0.000000
11/14/2011	8:03:25 PM	SiCl4 MFC set to  0.000000
11/14/2011	8:03:25 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:03:25 PM	Tube furnace set to 150
11/14/2011	8:03:55 PM	H2 valve closed
11/14/2011	8:03:55 PM	BCl3 valve closed
11/14/2011	8:03:55 PM	PH3 valve closed
11/14/2011	8:03:55 PM	SiCl4 pre valve closed
11/14/2011	8:03:55 PM	SiCl4 post valve closed
11/14/2011	8:03:55 PM	Bypass valve closed
11/14/2011	8:03:55 PM	Bubbler valve closed
11/14/2011	8:03:55 PM	Helium valve opened
11/14/2011	8:03:55 PM	Main Vac valve opened
11/14/2011	8:03:55 PM	Helium MFC set to  20.000000
11/14/2011	8:03:55 PM	H2 MFC set to  0.000000
11/14/2011	8:03:55 PM	BCl3 MFC set to  0.000000
11/14/2011	8:03:55 PM	PHl3 MFC set to  0.000000
11/14/2011	8:03:55 PM	SiCl4 MFC set to  0.000000
11/14/2011	8:03:55 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:03:55 PM	Tube furnace set to 150
11/14/2011	8:04:25 PM	Helium valve closed
11/14/2011	8:04:25 PM	H2 valve closed
11/14/2011	8:04:25 PM	BCl3 valve closed
11/14/2011	8:04:25 PM	PH3 valve closed
11/14/2011	8:04:25 PM	SiCl4 pre valve closed
11/14/2011	8:04:25 PM	SiCl4 post valve closed
11/14/2011	8:04:25 PM	Bypass valve closed
11/14/2011	8:04:25 PM	Bubbler valve closed
11/14/2011	8:04:25 PM	Main Vac valve opened
11/14/2011	8:04:25 PM	Helium MFC set to  0.000000
11/14/2011	8:04:25 PM	H2 MFC set to  0.000000
11/14/2011	8:04:25 PM	BCl3 MFC set to  0.000000
11/14/2011	8:04:25 PM	PHl3 MFC set to  0.000000
11/14/2011	8:04:25 PM	SiCl4 MFC set to  0.000000
11/14/2011	8:04:25 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:04:25 PM	Tube furnace set to 150
11/14/2011	8:04:26 PM	Run finished at 8:04 PM
11/14/2011	8:04:36 PM	Recipe started at 8:04 PM
11/14/2011	8:04:36 PM	Helium valve closed
11/14/2011	8:04:36 PM	H2 valve closed
11/14/2011	8:04:36 PM	BCl3 valve closed
11/14/2011	8:04:36 PM	PH3 valve closed
11/14/2011	8:04:36 PM	SiCl4 pre valve closed
11/14/2011	8:04:36 PM	SiCl4 post valve closed
11/14/2011	8:04:36 PM	Bypass valve closed
11/14/2011	8:04:36 PM	Bubbler valve closed
11/14/2011	8:04:36 PM	Main Vac valve opened
11/14/2011	8:04:36 PM	Helium MFC set to  0.000000
11/14/2011	8:04:36 PM	H2 MFC set to  0.000000
11/14/2011	8:04:36 PM	BCl3 MFC set to  0.000000
11/14/2011	8:04:36 PM	PHl3 MFC set to  0.000000
11/14/2011	8:04:36 PM	SiCl4 MFC set to  0.000000
11/14/2011	8:04:36 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:04:36 PM	Tube furnace set to 150
11/14/2011	8:05:06 PM	H2 valve closed
11/14/2011	8:05:06 PM	BCl3 valve closed
11/14/2011	8:05:06 PM	PH3 valve closed
11/14/2011	8:05:06 PM	SiCl4 pre valve closed
11/14/2011	8:05:06 PM	SiCl4 post valve closed
11/14/2011	8:05:06 PM	Bypass valve closed
11/14/2011	8:05:06 PM	Bubbler valve closed
11/14/2011	8:05:06 PM	Helium valve opened
11/14/2011	8:05:06 PM	Main Vac valve opened
11/14/2011	8:05:06 PM	Helium MFC set to  20.000000
11/14/2011	8:05:06 PM	H2 MFC set to  0.000000
11/14/2011	8:05:06 PM	BCl3 MFC set to  0.000000
11/14/2011	8:05:06 PM	PHl3 MFC set to  0.000000
11/14/2011	8:05:06 PM	SiCl4 MFC set to  0.000000
11/14/2011	8:05:06 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:05:06 PM	Tube furnace set to 150
11/14/2011	8:05:36 PM	Helium valve closed
11/14/2011	8:05:36 PM	H2 valve closed
11/14/2011	8:05:36 PM	BCl3 valve closed
11/14/2011	8:05:36 PM	PH3 valve closed
11/14/2011	8:05:36 PM	SiCl4 pre valve closed
11/14/2011	8:05:36 PM	SiCl4 post valve closed
11/14/2011	8:05:36 PM	Bypass valve closed
11/14/2011	8:05:36 PM	Bubbler valve closed
11/14/2011	8:05:36 PM	Main Vac valve opened
11/14/2011	8:05:36 PM	Helium MFC set to  0.000000
11/14/2011	8:05:36 PM	H2 MFC set to  0.000000
11/14/2011	8:05:36 PM	BCl3 MFC set to  0.000000
11/14/2011	8:05:36 PM	PHl3 MFC set to  0.000000
11/14/2011	8:05:36 PM	SiCl4 MFC set to  0.000000
11/14/2011	8:05:36 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:05:36 PM	Tube furnace set to 150
11/14/2011	8:06:06 PM	H2 valve closed
11/14/2011	8:06:06 PM	BCl3 valve closed
11/14/2011	8:06:06 PM	PH3 valve closed
11/14/2011	8:06:06 PM	SiCl4 pre valve closed
11/14/2011	8:06:06 PM	SiCl4 post valve closed
11/14/2011	8:06:06 PM	Bypass valve closed
11/14/2011	8:06:06 PM	Bubbler valve closed
11/14/2011	8:06:06 PM	Helium valve opened
11/14/2011	8:06:06 PM	Main Vac valve opened
11/14/2011	8:06:06 PM	Helium MFC set to  20.000000
11/14/2011	8:06:06 PM	H2 MFC set to  0.000000
11/14/2011	8:06:06 PM	BCl3 MFC set to  0.000000
11/14/2011	8:06:06 PM	PHl3 MFC set to  0.000000
11/14/2011	8:06:06 PM	SiCl4 MFC set to  0.000000
11/14/2011	8:06:06 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:06:06 PM	Tube furnace set to 150
11/14/2011	8:06:37 PM	Helium valve closed
11/14/2011	8:06:37 PM	H2 valve closed
11/14/2011	8:06:37 PM	BCl3 valve closed
11/14/2011	8:06:37 PM	PH3 valve closed
11/14/2011	8:06:37 PM	SiCl4 pre valve closed
11/14/2011	8:06:37 PM	SiCl4 post valve closed
11/14/2011	8:06:37 PM	Bypass valve closed
11/14/2011	8:06:37 PM	Bubbler valve closed
11/14/2011	8:06:37 PM	Main Vac valve opened
11/14/2011	8:06:37 PM	Helium MFC set to  0.000000
11/14/2011	8:06:37 PM	H2 MFC set to  0.000000
11/14/2011	8:06:37 PM	BCl3 MFC set to  0.000000
11/14/2011	8:06:37 PM	PHl3 MFC set to  0.000000
11/14/2011	8:06:37 PM	SiCl4 MFC set to  0.000000
11/14/2011	8:06:37 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:06:37 PM	Tube furnace set to 150
11/14/2011	8:07:07 PM	H2 valve closed
11/14/2011	8:07:07 PM	BCl3 valve closed
11/14/2011	8:07:07 PM	PH3 valve closed
11/14/2011	8:07:07 PM	SiCl4 pre valve closed
11/14/2011	8:07:07 PM	SiCl4 post valve closed
11/14/2011	8:07:07 PM	Bypass valve closed
11/14/2011	8:07:07 PM	Bubbler valve closed
11/14/2011	8:07:07 PM	Helium valve opened
11/14/2011	8:07:07 PM	Main Vac valve opened
11/14/2011	8:07:07 PM	Helium MFC set to  20.000000
11/14/2011	8:07:07 PM	H2 MFC set to  0.000000
11/14/2011	8:07:07 PM	BCl3 MFC set to  0.000000
11/14/2011	8:07:07 PM	PHl3 MFC set to  0.000000
11/14/2011	8:07:07 PM	SiCl4 MFC set to  0.000000
11/14/2011	8:07:07 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:07:07 PM	Tube furnace set to 150
11/14/2011	8:07:37 PM	Helium valve closed
11/14/2011	8:07:37 PM	H2 valve closed
11/14/2011	8:07:37 PM	BCl3 valve closed
11/14/2011	8:07:37 PM	PH3 valve closed
11/14/2011	8:07:37 PM	SiCl4 pre valve closed
11/14/2011	8:07:37 PM	SiCl4 post valve closed
11/14/2011	8:07:37 PM	Bypass valve closed
11/14/2011	8:07:37 PM	Bubbler valve closed
11/14/2011	8:07:37 PM	Main Vac valve opened
11/14/2011	8:07:37 PM	Helium MFC set to  0.000000
11/14/2011	8:07:37 PM	H2 MFC set to  0.000000
11/14/2011	8:07:37 PM	BCl3 MFC set to  0.000000
11/14/2011	8:07:37 PM	PHl3 MFC set to  0.000000
11/14/2011	8:07:37 PM	SiCl4 MFC set to  0.000000
11/14/2011	8:07:37 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:07:37 PM	Tube furnace set to 150
11/14/2011	8:08:07 PM	H2 valve closed
11/14/2011	8:08:07 PM	BCl3 valve closed
11/14/2011	8:08:07 PM	PH3 valve closed
11/14/2011	8:08:07 PM	SiCl4 pre valve closed
11/14/2011	8:08:07 PM	SiCl4 post valve closed
11/14/2011	8:08:07 PM	Bypass valve closed
11/14/2011	8:08:07 PM	Bubbler valve closed
11/14/2011	8:08:07 PM	Helium valve opened
11/14/2011	8:08:07 PM	Main Vac valve opened
11/14/2011	8:08:07 PM	Helium MFC set to  20.000000
11/14/2011	8:08:07 PM	H2 MFC set to  0.000000
11/14/2011	8:08:07 PM	BCl3 MFC set to  0.000000
11/14/2011	8:08:07 PM	PHl3 MFC set to  0.000000
11/14/2011	8:08:07 PM	SiCl4 MFC set to  0.000000
11/14/2011	8:08:07 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:08:07 PM	Tube furnace set to 150
11/14/2011	8:08:37 PM	Helium valve closed
11/14/2011	8:08:37 PM	H2 valve closed
11/14/2011	8:08:37 PM	BCl3 valve closed
11/14/2011	8:08:37 PM	PH3 valve closed
11/14/2011	8:08:37 PM	SiCl4 pre valve closed
11/14/2011	8:08:37 PM	SiCl4 post valve closed
11/14/2011	8:08:37 PM	Bypass valve closed
11/14/2011	8:08:37 PM	Bubbler valve closed
11/14/2011	8:08:37 PM	Main Vac valve opened
11/14/2011	8:08:37 PM	Helium MFC set to  0.000000
11/14/2011	8:08:37 PM	H2 MFC set to  0.000000
11/14/2011	8:08:37 PM	BCl3 MFC set to  0.000000
11/14/2011	8:08:37 PM	PHl3 MFC set to  0.000000
11/14/2011	8:08:37 PM	SiCl4 MFC set to  0.000000
11/14/2011	8:08:37 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:08:38 PM	Tube furnace set to 150
11/14/2011	8:09:08 PM	H2 valve closed
11/14/2011	8:09:08 PM	BCl3 valve closed
11/14/2011	8:09:08 PM	PH3 valve closed
11/14/2011	8:09:08 PM	SiCl4 pre valve closed
11/14/2011	8:09:08 PM	SiCl4 post valve closed
11/14/2011	8:09:08 PM	Bypass valve closed
11/14/2011	8:09:08 PM	Bubbler valve closed
11/14/2011	8:09:08 PM	Helium valve opened
11/14/2011	8:09:08 PM	Main Vac valve opened
11/14/2011	8:09:08 PM	Helium MFC set to  20.000000
11/14/2011	8:09:08 PM	H2 MFC set to  0.000000
11/14/2011	8:09:08 PM	BCl3 MFC set to  0.000000
11/14/2011	8:09:08 PM	PHl3 MFC set to  0.000000
11/14/2011	8:09:08 PM	SiCl4 MFC set to  0.000000
11/14/2011	8:09:08 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:09:08 PM	Tube furnace set to 150
11/14/2011	8:09:38 PM	Helium valve closed
11/14/2011	8:09:38 PM	H2 valve closed
11/14/2011	8:09:38 PM	BCl3 valve closed
11/14/2011	8:09:38 PM	PH3 valve closed
11/14/2011	8:09:38 PM	SiCl4 pre valve closed
11/14/2011	8:09:38 PM	SiCl4 post valve closed
11/14/2011	8:09:38 PM	Bypass valve closed
11/14/2011	8:09:38 PM	Bubbler valve closed
11/14/2011	8:09:38 PM	Main Vac valve opened
11/14/2011	8:09:38 PM	Helium MFC set to  0.000000
11/14/2011	8:09:38 PM	H2 MFC set to  0.000000
11/14/2011	8:09:38 PM	BCl3 MFC set to  0.000000
11/14/2011	8:09:38 PM	PHl3 MFC set to  0.000000
11/14/2011	8:09:38 PM	SiCl4 MFC set to  0.000000
11/14/2011	8:09:38 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:09:38 PM	Tube furnace set to 150
11/14/2011	8:10:08 PM	H2 valve closed
11/14/2011	8:10:08 PM	BCl3 valve closed
11/14/2011	8:10:08 PM	PH3 valve closed
11/14/2011	8:10:08 PM	SiCl4 pre valve closed
11/14/2011	8:10:08 PM	SiCl4 post valve closed
11/14/2011	8:10:08 PM	Bypass valve closed
11/14/2011	8:10:08 PM	Bubbler valve closed
11/14/2011	8:10:08 PM	Helium valve opened
11/14/2011	8:10:08 PM	Main Vac valve opened
11/14/2011	8:10:08 PM	Helium MFC set to  20.000000
11/14/2011	8:10:08 PM	H2 MFC set to  0.000000
11/14/2011	8:10:08 PM	BCl3 MFC set to  0.000000
11/14/2011	8:10:08 PM	PHl3 MFC set to  0.000000
11/14/2011	8:10:08 PM	SiCl4 MFC set to  0.000000
11/14/2011	8:10:08 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:10:08 PM	Tube furnace set to 150
11/14/2011	8:10:38 PM	Helium valve closed
11/14/2011	8:10:38 PM	H2 valve closed
11/14/2011	8:10:38 PM	BCl3 valve closed
11/14/2011	8:10:38 PM	PH3 valve closed
11/14/2011	8:10:38 PM	SiCl4 pre valve closed
11/14/2011	8:10:38 PM	SiCl4 post valve closed
11/14/2011	8:10:38 PM	Bypass valve closed
11/14/2011	8:10:38 PM	Bubbler valve closed
11/14/2011	8:10:38 PM	Main Vac valve opened
11/14/2011	8:10:38 PM	Helium MFC set to  0.000000
11/14/2011	8:10:38 PM	H2 MFC set to  0.000000
11/14/2011	8:10:38 PM	BCl3 MFC set to  0.000000
11/14/2011	8:10:38 PM	PHl3 MFC set to  0.000000
11/14/2011	8:10:38 PM	SiCl4 MFC set to  0.000000
11/14/2011	8:10:38 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:10:38 PM	Tube furnace set to 150
11/14/2011	8:11:08 PM	H2 valve closed
11/14/2011	8:11:08 PM	BCl3 valve closed
11/14/2011	8:11:08 PM	PH3 valve closed
11/14/2011	8:11:08 PM	SiCl4 pre valve closed
11/14/2011	8:11:08 PM	SiCl4 post valve closed
11/14/2011	8:11:08 PM	Bypass valve closed
11/14/2011	8:11:08 PM	Bubbler valve closed
11/14/2011	8:11:08 PM	Helium valve opened
11/14/2011	8:11:08 PM	Main Vac valve opened
11/14/2011	8:11:08 PM	Helium MFC set to  20.000000
11/14/2011	8:11:08 PM	H2 MFC set to  0.000000
11/14/2011	8:11:08 PM	BCl3 MFC set to  0.000000
11/14/2011	8:11:08 PM	PHl3 MFC set to  0.000000
11/14/2011	8:11:08 PM	SiCl4 MFC set to  0.000000
11/14/2011	8:11:08 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:11:09 PM	Tube furnace set to 150
11/14/2011	8:11:39 PM	Helium valve closed
11/14/2011	8:11:39 PM	H2 valve closed
11/14/2011	8:11:39 PM	BCl3 valve closed
11/14/2011	8:11:39 PM	PH3 valve closed
11/14/2011	8:11:39 PM	SiCl4 pre valve closed
11/14/2011	8:11:39 PM	SiCl4 post valve closed
11/14/2011	8:11:39 PM	Bypass valve closed
11/14/2011	8:11:39 PM	Bubbler valve closed
11/14/2011	8:11:39 PM	Main Vac valve opened
11/14/2011	8:11:39 PM	Helium MFC set to  0.000000
11/14/2011	8:11:39 PM	H2 MFC set to  0.000000
11/14/2011	8:11:39 PM	BCl3 MFC set to  0.000000
11/14/2011	8:11:39 PM	PHl3 MFC set to  0.000000
11/14/2011	8:11:39 PM	SiCl4 MFC set to  0.000000
11/14/2011	8:11:39 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:11:39 PM	Tube furnace set to 150
11/14/2011	8:12:09 PM	H2 valve closed
11/14/2011	8:12:09 PM	BCl3 valve closed
11/14/2011	8:12:09 PM	PH3 valve closed
11/14/2011	8:12:09 PM	SiCl4 pre valve closed
11/14/2011	8:12:09 PM	SiCl4 post valve closed
11/14/2011	8:12:09 PM	Bypass valve closed
11/14/2011	8:12:09 PM	Bubbler valve closed
11/14/2011	8:12:09 PM	Helium valve opened
11/14/2011	8:12:09 PM	Main Vac valve opened
11/14/2011	8:12:09 PM	Helium MFC set to  20.000000
11/14/2011	8:12:09 PM	H2 MFC set to  0.000000
11/14/2011	8:12:09 PM	BCl3 MFC set to  0.000000
11/14/2011	8:12:09 PM	PHl3 MFC set to  0.000000
11/14/2011	8:12:09 PM	SiCl4 MFC set to  0.000000
11/14/2011	8:12:09 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:12:09 PM	Tube furnace set to 150
11/14/2011	8:12:39 PM	Helium valve closed
11/14/2011	8:12:39 PM	H2 valve closed
11/14/2011	8:12:39 PM	BCl3 valve closed
11/14/2011	8:12:39 PM	PH3 valve closed
11/14/2011	8:12:39 PM	SiCl4 pre valve closed
11/14/2011	8:12:39 PM	SiCl4 post valve closed
11/14/2011	8:12:39 PM	Bypass valve closed
11/14/2011	8:12:39 PM	Bubbler valve closed
11/14/2011	8:12:39 PM	Main Vac valve opened
11/14/2011	8:12:39 PM	Helium MFC set to  0.000000
11/14/2011	8:12:39 PM	H2 MFC set to  0.000000
11/14/2011	8:12:39 PM	BCl3 MFC set to  0.000000
11/14/2011	8:12:39 PM	PHl3 MFC set to  0.000000
11/14/2011	8:12:39 PM	SiCl4 MFC set to  0.000000
11/14/2011	8:12:39 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:12:39 PM	Tube furnace set to 150
11/14/2011	8:13:09 PM	H2 valve closed
11/14/2011	8:13:09 PM	BCl3 valve closed
11/14/2011	8:13:09 PM	PH3 valve closed
11/14/2011	8:13:09 PM	SiCl4 pre valve closed
11/14/2011	8:13:09 PM	SiCl4 post valve closed
11/14/2011	8:13:09 PM	Bypass valve closed
11/14/2011	8:13:09 PM	Bubbler valve closed
11/14/2011	8:13:09 PM	Helium valve opened
11/14/2011	8:13:09 PM	Main Vac valve opened
11/14/2011	8:13:09 PM	Helium MFC set to  20.000000
11/14/2011	8:13:09 PM	H2 MFC set to  0.000000
11/14/2011	8:13:09 PM	BCl3 MFC set to  0.000000
11/14/2011	8:13:09 PM	PHl3 MFC set to  0.000000
11/14/2011	8:13:09 PM	SiCl4 MFC set to  0.000000
11/14/2011	8:13:09 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:13:10 PM	Tube furnace set to 150
11/14/2011	8:13:40 PM	Helium valve closed
11/14/2011	8:13:40 PM	H2 valve closed
11/14/2011	8:13:40 PM	BCl3 valve closed
11/14/2011	8:13:40 PM	PH3 valve closed
11/14/2011	8:13:40 PM	SiCl4 pre valve closed
11/14/2011	8:13:40 PM	SiCl4 post valve closed
11/14/2011	8:13:40 PM	Bypass valve closed
11/14/2011	8:13:40 PM	Bubbler valve closed
11/14/2011	8:13:40 PM	Main Vac valve opened
11/14/2011	8:13:40 PM	Helium MFC set to  0.000000
11/14/2011	8:13:40 PM	H2 MFC set to  0.000000
11/14/2011	8:13:40 PM	BCl3 MFC set to  0.000000
11/14/2011	8:13:40 PM	PHl3 MFC set to  0.000000
11/14/2011	8:13:40 PM	SiCl4 MFC set to  0.000000
11/14/2011	8:13:40 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:13:40 PM	Tube furnace set to 150
11/14/2011	8:14:10 PM	H2 valve closed
11/14/2011	8:14:10 PM	BCl3 valve closed
11/14/2011	8:14:10 PM	PH3 valve closed
11/14/2011	8:14:10 PM	SiCl4 pre valve closed
11/14/2011	8:14:10 PM	SiCl4 post valve closed
11/14/2011	8:14:10 PM	Bypass valve closed
11/14/2011	8:14:10 PM	Bubbler valve closed
11/14/2011	8:14:10 PM	Helium valve opened
11/14/2011	8:14:10 PM	Main Vac valve opened
11/14/2011	8:14:10 PM	Helium MFC set to  20.000000
11/14/2011	8:14:10 PM	H2 MFC set to  0.000000
11/14/2011	8:14:10 PM	BCl3 MFC set to  0.000000
11/14/2011	8:14:10 PM	PHl3 MFC set to  0.000000
11/14/2011	8:14:10 PM	SiCl4 MFC set to  0.000000
11/14/2011	8:14:10 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:14:10 PM	Tube furnace set to 150
11/14/2011	8:14:40 PM	Helium valve closed
11/14/2011	8:14:40 PM	H2 valve closed
11/14/2011	8:14:40 PM	BCl3 valve closed
11/14/2011	8:14:40 PM	PH3 valve closed
11/14/2011	8:14:40 PM	SiCl4 pre valve closed
11/14/2011	8:14:40 PM	SiCl4 post valve closed
11/14/2011	8:14:40 PM	Bypass valve closed
11/14/2011	8:14:40 PM	Bubbler valve closed
11/14/2011	8:14:40 PM	Main Vac valve opened
11/14/2011	8:14:40 PM	Helium MFC set to  0.000000
11/14/2011	8:14:40 PM	H2 MFC set to  0.000000
11/14/2011	8:14:40 PM	BCl3 MFC set to  0.000000
11/14/2011	8:14:40 PM	PHl3 MFC set to  0.000000
11/14/2011	8:14:40 PM	SiCl4 MFC set to  0.000000
11/14/2011	8:14:40 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:14:40 PM	Tube furnace set to 150
11/14/2011	8:14:41 PM	Run finished at 8:14 PM
11/14/2011	8:15:10 PM	Main Vac valve closed
11/14/2011	8:15:24 PM	Main Vac valve opened
11/14/2011	8:17:09 PM	Recipe started at 8:17 PM
11/14/2011	8:17:09 PM	Helium valve closed
11/14/2011	8:17:09 PM	H2 valve closed
11/14/2011	8:17:09 PM	BCl3 valve closed
11/14/2011	8:17:09 PM	PH3 valve closed
11/14/2011	8:17:09 PM	SiCl4 pre valve closed
11/14/2011	8:17:09 PM	SiCl4 post valve closed
11/14/2011	8:17:09 PM	Main Vac valve closed
11/14/2011	8:17:09 PM	Bypass valve closed
11/14/2011	8:17:09 PM	Bubbler valve closed
11/14/2011	8:17:09 PM	Helium MFC set to  0.000000
11/14/2011	8:17:09 PM	H2 MFC set to  0.000000
11/14/2011	8:17:09 PM	BCl3 MFC set to  0.000000
11/14/2011	8:17:09 PM	PHl3 MFC set to  0.000000
11/14/2011	8:17:09 PM	SiCl4 MFC set to  0.000000
11/14/2011	8:17:09 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:17:09 PM	Tube furnace set to 0
11/14/2011	8:17:12 PM	Helium valve closed
11/14/2011	8:17:12 PM	BCl3 valve closed
11/14/2011	8:17:12 PM	PH3 valve closed
11/14/2011	8:17:12 PM	SiCl4 pre valve closed
11/14/2011	8:17:12 PM	SiCl4 post valve closed
11/14/2011	8:17:12 PM	Main Vac valve closed
11/14/2011	8:17:12 PM	Bypass valve closed
11/14/2011	8:17:12 PM	Bubbler valve closed
11/14/2011	8:17:12 PM	H2 valve opened
11/14/2011	8:17:12 PM	Helium MFC set to  0.000000
11/14/2011	8:17:12 PM	H2 MFC set to  500.000000
11/14/2011	8:17:12 PM	BCl3 MFC set to  0.000000
11/14/2011	8:17:12 PM	PHl3 MFC set to  0.000000
11/14/2011	8:17:12 PM	SiCl4 MFC set to  0.000000
11/14/2011	8:17:12 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:17:13 PM	Tube furnace set to 0
11/14/2011	8:18:17 PM	Helium valve closed
11/14/2011	8:18:17 PM	BCl3 valve closed
11/14/2011	8:18:17 PM	PH3 valve closed
11/14/2011	8:18:17 PM	SiCl4 pre valve closed
11/14/2011	8:18:17 PM	SiCl4 post valve closed
11/14/2011	8:18:17 PM	Main Vac valve closed
11/14/2011	8:18:17 PM	Bypass valve closed
11/14/2011	8:18:17 PM	H2 valve opened
11/14/2011	8:18:17 PM	Bubbler valve opened
11/14/2011	8:18:17 PM	Helium MFC set to  0.000000
11/14/2011	8:18:17 PM	H2 MFC set to  500.000000
11/14/2011	8:18:17 PM	BCl3 MFC set to  0.000000
11/14/2011	8:18:17 PM	PHl3 MFC set to  0.000000
11/14/2011	8:18:17 PM	SiCl4 MFC set to  0.000000
11/14/2011	8:18:17 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:18:17 PM	Tube furnace set to 0
11/14/2011	8:18:18 PM	Helium valve closed
11/14/2011	8:18:18 PM	BCl3 valve closed
11/14/2011	8:18:18 PM	PH3 valve closed
11/14/2011	8:18:18 PM	SiCl4 pre valve closed
11/14/2011	8:18:18 PM	SiCl4 post valve closed
11/14/2011	8:18:18 PM	Main Vac valve closed
11/14/2011	8:18:18 PM	Bypass valve closed
11/14/2011	8:18:18 PM	H2 valve opened
11/14/2011	8:18:18 PM	Bubbler valve opened
11/14/2011	8:18:18 PM	Helium MFC set to  0.000000
11/14/2011	8:18:18 PM	H2 MFC set to  500.000000
11/14/2011	8:18:18 PM	BCl3 MFC set to  0.000000
11/14/2011	8:18:18 PM	PHl3 MFC set to  0.000000
11/14/2011	8:18:18 PM	SiCl4 MFC set to  0.000000
11/14/2011	8:18:18 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:18:18 PM	Tube furnace set to 1000
11/14/2011	8:48:18 PM	Helium valve closed
11/14/2011	8:48:18 PM	BCl3 valve closed
11/14/2011	8:48:18 PM	PH3 valve closed
11/14/2011	8:48:18 PM	Main Vac valve closed
11/14/2011	8:48:18 PM	Bypass valve closed
11/14/2011	8:48:18 PM	H2 valve opened
11/14/2011	8:48:18 PM	SiCl4 pre valve opened
11/14/2011	8:48:18 PM	SiCl4 post valve opened
11/14/2011	8:48:18 PM	Bubbler valve opened
11/14/2011	8:48:18 PM	Helium MFC set to  0.000000
11/14/2011	8:48:18 PM	H2 MFC set to  500.000000
11/14/2011	8:48:18 PM	BCl3 MFC set to  0.000000
11/14/2011	8:48:18 PM	PHl3 MFC set to  0.000000
11/14/2011	8:48:18 PM	SiCl4 MFC set to  32.000000
11/14/2011	8:48:18 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:48:18 PM	Tube furnace set to 1000
11/14/2011	8:58:18 PM	Helium valve closed
11/14/2011	8:58:18 PM	BCl3 valve closed
11/14/2011	8:58:18 PM	PH3 valve closed
11/14/2011	8:58:18 PM	SiCl4 pre valve closed
11/14/2011	8:58:18 PM	SiCl4 post valve closed
11/14/2011	8:58:18 PM	Main Vac valve closed
11/14/2011	8:58:18 PM	Bypass valve closed
11/14/2011	8:58:18 PM	H2 valve opened
11/14/2011	8:58:18 PM	Bubbler valve opened
11/14/2011	8:58:18 PM	Helium MFC set to  0.000000
11/14/2011	8:58:18 PM	H2 MFC set to  500.000000
11/14/2011	8:58:18 PM	BCl3 MFC set to  0.000000
11/14/2011	8:58:18 PM	PHl3 MFC set to  0.000000
11/14/2011	8:58:18 PM	SiCl4 MFC set to  0.000000
11/14/2011	8:58:18 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	8:58:18 PM	Tube furnace set to 750
11/14/2011	9:08:18 PM	H2 valve closed
11/14/2011	9:08:18 PM	BCl3 valve closed
11/14/2011	9:08:18 PM	PH3 valve closed
11/14/2011	9:08:18 PM	SiCl4 pre valve closed
11/14/2011	9:08:18 PM	SiCl4 post valve closed
11/14/2011	9:08:18 PM	Main Vac valve closed
11/14/2011	9:08:18 PM	Bypass valve closed
11/14/2011	9:08:18 PM	Helium valve opened
11/14/2011	9:08:18 PM	Bubbler valve opened
11/14/2011	9:08:18 PM	Helium MFC set to  500.000000
11/14/2011	9:08:18 PM	H2 MFC set to  0.000000
11/14/2011	9:08:18 PM	BCl3 MFC set to  0.000000
11/14/2011	9:08:18 PM	PHl3 MFC set to  0.000000
11/14/2011	9:08:18 PM	SiCl4 MFC set to  0.000000
11/14/2011	9:08:18 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	9:08:18 PM	Tube furnace set to 0
11/14/2011	9:28:18 PM	Helium valve closed
11/14/2011	9:28:18 PM	H2 valve closed
11/14/2011	9:28:18 PM	BCl3 valve closed
11/14/2011	9:28:18 PM	PH3 valve closed
11/14/2011	9:28:18 PM	SiCl4 pre valve closed
11/14/2011	9:28:18 PM	SiCl4 post valve closed
11/14/2011	9:28:18 PM	Main Vac valve closed
11/14/2011	9:28:18 PM	Bypass valve closed
11/14/2011	9:28:18 PM	Bubbler valve closed
11/14/2011	9:28:18 PM	Helium MFC set to  0.000000
11/14/2011	9:28:18 PM	H2 MFC set to  0.000000
11/14/2011	9:28:18 PM	BCl3 MFC set to  0.000000
11/14/2011	9:28:18 PM	PHl3 MFC set to  0.000000
11/14/2011	9:28:18 PM	SiCl4 MFC set to  0.000000
11/14/2011	9:28:18 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	9:28:19 PM	Tube furnace set to 0
11/14/2011	9:28:20 PM	Run finished at 9:28 PM
11/14/2011	10:05:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2011	10:05:40 PM	Recipe started at 10:05 PM
11/14/2011	10:05:40 PM	Helium valve closed
11/14/2011	10:05:40 PM	H2 valve closed
11/14/2011	10:05:40 PM	BCl3 valve closed
11/14/2011	10:05:40 PM	PH3 valve closed
11/14/2011	10:05:40 PM	SiCl4 pre valve closed
11/14/2011	10:05:40 PM	SiCl4 post valve closed
11/14/2011	10:05:40 PM	Main Vac valve closed
11/14/2011	10:05:40 PM	Bypass valve closed
11/14/2011	10:05:40 PM	Bubbler valve closed
11/14/2011	10:05:40 PM	Helium MFC set to  0.000000
11/14/2011	10:05:40 PM	H2 MFC set to  0.000000
11/14/2011	10:05:40 PM	BCl3 MFC set to  0.000000
11/14/2011	10:05:40 PM	PHl3 MFC set to  0.000000
11/14/2011	10:05:40 PM	SiCl4 MFC set to  0.000000
11/14/2011	10:05:40 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	10:05:41 PM	Tube furnace set to 0
11/14/2011	10:05:44 PM	H2 valve closed
11/14/2011	10:05:44 PM	BCl3 valve closed
11/14/2011	10:05:44 PM	PH3 valve closed
11/14/2011	10:05:44 PM	SiCl4 pre valve closed
11/14/2011	10:05:44 PM	SiCl4 post valve closed
11/14/2011	10:05:44 PM	Main Vac valve closed
11/14/2011	10:05:44 PM	Bypass valve closed
11/14/2011	10:05:44 PM	Bubbler valve closed
11/14/2011	10:05:44 PM	Helium valve opened
11/14/2011	10:05:44 PM	Helium MFC set to  500.000000
11/14/2011	10:05:44 PM	H2 MFC set to  0.000000
11/14/2011	10:05:44 PM	BCl3 MFC set to  0.000000
11/14/2011	10:05:44 PM	PHl3 MFC set to  0.000000
11/14/2011	10:05:44 PM	SiCl4 MFC set to  0.000000
11/14/2011	10:05:44 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	10:05:44 PM	Tube furnace set to 0
11/14/2011	10:05:45 PM	Helium valve closed
11/14/2011	10:05:45 PM	H2 valve closed
11/14/2011	10:05:45 PM	BCl3 valve closed
11/14/2011	10:05:45 PM	PH3 valve closed
11/14/2011	10:05:45 PM	SiCl4 pre valve closed
11/14/2011	10:05:45 PM	SiCl4 post valve closed
11/14/2011	10:05:45 PM	Main Vac valve closed
11/14/2011	10:05:45 PM	Bypass valve closed
11/14/2011	10:05:45 PM	Bubbler valve closed
11/14/2011	10:05:45 PM	Helium MFC set to  0.000000
11/14/2011	10:05:45 PM	H2 MFC set to  0.000000
11/14/2011	10:05:45 PM	BCl3 MFC set to  0.000000
11/14/2011	10:05:45 PM	PHl3 MFC set to  0.000000
11/14/2011	10:05:45 PM	SiCl4 MFC set to  0.000000
11/14/2011	10:05:45 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	10:05:45 PM	Tube furnace set to 0
11/14/2011	10:05:46 PM	Run finished at 10:05 PM
11/14/2011	10:05:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2011	10:08:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2011	10:08:52 PM	Recipe started at 10:08 PM
11/14/2011	10:08:52 PM	Helium valve closed
11/14/2011	10:08:52 PM	H2 valve closed
11/14/2011	10:08:52 PM	BCl3 valve closed
11/14/2011	10:08:52 PM	PH3 valve closed
11/14/2011	10:08:52 PM	SiCl4 pre valve closed
11/14/2011	10:08:52 PM	SiCl4 post valve closed
11/14/2011	10:08:52 PM	Main Vac valve closed
11/14/2011	10:08:52 PM	Bubbler valve closed
11/14/2011	10:08:52 PM	Bypass valve opened
11/14/2011	10:08:52 PM	Helium MFC set to  0.000000
11/14/2011	10:08:52 PM	H2 MFC set to  0.000000
11/14/2011	10:08:52 PM	BCl3 MFC set to  0.000000
11/14/2011	10:08:52 PM	PHl3 MFC set to  0.000000
11/14/2011	10:08:52 PM	SiCl4 MFC set to  0.000000
11/14/2011	10:08:52 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	10:08:52 PM	Tube furnace set to 0
11/14/2011	10:09:58 PM	Helium valve closed
11/14/2011	10:09:58 PM	H2 valve closed
11/14/2011	10:09:58 PM	BCl3 valve closed
11/14/2011	10:09:58 PM	PH3 valve closed
11/14/2011	10:09:58 PM	SiCl4 pre valve closed
11/14/2011	10:09:58 PM	SiCl4 post valve closed
11/14/2011	10:09:58 PM	Main Vac valve closed
11/14/2011	10:09:58 PM	Bubbler valve closed
11/14/2011	10:09:58 PM	Bypass valve opened
11/14/2011	10:09:58 PM	Helium MFC set to  0.000000
11/14/2011	10:09:58 PM	H2 MFC set to  0.000000
11/14/2011	10:09:58 PM	BCl3 MFC set to  0.000000
11/14/2011	10:09:58 PM	PHl3 MFC set to  0.000000
11/14/2011	10:09:58 PM	SiCl4 MFC set to  0.000000
11/14/2011	10:09:58 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	10:09:58 PM	Tube furnace set to 0
11/14/2011	10:10:58 PM	Helium valve closed
11/14/2011	10:10:58 PM	H2 valve closed
11/14/2011	10:10:58 PM	BCl3 valve closed
11/14/2011	10:10:58 PM	PH3 valve closed
11/14/2011	10:10:58 PM	SiCl4 pre valve closed
11/14/2011	10:10:58 PM	SiCl4 post valve closed
11/14/2011	10:10:58 PM	Bypass valve closed
11/14/2011	10:10:58 PM	Bubbler valve closed
11/14/2011	10:10:58 PM	Main Vac valve opened
11/14/2011	10:10:58 PM	Helium MFC set to  0.000000
11/14/2011	10:10:58 PM	H2 MFC set to  0.000000
11/14/2011	10:10:58 PM	BCl3 MFC set to  0.000000
11/14/2011	10:10:58 PM	PHl3 MFC set to  0.000000
11/14/2011	10:10:58 PM	SiCl4 MFC set to  0.000000
11/14/2011	10:10:58 PM	Bypass solenoid MFC set to  0.000000
11/14/2011	10:10:58 PM	Tube furnace set to 0
11/14/2011	10:10:59 PM	Run finished at 10:10 PM
11/14/2011	10:10:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
